公开(公告)号：US07428039B2

公开(公告)日：2008-09-23

申请号：US11281847

申请日：2005-11-17

申请人： Joerg Ferber

发明人： Joerg Ferber

IPC分类号： G03B27/54 ,  G03B27/42

CPC分类号： G03B27/54

摘要： An optical system for projecting a laser-beam on a mask to illuminate the mask includes a beam homogenizing arrangement including spaced arrays of microlenses. The beam homogenizing arrangement redistributes light in the laser beam such that the intensity of light in the laser-beam on the mask is nearly uniform along a transverse axis of the laser-beam. A stop extending partially into the laser-beam between the microlens arrays provides a more uniform light-intensity on the mask along the transverse axis than can be achieved by the microlens arrays alone.

摘要翻译： 用于将激光束投射在掩模上以照亮掩模的光学系统包括包括间隔开的微透镜阵列的光束均匀化装置。 光束均匀化布置将激光束中的光重新分布，使得掩模上的激光束中的光的强度沿着激光束的横轴几乎均匀。 在微透镜阵列之间部分地延伸到激光束中的停止在沿着横轴的掩模上提供比由微透镜阵列单独实现的更均匀的光强度。

公开(公告)号：US07375915B1

公开(公告)日：2008-05-20

申请号：US11101088

申请日：2005-04-07

申请人： Erhard Schreck ,  Joerg Ferber ,  Michael Mallary ,  Anthony R. Hurtado ,  Chris Hawks ,  Scott Hughes

发明人： Erhard Schreck ,  Joerg Ferber ,  Michael Mallary ,  Anthony R. Hurtado ,  Chris Hawks ,  Scott Hughes

IPC分类号： G11B5/596

CPC分类号： G11B5/6064 ,  G11B5/3133 ,  G11B5/607

摘要： A disk drive for storing data includes a drive housing, a storage disk that is rotatably coupled to the drive housing, a slider assembly positioned near the storage disk, and a drive circuitry. The slider assembly includes a head that interacts with the storage disk during a data transfer operation and a slider mover. The drive circuitry directs a first power level to slider mover to maintain the head at a first HtD spacing, and a second power level to the slider mover to maintain the head at a second HtD spacing, and a variable, transition power to the slider mover during a transition between the first power level being directed to the slider mover and the second power level being directed to the slider mover. The transition power is tailored to rapidly move the head between the HtD spacings.

摘要翻译： 用于存储数据的磁盘驱动器包括驱动器壳体，可旋转地联接到驱动器壳体的存储盘，位于存储盘附近的滑块组件和驱动电路。 滑动器组件包括在数据传送操作期间与存储盘相互作用的头部和滑块移动器。 驱动电路将第一功率电平引导到滑块移动器以将头部保持在第一HtD间隔，并且将滑块移动器的第二功率电平维持在第二HtD间隔的头部，以及向滑块移动器的可变过渡功率 在所述第一功率水平被引导到所述滑块移动器和所述第二功率水平之间的转换期间被引导到所述滑块移动器。 过渡功率被定制为在HtD间距之间快速移动头部。

公开(公告)号：US20070148567A1

公开(公告)日：2007-06-28

申请号：US11298281

申请日：2005-12-09

申请人： Joerg Ferber ,  Hiroshi Shimizu

发明人： Joerg Ferber ,  Hiroshi Shimizu

IPC分类号： G03C5/00

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B23K26/384 ,  B23K26/389 ,  B41J2/162 ,  B41J2002/14475

摘要： An inkjet aperture in a substrate has a compound cross-section including a circular portion and an elongated trough-shaped portion. The aperture is formed in the substrate by laser drilling. A laser beam is projected on a mask having circular apertures corresponding to the circular portion of the inkjet aperture cross-section. An image of the mask is projected by a lens onto the substrate while reciprocally tilting a tiltable plate between the mask and the lens. This forms the trough-shaped portion of the aperture. The tiltable plate is then replaced by a fixed plate of equal thickness and the circular portion of the aperture is drilled to complete the aperture.

摘要翻译： 衬底中的喷墨孔具有包括圆形部分和细长槽形部分的复合截面。 孔通过激光钻孔形成在衬底中。 激光束投影在具有对应于喷墨孔横截面的圆形部分的圆形孔的掩模上。 掩模的图像由透镜投影到基板上，同时在面罩和透镜之间往复地倾斜可倾斜板。 这形成孔的槽形部分。 然后用相等厚度的固定板代替可倾斜板，并钻孔孔的圆形部分以完成孔。

公开(公告)号：US20070109519A1

公开(公告)日：2007-05-17

申请号：US11281847

申请日：2005-11-17

申请人： Joerg Ferber

发明人： Joerg Ferber

IPC分类号： G03B27/54

CPC分类号： G03B27/54

摘要： An optical system for projecting a laser-beam on a mask to illuminate the mask includes a beam homogenizing arrangement including spaced arrays of microlenses. The beam homogenizing arrangement redistributes light in the laser beam such that the intensity of light in the laser-beam on the mask is nearly uniform along a transverse axis of the laser-beam. A stop extending partially into the laser-beam between the microlens arrays provides a more uniform light-intensity on the mask along the transverse axis than can be achieved by the microlens arrays alone.

摘要翻译： 用于将激光束投射在掩模上以照亮掩模的光学系统包括包括间隔开的微透镜阵列的光束均匀化装置。 光束均匀化布置将激光束中的光重新分布，使得掩模上的激光束中的光的强度沿着激光束的横轴几乎均匀。 在微透镜阵列之间部分地延伸到激光束中的停止在沿着横轴的掩模上提供比由微透镜阵列单独实现的更均匀的光强度。

公开(公告)号：US20060175557A1

公开(公告)日：2006-08-10

申请号：US11348185

申请日：2006-02-06

申请人： Joerg Ferber ,  Henning Schmidt

发明人： Joerg Ferber ,  Henning Schmidt

IPC分类号： G21G5/00 ,  A61N5/00

CPC分类号： G03F7/70108 ,  G03F7/70225 ,  G03F7/70233

摘要： An optical system for projecting an image of a photomask on a substrate, using a Schwarzschild objective includes an excimer laser, beam shaping optics for shaping a laser beam from the laser and a beam-dividing prism. The beam-dividing prism has a dividing-face including four facets inclined at an angle to each other. The four facets divide the shaped beam into four beam-portions propagating at an angle to the system axis. The beam-portions overlap at the photomask and mutually diverge into the entrance aperture in the concave mirror of the Schwarzschild objective such that all of the light in the beam portions is incident on the convex mirror of the objective in an annular zone outside of the central obscuration zone of the convex mirror. This essentially eliminates transfer losses normally caused by this obscuration zone.

摘要翻译： 用于使用Schwarzschild物镜将光掩模图像投影在基板上的光学系统包括准分子激光器，用于使来自激光器的激光束成形的光束整形光学元件和分束棱镜。 分束棱镜具有包括相互倾斜的四个小面的分割面。 四个小面将成形的光束分成与系统轴成一定角度传播的四个光束部分。 光束部分在光掩模处重叠并且相互分开进入施瓦茨物镜的凹面镜中的入口孔，使得光束部分中的所有光在中心的外部的环形区域中入射到物镜的凸面镜上 凸面镜的遮蔽区。 这基本上消除了通常由该遮蔽区引起的传输损耗。