公开(公告)号：US20230204503A1

公开(公告)日：2023-06-29

申请号：US17882673

申请日：2022-08-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Martin Priwisch ,  Jongmin Yoon ,  Suhwan Park ,  Inkeun Baek

IPC: G01N21/3581 ,  G01N21/95 ,  G01Q60/22 ,  G01R31/311

CPC classification number: G01N21/3581 ,  G01N21/9501 ,  G01Q60/22 ,  G01R31/311

Abstract: An inspection apparatus includes: a first probe including a receiver antenna configured to detect the terahertz wave emitted by an inspection signal source and that has passed through the wafer, wherein the first probe includes: a first probe tip in which the receiver antenna is embedded, the receiver antenna including a first photoconductive switch; a first printed circuit board on which the first probe tip is mounted; a first optical bracket coupled to the first printed circuit board; a first optical connector configured to transmit a first laser beam into the first probe, and coupled to the first optical bracket, wherein the first laser beam is configured to excite the first photoconductive switch.

公开(公告)号：US11579167B2

公开(公告)日：2023-02-14

申请号：US17333924

申请日：2021-05-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongmin Yoon ,  Namil Koo ,  Nagel Michael ,  Suhwan Park ,  Junbum Park ,  Inkeun Baek ,  Sion Lee

IPC: G01Q60/22 ,  G01N21/68 ,  H05K9/00

Abstract: A near-field detection system includes include an electric field generator configured to apply an electric field to an analysis sample, a probe configured to detect a near field that has passed through the analysis sample, a current detector connected to the probe, and a laser system irradiating a laser to each of the electric field generator and the probe. The probe includes a cantilever substrate, an antenna electrode on the cantilever substrate, an electromagnetic wave blocking layer exposing a sensing region of the cantilever substrate, the electromagnetic wave blocking layer including a conductive material, and an insulating layer interposed between the cantilever substrate and the electromagnetic wave blocking layer such that the insulating layer is between the antenna electrode and the electromagnetic wave blocking layer.