CRUCIBLE APPARATUS AND DEPOSITION APPARATUS WITH THE SAME
    12.
    发明申请
    CRUCIBLE APPARATUS AND DEPOSITION APPARATUS WITH THE SAME 审中-公开
    可疑装置和沉积装置

    公开(公告)号:US20140352616A1

    公开(公告)日:2014-12-04

    申请号:US14185246

    申请日:2014-02-20

    CPC classification number: C23C14/243

    Abstract: A crucible apparatus comprises: a crucible having an opening, the crucible being configured to store an organic material; a heating device surrounding the exterior of the crucible, the heating device being configured to provide heat to the crucible; at least one thermal ball configured to deliver the heat provided by the heating device to the organic material within the crucible so as to sublimate the organic material; and at least one spray nozzle disposed at the opening of the crucible and configured to spray the sublimated organic material.

    Abstract translation: 坩埚装置包括:具有开口的坩埚,所述坩埚构造成存储有机材料; 围绕所述坩埚外部的加热装置,所述加热装置被配置为向所述坩埚提供热量; 至少一个热球,被配置为将由所述加热装置提供的热量传递到所述坩埚内的有机材料,以使所述有机材料升华; 以及设置在坩埚的开口处并且被配置为喷射升华的有机材料的至少一个喷嘴。

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