公开(公告)号：US20170098798A1

公开(公告)日：2017-04-06

申请号：US15270536

申请日：2016-09-20

Applicant: Samsung Display Co., Ltd.

Inventor： Eungseok Park ,  Minho Oh ,  Wonmin Yun ,  Byoungduk Lee ,  Yunah Chung ,  Yoonhyeung Cho ,  Yongchan Ju

IPC: H01L51/52 ,  H01L27/32 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/5253 ,  H01L27/3211 ,  H01L27/3244 ,  H01L2227/323 ,  H01L2251/5338

Abstract: A display apparatus includes a substrate, a display element disposed on the substrate, a first inorganic film layer disposed on the display element, a first organic film layer disposed on the first inorganic film layer, a second organic film layer disposed on the first organic film layer and including a wrinkled upper surface, and a second inorganic film layer disposed on the second organic film layer and including a shape corresponding to the wrinkled upper surface of the second organic film layer.

公开(公告)号：US20160149133A1

公开(公告)日：2016-05-26

申请号：US14706691

申请日：2015-05-07

Applicant: Samsung Display Co., Ltd.

Inventor： Yongtack Kim ,  Jongwoo Kim ,  Jiyoung Moon ,  Minho Oh ,  Yoonhyeung Cho

IPC: H01L51/00 ,  C23C14/34 ,  C23C14/58 ,  C23C14/14 ,  C23C16/04 ,  C23C14/35 ,  C23C14/08

CPC classification number: C23C14/58 ,  C23C14/042 ,  C23C14/3407 ,  C23C14/3485 ,  C23C14/352 ,  C23C16/042 ,  H01J37/32623

Abstract: A deposition mask comprises a mask body comprising a plurality of through holes; and a deposition layer formed on external surfaces of the mask body. A method of manufacturing a deposition mask comprises: installing a deposition mask body in a chamber; forming a magnetic field between a plurality of magnet units within the chamber, wherein the deposition mask body is disposed between the magnet units; and applying voltages to first and second sputtering targets comprising a material to generate electric discharge such that particles of the material are sputtered from the first and second sputtering targets and deposited on the deposition mask body, thereby making a deposition mask with a layer of the material. The voltages having different magnitudes are applied to the first and second sputtering targets.

Abstract translation: 沉积掩模包括：掩模体，其包括多个通孔; 以及形成在面罩主体的外表面上的沉积层。 制造沉积掩模的方法包括：将沉积掩模体安装在腔室中; 在所述室内的多个磁体单元之间形成磁场，其中所述沉积掩模体设置在所述磁体单元之间; 以及向包括材料的第一和第二溅射靶施加电压以产生放电，使得所述材料的颗粒从所述第一和第二溅射靶溅射并沉积在所述沉积掩模体上，从而制备具有所述材料层的沉积掩模 。 具有不同幅度的电压被施加到第一和第二溅射靶。