公开(公告)号：US10041173B2

公开(公告)日：2018-08-07

申请号：US14793562

申请日：2015-07-07

Applicant: Samsung Display Co., Ltd.

Inventor： Myungsoo Huh ,  Dongkyun Ko ,  Choelmin Jang ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh

IPC: C23C16/50 ,  C23C16/54 ,  H01J37/32 ,  C23C16/455 ,  H01L51/52

Abstract: An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.

公开(公告)号：US20170170429A1

公开(公告)日：2017-06-15

申请号：US15442095

申请日：2017-02-24

Applicant: Samsung Display Co., Ltd. ,  Research & Business Foundation Sungkyunkwan University

Inventor： Myungsoo Huh ,  Sungmin Cho ,  Dongkyun Ko ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh ,  Sangjoon Seo ,  Seungwoo Seo ,  Choelmin Jang

IPC: H01L51/52 ,  H01L51/56 ,  C23C16/455

CPC classification number: H01L51/5253 ,  C23C16/455 ,  C23C16/45525 ,  C23C16/45565 ,  H01L27/3244 ,  H01L51/5256 ,  H01L51/5259 ,  H01L51/56 ,  H01L2251/303

Abstract: A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).