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11.发明授权公开(公告)号：US12168823B2
公开(公告)日：2024-12-17
申请号：US17217489
申请日：2021-03-30
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin Moon , Minho Moon , Sungsoon Im , Junho Jo , Seungyong Song
Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.
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公开(公告)号：US20240324435A1
公开(公告)日：2024-09-26
申请号：US18480544
申请日：2023-10-04
Applicant: Samsung Display Co., Ltd.
Inventor： Jeongkuk Kim , Sungsoon Im , Wonje Cho
IPC: H10K71/20 , G03F7/00 , G09G3/3233 , H10K59/12
CPC classification number: H10K71/233 , G03F7/70058 , G09G3/3233 , H10K59/1201 , G09G2300/0426 , G09G2300/0842
Abstract: An apparatus for manufacturing a display device includes a mask assembly arranged inside a chamber and facing a display substrate, a magnetic force portion arranged inside the chamber and applying a magnetic force to the mask assembly, and a deposition source which is arranged inside the chamber, faces the mask assembly, and supplies a deposition material that passes through the mask assembly and is deposited on the display substrate. The mask assembly includes a first mask layer including a first mask opening, and a second mask layer disposed on the first mask layer. The second mask layer includes a metal layer including a metal opening corresponding to the first mask opening, and an inorganic layer including an inorganic opening corresponding to the first mask opening and the metal opening. In a plan view, a width of the metal opening is greater than a width of the inorganic opening.
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公开(公告)号：US20240102145A1
公开(公告)日：2024-03-28
申请号：US18347104
申请日：2023-07-05
Applicant: Samsung Display Co., Ltd.
Inventor： Heemin Park , Arong Kim , Youngmin Moon , Youngho Park , Areum Lee , Sungsoon Im , Junho Jo
CPC classification number: C23C14/042 , H10K59/1201 , H10K71/166
Abstract: An apparatus for manufacturing a display device includes a mask assembly, and a deposition source that supplies a deposition material toward the mask assembly. The mask assembly includes a mask frame including a first opening, a sheet portion fixed on the mask, overlapping a portion of the first opening in a plan view, and including a plurality of second openings, a plurality of first masks corresponding to the plurality of second openings and fixed on the sheet portion, each including a plurality of third openings, and a second mask arranged on another portion of the first opening defined by an edge of the sheet portion and inner surfaces of the first opening, fixed on the mask frame, and including a plurality of fourth openings.
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公开(公告)号：US11825727B2
公开(公告)日：2023-11-21
申请号：US17396874
申请日：2021-08-09
Applicant: Samsung Display Co., Ltd.
Inventor： Seul Lee , Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im
CPC classification number: H10K71/00 , C23C14/042 , C23C16/042 , G03F7/0015 , H10K59/12
Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
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15.发明授权公开(公告)号：US11319508B2
公开(公告)日：2022-05-03
申请号：US14808128
申请日：2015-07-24
Applicant: Samsung Display Co., Ltd.
Inventor： Sungsoon Im , Kyuhwan Hwang , Inho Kong , Changsub Kim , Hotae Kim , Jaehwan Jin , Donguk Hwang
Abstract: The present disclosure relates to a cleaning composition for removing an oxide including an acid selected from an organic acid, an inorganic acid, and a combination thereof; a salt selected from an organic salt, an inorganic salt, and a combination thereof; a surfactant; and water, and a method of cleaning using the cleaning composition.
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Patent Agency Ranking
公开(公告)号：US09999943B2
公开(公告)日：2018-06-19
申请号：US15091913
申请日：2016-04-06
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin Moon , Sungsoon Im , Minho Moon , Soonchul Chang
IPC: H01L21/302 , H01L21/461 , C25F3/00 , B23P15/00 , C03C25/00 , C23F1/00 , C03C15/00 , C03C25/68 , B44C1/22 , B23K26/384 , B23K26/00 , B23K26/40 , C23C14/04 , H01L51/00 , B23K103/18
CPC classification number: B23K26/384 , B23K26/0093 , B23K26/40 , B23K2103/26 , C23C14/042 , G03F7/004 , H01L21/02063 , H01L21/76804 , H01L51/0011
Abstract: A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.
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17.发明申请公开(公告)号：US20160049587A1
公开(公告)日：2016-02-18
申请号：US14596653
申请日：2015-01-14
Applicant: Samsung Display Co., Ltd.
Inventor： Sungsoon Im , Taewook Kang , Duckjung Lee
CPC classification number: H01L51/0013 , H01L27/3211 , H01L51/56 , H01L2227/323
Abstract: Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.
Abstract translation: 提供了能够减少OLED装置的制造时间和制造成本的有机发光显示（OLED）装置的制造装置和制造方法。 该方法包括：使基板转动使得基板的沉积表面朝向上方; 在第一供体掩模的沉积表面面向下时，将第一沉积层沉积在第一施主掩模的沉积表面上; 将第一施主掩模和衬底布置成使得第一施主掩模在衬底上方，同时第一沉积层面向下并且衬底的沉积表面朝上; 在所述衬底的沉积表面上沉积所述第一施主掩模的沉积表面的第一沉积层的一部分; 并转动基板使得基板的沉积表面朝下。
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公开(公告)号：US12116660B2
公开(公告)日：2024-10-15
申请号：US17383787
申请日：2021-07-23
Applicant: Samsung Display Co., Ltd.
Inventor： Ji-Hee Son , Minho Moon , Youngmin Moon , Seungyong Song , Seul Lee , Sungsoon Im
IPC: C23C14/04 , C23C16/34 , C23C16/40 , C23C16/56 , G03F7/00 , G03F7/16 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/16
CPC classification number: C23C14/042 , C23C16/345 , C23C16/401 , C23C16/56 , G03F7/0015 , G03F7/167 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/166
Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.
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公开(公告)号：US12058923B2
公开(公告)日：2024-08-06
申请号：US17336543
申请日：2021-06-02
Applicant: Samsung Display Co., Ltd.
Inventor： Youngmin Moon , Minho Moon , Seungyong Song , Sungsoon Im
CPC classification number: H10K71/166 , B23K26/38 , H10K71/00 , H10K71/164 , H10K71/861
Abstract: A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.
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公开(公告)号：US12004413B1
公开(公告)日：2024-06-04
申请号：US18479202
申请日：2023-10-02
Applicant: Samsung Display Co., Ltd.
Inventor： Jeongkuk Kim , Heemin Park , Duckjung Lee , Sungsoon Im
CPC classification number: H10K71/166 , C23C14/042
Abstract: A method of manufacturing a display device includes arranging a display substrate in a chamber, arranging a mask assembly in the chamber, and supplying a deposition material to the mask assembly by a deposition source. The arranging of the mask assembly includes disposing a stopping layer including a stopping layer opening on a first mask layer, disposing an inorganic layer on the stopping layer, forming a first mask opening in the first mask layer, and forming an inorganic opening of the inorganic layer by etching the inorganic layer corresponding to the stopping layer opening.
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