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公开(公告)号:US20180083193A1
公开(公告)日:2018-03-22
申请号:US15701856
申请日:2017-09-12
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jongbum KIM , Sangmin YI , Daewon BAEK , Minchul SONG , Sangshin LEE , Seungjin LEE , Jiyun CHUN
CPC classification number: H01L51/0011 , C23C14/042 , C23C14/12 , H01L21/00 , H01L21/67 , H01L51/0002 , H01L51/001 , H01L51/0014 , H01L51/56
Abstract: A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.
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公开(公告)号:US20170186954A1
公开(公告)日:2017-06-29
申请号:US15390908
申请日:2016-12-27
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun CHO , Daeyong KIM , Jongbum KIM , Jongho YANG , Yoonchan OH
CPC classification number: H01L51/0011 , B05B12/22 , B05B12/36 , B05D1/32 , B05D1/60 , C23C14/042 , H01L51/56
Abstract: An organic layer deposition assembly for depositing a deposition material on a substrate includes a deposition source configured to spray the deposition material, a deposition source nozzle arranged in one side of the deposition source and including deposition source nozzles arranged in a first direction, a patterning slit sheet arranged to face the deposition source nozzle and having patterning slits in a second direction that crosses the first direction, and a correction sheet arranged between the deposition source nozzle and the patterning slit sheet and configured to block at least a part of the deposition material sprayed from the deposition source.
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