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    Substrate cleaning apparatus and substrate cleaning method using the same
    13.
    发明授权
    Substrate cleaning apparatus and substrate cleaning method using the same 有权

    公开(公告)号：US11342203B2

    公开(公告)日：2022-05-24

    申请号：US16739409

    申请日：2020-01-10

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Jihoon Jeong ,  Mihyun Park ,  Yongsun Ko ,  Kwangwook Lee ,  Kuntack Lee ,  Hayoung Jeon ,  Yongjhin Cho ,  Jihoon Cha

    IPC: H01L21/02 ,  H01L21/67

    Abstract: A substrate cleaning apparatus includes a support inside a chamber to hold a substrate, a first supply source inside the chamber that includes a first nozzle along a first direction and facing an upper surface of the support, the first nozzle to spray polymer and solvent onto the substrate to form a coating, and a second nozzle at an oblique angle to the first direction and facing an edge of the support to inject a hot gas toward the coating to volatilize the solvent, a second supply source inside the chamber and having a third nozzle facing the upper surface of the support to inject a peeling treatment to the coating to peel the coating from the substrate, and a third supply source inside the chamber and facing a lower surface of the support to inject the hot gas to heat a second surface of the substrate.

    Interfacing device and method for supporting speech dialogue service
    17.
    发明授权
    Interfacing device and method for supporting speech dialogue service 有权
    支持语音对话服务的接口设备和方法

    公开(公告)号：US09454964B2

    公开(公告)日：2016-09-27

    申请号：US14450810

    申请日：2014-08-04

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Hayoung Jeon ,  Sora Kim ,  Heewoon Kim ,  Yumi Ahn ,  Jihyun Ahn

    IPC: G10L15/26 ,  G06F3/16 ,  G10L15/22 ,  G06K9/62

    CPC classification number: G10L15/26 ,  G06F3/167 ,  G06K9/6253 ,  G06K9/6293 ,  G10L15/22

    Abstract: An interfacing device and method to support a speech dialogue service based on a multi-modal input are provided. The method includes executing an interface for the speech dialogue service, receiving a user input, through the executed interface, including a voice input and a non-voice input, transmitting, as a request signal to a server, at least one of the voice input or a text extracted from the voice input when the received user input is the voice input, transmitting, as the request signal to the server, a text extracted from the non-voice input when the received user input is the non-voice input, receiving a result of dialogue recognition in response to the request signal from the server, and executing a response to the received user input on the basis of the received result of dialogue recognition.

    Abstract translation: 提供了一种用于支持基于多模式输入的语音对话服务的接口设备和方法。 该方法包括执行语音对话服务的接口，通过所执行的接口接收包括语音输入和非语音输入的用户输入，作为请求信号向服务器发送至少一个语音输入 或者当接收的用户输入是语音输入时从语音输入提取的文本，当接收到的用户输入是非语音输入时，将从非语音输入提取的文本作为请求信号发送给服务器，接收 响应于来自服务器的请求信号的对话识别的结果，并且基于所接收的对话识别结果对所接收的用户输入执行响应。

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