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公开(公告)号：US11921297B2
公开(公告)日：2024-03-05
申请号：US17682919
申请日：2022-02-28
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
CPC classification number: G02B27/0927 , G02B5/001 , G02B27/0944 , G02B27/0955 , H01S3/0071 , H05G2/008 , H05H1/02 , H01S3/1611 , H01S3/1643
Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
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公开(公告)号：US11844172B2
公开(公告)日：2023-12-12
申请号：US16654230
申请日：2019-10-16
Applicant: KLA Corporation
Inventor： John Szilagyi , Ilya Bezel
Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
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13.发明授权公开(公告)号：US11778720B2
公开(公告)日：2023-10-03
申请号：US17028902
申请日：2020-09-22
Applicant: KLA Corporation
Inventor： Matthew Derstine , Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin
CPC classification number: H05G2/008 , H01S3/1312 , H05H1/46
Abstract: A system for generating laser sustained broadband light includes a pump source configured to generate a pumping beam, a gas containment structure for containing a gas and a multi-pass optical assembly. The multi-pass optical assembly includes one or more optical elements configured to perform a plurality of passes of the pumping beam through a portion of the gas to sustain a broadband-light-emitting plasma. The one or more optical elements are arranged to collect an unabsorbed portion of the pumping beam transmitted through the plasma and direct the collected unabsorbed portion of the pumping beam back into the portion of the gas.
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公开(公告)号：US11776804B2
公开(公告)日：2023-10-03
申请号：US17696653
申请日：2022-03-16
Applicant: KLA Corporation
Inventor： Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Vitaly K. Rerikh , Boris Vasilyevich Potapkin
CPC classification number: H01J61/52 , H01J65/04 , H05H1/46 , H01J2893/0063
Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
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公开(公告)号：US11596048B2
公开(公告)日：2023-02-28
申请号：US17024565
申请日：2020-09-17
Applicant: KLA Corporation
Inventor： Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Maksim Alexandrovich Deminskii , Boris Vasilyevich Potapkin
Abstract: A broadband light source is disclosed. The broadband light source includes a rotatable gas containment structure. The broadband light source includes a rotational drive system configured to rotate the rotatable gas containment structure about the horizontal axis of rotation of the rotatable gas containment structure. The broadband light source includes a pump source configured to generate pump illumination and a reflector element configured to direct a portion of the pump illumination into the gas to sustain a plasma. The reflector is configured to collect a portion of broadband light emitted from the plasma.
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Patent Agency Ranking
公开(公告)号：US20220344146A1
公开(公告)日：2022-10-27
申请号：US17696653
申请日：2022-03-16
Applicant: KLA Corporation
Inventor： Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Vitaly K. Rerikh , Boris Vasilyevich Potapkin
Abstract: A laser-sustained plasma (LSP) light source with reverse vortex flow is disclosed. The LSP source includes gas cell including a gas containment structure including a body, neck, and shaft. The gas cell includes one or more gas delivery lines for delivery gas to one or more nozzles positioned in or below the neck of the gas containment structure. The gas cell includes one or more gas inlets and one or more gas outlets arranged to generate a reverse vortex flow within the gas containment structure of the gas cell. The LSP source also includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure. The LSP source includes a light collector element configured to collect at least a portion of broadband light emitted from the plasma.
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公开(公告)号：US20220187610A1
公开(公告)日：2022-06-16
申请号：US17682919
申请日：2022-02-28
Applicant: KLA Corporation
Inventor： Ilya Bezel , Matthew Derstine , Andrey Stepanov , Nikolay Sherbak
Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
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公开(公告)号：US20210120659A1
公开(公告)日：2021-04-22
申请号：US16654230
申请日：2019-10-16
Applicant: KLA Corporation
Inventor： John Szilagyi , Ilya Bezel
Abstract: An illumination system includes a gas containment vessel configured to contain a gas. The illumination system also includes one or more pump sources configured to generate one or more pump beams. The illumination system includes an ozone generation unit including one or more illumination sources. The one or more illumination sources are configured to generate a beam of illumination of an energy sufficient for converting a portion of diatomic oxygen (O2) contained within the gas containment vessel to triatomic oxygen (O3). One or more energy sources are configured to ignite the plasma within the gas contained within the gas containment vessel via absorption of energy of the one or more energy sources by a portion of the triatomic oxygen, wherein the plasma emits broadband radiation.
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公开(公告)号：US12198921B2
公开(公告)日：2025-01-14
申请号：US18591686
申请日：2024-02-29
Applicant: KLA Corporation
Inventor： Ilya Bezel , Amir Torkaman
Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.
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公开(公告)号：US20240304435A1
公开(公告)日：2024-09-12
申请号：US18591686
申请日：2024-02-29
Applicant: KLA Corporation
Inventor： Ilya Bezel , Amir Torkaman
CPC classification number: H01J61/025 , H01J61/12 , H01J2893/0063
Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.
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