公开(公告)号：US11921297B2

公开(公告)日：2024-03-05

申请号：US17682919

申请日：2022-02-28

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Matthew Derstine ,  Andrey Stepanov ,  Nikolay Sherbak

IPC: G02B27/09 ,  G02B5/00 ,  H01S3/00 ,  H05G2/00 ,  H05H1/02 ,  H01S3/16

CPC classification number: G02B27/0927 ,  G02B5/001 ,  G02B27/0944 ,  G02B27/0955 ,  H01S3/0071 ,  H05G2/008 ,  H05H1/02 ,  H01S3/1611 ,  H01S3/1643

Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.

公开(公告)号：US20220187610A1

公开(公告)日：2022-06-16

申请号：US17682919

申请日：2022-02-28

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Matthew Derstine ,  Andrey Stepanov ,  Nikolay Sherbak

IPC: G02B27/09 ,  H05H1/02 ,  G02B5/00 ,  H05G2/00 ,  H01S3/00 ,  H05H1/24

Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.