公开(公告)号：US20220393425A1

公开(公告)日：2022-12-08

申请号：US17818178

申请日：2022-08-08

Applicant: Gigaphoton Inc.

Inventor： Yuki TAMARU ,  Taisuke MIURA

IPC: H01S3/225 ,  H01S3/083 ,  H01S3/23

Abstract: A laser apparatus according to an aspect of the present disclosure includes a master oscillator configured to emit a laser beam, an amplifier including an optical resonator and configured to amplify the laser beam emitted by the master oscillator in the optical resonator, and a phase shift structure disposed on an optical path between the master oscillator and the amplifier at a position closer to the amplifier than a middle point of the optical path. The phase shift structure includes a plurality of cells having different phase shift amounts for the laser beam. The cells have a disposition interval of 80 μm to 275 μm inclusive.

公开(公告)号：US20210226414A1

公开(公告)日：2021-07-22

申请号：US17220270

申请日：2021-04-01

Applicant: Gigaphoton Inc.

Inventor： Taisuke MIURA ,  Osamu WAKABAYASHI ,  Hironori IGARASHI

IPC: H01S5/042 ,  H01S5/50 ,  H01S5/068

Abstract: In a laser system according to a viewpoint of the present disclosure, a first amplifier amplifies first pulsed laser light outputted from a first semiconductor laser system into second pulsed laser light, a wavelength conversion system converts the second pulsed laser light in terms of wavelength into third pulsed laser light, and an excimer amplifier amplifies the third pulsed laser light. The first semiconductor laser system includes a first current controller that controls current flowing through a first semiconductor laser in such a way that first laser light outputted from the first semiconductor laser is caused to undergo chirping and a first semiconductor optical amplifier that amplifies the first laser light into pulsed light. The laser system includes a control section that controls the amount of chirping performed on the first pulsed laser light in such a way that excimer laser light having a target spectral linewidth is achieved.