公开(公告)号：US20140023313A1

公开(公告)日：2014-01-23

申请号：US13795654

申请日：2013-03-12

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hyun Soo KIM ,  Mi-Ran Park ,  Jong Sool Jeong ,  Byungseok Choi ,  O-Kyun Kwon

IPC: G02B6/12 ,  G02B6/136

CPC classification number: G02B6/12 ,  G02B6/136 ,  G02B6/138 ,  G02B6/42 ,  G02B6/4279 ,  G02B6/428

Abstract: Disclosed are a hybrid integrated optical device capable of more easily implementing impedance matching of a transmission line by using a polymer material on which a low-temperature process may be performed when an optical waveguide platform is fabricated, and a fabrication method thereof. The hybrid integrated optical device according to an exemplary embodiment of the present disclosure includes: a substrate divided into a waveguide region and a line region; a lower clad layer formed of silica and formed on the substrate; a transmission line part formed on the lower clad layer of the line region; and a height adjustment layer, a core layer, and an upper clad layer formed of a polymer and sequentially formed on the lower clad layer of the waveguide region, in which an optical waveguide is formed on the core layer.

Abstract translation: 公开了一种混合集成光学装置及其制造方法，其能够通过使用在制造光波导平台时可以进行低温处理的聚合物材料更容易地实现传输线的阻抗匹配。 根据本公开的示例性实施例的混合集成光学装置包括：分为波导区域和线路区域的基板; 由二氧化硅形成的下包层，形成在基板上; 形成在所述线区域的下包层上的传输线部分; 以及由聚合物形成的高度调整层，芯层和上覆盖层，并顺序地形成在波导区域的下包层上，其中在芯层上形成光波导。