公开(公告)号：US20130244365A1

公开(公告)日：2013-09-19

申请号：US13791039

申请日：2013-03-08

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hye Jin KIM ,  Sung Q LEE ,  Kang Ho PARK ,  Jong Dae KIM

IPC: H04R31/00

CPC classification number: H04R31/003 ,  H04R19/005 ,  H04R31/00 ,  H04R2499/11

Abstract: A condenser microphone having a flexure hinge diaphragm and a method of manufacturing the same are provided. The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer on the first insulating layer; forming sound holes by patterning the upper silicon layer; forming a second insulating layer and a conductive layer on the upper silicon layer; forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the layers to form an air gap between the diaphragm and the upper silicon layer. Consequently, a manufacturing process may improve the sensitivity and reduce the size of the condenser microphone.

Abstract translation: 提供一种具有挠性铰链膜片的电容麦克风及其制造方法。 该方法包括以下步骤：形成下硅层和第一绝缘层; 在所述第一绝缘层上形成上硅层; 通过图案化上硅层形成声孔; 在上硅层上形成第二绝缘层和导电层; 在导电层上形成钝化层; 在钝化层上形成牺牲层; 在牺牲层上沉积隔膜，并形成穿过隔膜的气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 并蚀刻各层以在隔膜和上硅层之间形成气隙。 因此，制造工艺可以提高电容传声器的灵敏度和减小尺寸。

公开(公告)号：US20220014841A1

公开(公告)日：2022-01-13

申请号：US17328528

申请日：2021-05-24

Applicant: Electronics and Telecommunications Research Institute

Inventor： Hye Jin KIM ,  JoonMin LEE ,  Yun-Jeong KIM ,  YuLim MIN ,  WOOSEUP YOUM ,  HANBIT JIN ,  Chan-Hwa HONG

IPC: H04R1/28 ,  H04R5/02 ,  H04R1/02

Abstract: The present disclosure relates to a device for playing an acoustic sound and a touch sensation, and more particularly, to a device for emitting a sound to a front surface of a speaker and playing a touch sensation feedback to a rear surface of the speaker through a driving modulation using two or more speakers while simultaneously concentrating an acoustic pressure generated according to a vibration of a membrane of the speaker to a surface of a module through a movement pipe when an audio signal is applied.

公开(公告)号：US20190342993A1

公开(公告)日：2019-11-07

申请号：US16217629

申请日：2018-12-12

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Seongdeok AHN ,  Seung Youl KANG ,  Seong Hyun KIM ,  Hye Jin KIM ,  Kang-Ho PARK ,  Jeong Ik LEE ,  Young-deuk JEON ,  Chi-Sun HWANG ,  Jae Bon KOO ,  Su Jae LEE

IPC: H05K1/02 ,  H05K1/18 ,  H05K3/30

Abstract: Provided is stretchable electronics. The stretchable electronics includes stretchable substrate, first support patterns disposed on a first surface of the stretchable substrate, and output devices disposed on the first patterns, respectively. The first support patterns are arranged in a first direction and a second direction, which are parallel to an extension direction of the substrate, and each of the output devices generates an output stimulation.