HALL CURRENT PLASMA SOURCE HAVING A CENTER-MOUNTED CATHODE OR A SURFACE-MOUNTED CATHODE

    公开(公告)号:US20180226217A1

    公开(公告)日:2018-08-09

    申请号:US15901763

    申请日:2018-02-21

    CPC classification number: H01J27/146 F03H1/0075 H01J27/143

    Abstract: A miniature Hall current plasma source apparatus having magnetic shielding of the walls from ionized plasma, an integrated discharge channel and gas distributor, an instant-start hollow cathode mounted to the plasma source, and an externally mounted keeper, is described. The apparatus offers advantages over existing other Hall current plasma sources having similar power levels, including: lower mass, longer lifetime, lower part count including fewer power supplies, and the ability to be continuously adjustable to lower average power levels using pulsed operation and adjustment of the pulse duty cycle. The Hall current plasma source can provide propulsion for small spacecraft that either do not have sufficient power to accommodate a propulsion system or do not have available volume to incorporate the larger propulsion systems currently available. The present low-power Hall current plasma source can be used to provide energetic ions to assist the deposition of thin films in plasma processing applications.

    12CaO-7Al2O3 electride hollow cathode
    15.
    发明授权
    12CaO-7Al2O3 electride hollow cathode 有权
    12CaO-7Al2O3电中空阴极

    公开(公告)号:US09305733B2

    公开(公告)日:2016-04-05

    申请号:US14263970

    申请日:2014-04-28

    Abstract: The use of the electride form of 12CaO-7Al2O3, or C12A7, as a low work function electron emitter in a hollow cathode discharge apparatus is described. No heater is required to initiate operation of the present cathode, as is necessary for traditional hollow cathode devices. Because C12A7 has a fully oxidized lattice structure, exposure to oxygen does not degrade the electride. The electride was surrounded by a graphite liner since it was found that the C12A7 electride converts to it's eutectic (CA+C3A) form when heated (through natural hollow cathode operation) in a metal tube.

    Abstract translation: 描述了在空心阴极放电装置中使用12CaO-7Al2O3或C12A7的电子形式作为低功函电子发射体。 根据传统的空心阴极器件的需要,不需要加热器来启动本阴极的操作。 因为C12A7具有完全氧化的晶格结构,所以暴露于氧气不会降低电极。 电极被石墨衬垫包围,因为发现当在金属管中加热(通过天然空心阴极操作)时,C12A7电致转变成它的共晶(CA + C3A)形式。

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