公开(公告)号：US20190170991A1

公开(公告)日：2019-06-06

申请号：US16269771

申请日：2019-02-07

Applicant: Carl Zeiss SMT GmbH ,  Carl Zeiss SMS Ltd.

Inventor： Markus Seesselberg ,  Vladimir Dmitriev ,  Joachim Welte ,  Uri Stern ,  Tomer Cohen ,  Erez Graitzer

IPC: G02B21/00 ,  G03F1/72 ,  G02B21/24 ,  G02B21/36

Abstract: The inventions concerns an optical system comprising a scanning unit, a first lens-element group comprising at least a first lens element, a focusing unit which is designed to focus beams onto a focus, wherein the focusing unit comprises a second lens-element group comprising at least a second lens element and an imaging lens. The imaging lens further comprises a pupil plane and a wavefront manipulator. The wavefront manipulator of the optical system is arranged in the pupil plane of the imaging lens or in a plane that is conjugate to the pupil plane of the imaging lens, or the scanning unit of the optical system is arranged in a plane that is conjugate to the pupil plane of the imaging lens and the wavefront manipulator is arranged upstream of the scanning unit in the light direction. The focus of the second lens-element group lies in the pupil plane of the imaging lens in all focal positions of the focusing unit.