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11.
公开(公告)号:US20240099145A1
公开(公告)日:2024-03-21
申请号:US18274229
申请日:2022-07-01
Inventor: Hui Hua , Yuju Chen , Xiaotong Liu , Yongchun Tao
IPC: H10N30/87 , B06B1/06 , G08B6/00 , H10N30/06 , H10N30/082
CPC classification number: H10N30/875 , B06B1/0622 , B06B1/0648 , G08B6/00 , H10N30/06 , H10N30/082
Abstract: The present disclosure provides a piezoelectric device and a preparation method therefor, a panel, and a tactile reproduction apparatus. The piezoelectric device includes: a substrate; a bottom electrode layer disposed on the substrate; a piezoelectric functional layer disposed on the bottom electrode layer; a top electrode layer disposed on the piezoelectric functional layer; an insulation layer, arranged to cover an edge portion of the top electrode layer, the piezoelectric functional layer exposed from the top electrode layer and the bottom electrode layer exposed from the piezoelectric functional layer, an edge of the insulation layer has a slope angle less than 60 degrees; and a wiring layer disposed on the insulation layer, the wiring layer at least partially covers the top electrode layer exposed from the insulation layer, and the wiring layer covers the edge of the insulation layer in an overlapping area of the wiring layer and the insulation layer.