公开(公告)号：US20170184866A1

公开(公告)日：2017-06-29

申请号：US15308091

申请日：2016-01-15

Applicant: BOE TECHNOLOGY GROUP CO., LTD.

Inventor： Xiangjun Tian ,  Yan Chen

IPC: G02B27/14 ,  H01S3/00 ,  H01S3/225

CPC classification number: G02B27/144 ,  B23K26/00 ,  B23K26/067 ,  G02B5/005 ,  G02B27/0905 ,  G02B27/0988 ,  G02B27/106 ,  G02B27/143 ,  H01S3/0071 ,  H01S3/225

Abstract: Embodiments of the present invention provide a beam splitter, a laser generator and an excimer laser annealing apparatus, which relate to field of display technology, and reduce probability of pollution of the beam splitter to some extent and increase homogeneity of the laser beam that is passed through the beam splitter. The beam splitter includes a transmission region configured as a through-hole and a reflective region arranged at a periphery of the through-hole, wherein the through-hole is configured to be transmitted by a first laser beam that is received; and the reflective region is configured to reflect the first laser beam that is received. The beam splitter may be used in a laser generator to perform a scanning annealing process.