公开(公告)号：US20240128114A1

公开(公告)日：2024-04-18

申请号：US18398723

申请日：2023-12-28

Applicant: Applied Materials, Inc.

Inventor： Kiyki-Shiy Shang ,  Mikhail Taraboukhine ,  Venkata Raghavaiah Chowdhary Kode

IPC: H01L21/68 ,  B25J9/16 ,  B25J11/00 ,  B25J13/08 ,  G01B11/00 ,  G01B11/27

CPC classification number: H01L21/681 ,  B25J9/1694 ,  B25J11/0095 ,  B25J13/088 ,  G01B11/002 ,  G01B11/272 ,  H01L21/67259

Abstract: Implementations disclosed describe an integrated sensor controller comprising a sensor circuit and a logic circuit. The sensor circuit includes a light source driver to generate a driving signal, a demultiplexer to produce, using the driving signal, a plurality of output driving signals to be delivered to one of a plurality of sensors, and an amplifier to: receive a first signal from a first sensor, the first signal being associated with a first event representative of a position of a substrate within a device manufacturing machine, and generate a second signal. The sensor circuit further includes an analog-to-digital converter to receive the second signal and generate a third signal. The logic circuit includes a memory device and a processing device coupled to the memory device, the processing device to obtain based on the third signal, information about the position of the substrate.