公开(公告)号：US11824015B2

公开(公告)日：2023-11-21

申请号：US17397834

申请日：2021-08-09

Applicant: Apple Inc.

Inventor： Vidhya Ramachandran ,  Sanjay Dabral ,  SivaChandra Jangam ,  Jun Zhai ,  Kunzhong Hu

IPC: H01L23/00 ,  H01L21/78 ,  H01L23/58 ,  H01L23/544

CPC classification number: H01L23/562 ,  H01L21/78 ,  H01L23/544 ,  H01L23/564 ,  H01L23/585 ,  H01L2223/5446

Abstract: Chip sealing structures and methods of manufacture are described. In an embodiment, a chip structure includes a main body area formed of a substrate, a back-end-of-the-line (BEOL) build-up structure spanning over the substrate, and chip edge sidewalls extending from a back surface of the substrate to a top surface of the BEOL build-up structure and laterally surrounding the substrate and the BEOL build-up structure. In accordance with embodiments, the chip structure may further include a conformal sealing layer covering at least a first chip edge sidewall of the chip edge sidewalls and a portion of the top surface of the BEOL build-up structure, and forming a lip around the top surface of the BEOL build-up structure.