Force-balanced micromirror with electromagnetic actuation

    公开(公告)号:US11604347B2

    公开(公告)日:2023-03-14

    申请号:US16896245

    申请日:2020-06-09

    Applicant: Apple Inc.

    Abstract: A scanning device includes a planar scanning mirror disposed within a frame and having a reflective upper surface. A pair of flexures have respective first ends connected to the frame and respective second ends connected to the mirror at opposing ends of a rotational axis of the mirror. A rotor including a permanent magnet is disposed on the lower surface of the mirror. A stator includes first and second cores disposed in proximity to the rotor on opposing first and second sides of the rotational axis and first and second coils of wire wound respectively on the cores. A drive circuit drives the first and second coils with respective electrical currents including a first component selected so as to control a transverse displacement of the mirror and a second component selected so as to control a rotation of the mirror about the rotational axis.

    Sensing of mirror position using fringing fields

    公开(公告)号:US09784558B2

    公开(公告)日:2017-10-10

    申请号:US14588942

    申请日:2015-01-04

    Applicant: APPLE INC.

    Inventor: Raviv Erlich

    CPC classification number: G01B7/30 G02B26/0833 G02B26/085 G02B26/10

    Abstract: Mechanical apparatus includes a base and a moving element, which is mounted to rotate about an axis relative to the base. A capacitive rotation sensor includes at least one first electrode disposed on the moving element in a location adjacent to the base and at least one second electrode disposed on the base in proximity to the at least one first electrode. A sensing circuit is coupled to sense a variable capacitance between the first and second electrodes.

    Hybrid MEMS scanning module
    14.
    发明申请

    公开(公告)号:US20170285325A1

    公开(公告)日:2017-10-05

    申请号:US15622084

    申请日:2017-06-14

    Applicant: APPLE INC.

    CPC classification number: G02B26/085 G02B26/0833 G02B26/101 G02B26/105

    Abstract: A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.

    Flexible room controls
    15.
    发明申请

    公开(公告)号:US20160291801A1

    公开(公告)日:2016-10-06

    申请号:US15181422

    申请日:2016-06-14

    Applicant: APPLE INC.

    CPC classification number: G06F3/0426 G06F3/017 G06F3/0488 G06T7/521 G09G3/025

    Abstract: Control apparatus includes an optical subsystem, which is configured to direct first light toward a scene that includes a hand of a user in proximity to a wall of a room and to receive the first light that is reflected from the scene, and to direct second light toward the wall so as to project an image of a control device onto the wall. A processor is configured to control the optical subsystem so as to generate, responsively to the received first light, a depth map of the scene, to process the depth map so as to detect a proximity of the hand to the wall in a location of the projected image, and to control electrical equipment in the room responsively to the proximity.

    Strain-based sensing of dual-axis mirror rotation

    公开(公告)号:US11880031B1

    公开(公告)日:2024-01-23

    申请号:US17123217

    申请日:2020-12-16

    Applicant: Apple Inc.

    Abstract: Mechanical apparatus includes a rotational assembly, including a frame and a gimbal, which is attached to the frame by first hinges disposed along a first axis and is configured to rotate on the first hinges about the first axis relative to the frame. A rotating element is attached to the gimbal by second hinges disposed along a second axis, perpendicular to the first axis, and is configured to rotate on the second hinges about the second axis relative to the gimbal. One or more strain sensors are disposed on at least one of the first hinges and configured to provide a signal indicative of a rotation of the rotating element about the second axis relative to the gimbal. Control circuitry is configured to monitor the rotation of the rotating element about the second axis responsively to the signal.

    Dual-axis scanning mirror
    19.
    发明申请

    公开(公告)号:US20180292537A1

    公开(公告)日:2018-10-11

    申请号:US16001952

    申请日:2018-06-07

    Applicant: Apple Inc.

    CPC classification number: G01S17/89 G01S7/4817 G02B26/085 G02B26/101 H02K33/16

    Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

    Dual-axis scanning mirror
    20.
    发明授权

    公开(公告)号:US10018723B2

    公开(公告)日:2018-07-10

    申请号:US14416296

    申请日:2013-07-25

    Applicant: APPLE INC.

    CPC classification number: G01S17/89 G01S7/4817 G02B26/085 G02B26/101 H02K33/16

    Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

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