公开(公告)号：US06813412B2

公开(公告)日：2004-11-02

申请号：US09915232

申请日：2001-07-24

Applicant: Chuang-Chia Lin

Inventor： Chuang-Chia Lin

IPC: G02B635

CPC classification number: G02B6/3518 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/053 ,  B81C1/00214 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358

Abstract: A microelectromechanical systems (MEMS) element and a MEMS optical switch are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element is capable of motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.

Abstract translation: 描述了微机电系统（MEMS）元件和MEMS光开关。 MEMS元件包括可移动地附接到基底的结晶和可移动元件。 可移动元件包括垂直于基本垂直于基底平面的垂直部分。 垂直部分和基底的晶体结构基本相似。 可移动元件能够基本上约束到基本上垂直于衬底的平面定向的平面的运动。 在至少一个位置中，可移动元件的垂直部分的一部分突出超过衬底的表面。 可移动元件可以通过闩锁保持在适当的位置。 可以实现这种结构的阵列以用作光学开关。 光学开关可以包括结晶衬底和可移动地附接到衬底的一个或多个可移动元件。 各种实施例提供了可以简单地制造和密集包装的鲁棒且可靠的MEMS元件。

公开(公告)号：US06661070B2

公开(公告)日：2003-12-09

申请号：US10193804

申请日：2002-07-11

Applicant: Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

Inventor： Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

IPC: H01L2982

CPC classification number: B81C1/00666 ,  B81B2203/058 ,  B81C2201/014 ,  B81C2201/0164 ,  B81C2201/056 ,  G02B26/0833

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.

公开(公告)号：US20240356520A1

公开(公告)日：2024-10-24

申请号：US18412243

申请日：2024-01-12

Applicant: Chuang-Chia Lin

Inventor： Chuang-Chia Lin

IPC: H03H9/02 ,  H10N30/30

CPC classification number: H03H9/02842 ,  H03H9/02543 ,  H10N30/302

Abstract: A sensor device that includes an integrated sensor assembly having a surface acoustic wave (SAW) sensor disposed on a piezoelectric substrate. The SAW sensor is adapted to measure an environmental condition of an environment in response to an RF signal. The SAW sensor includes an interdigitated transducer (IDT) formed on a substrate having at least a layer of a piezoelectric material. The SAW sensor includes either one or more SAW reflectors of a second IDT formed on the piezoelectric material. The SAW sensor further includes an RF antenna formed on the piezoelectric material. The SAW sensor and the RF antenna are integrated with one another on the piezoelectric material.

公开(公告)号：US07843363B2

公开(公告)日：2010-11-30

申请号：US11827591

申请日：2007-07-12

Applicant: Alexander Grichener ,  Chuang-Chia Lin

Inventor： Alexander Grichener ,  Chuang-Chia Lin

IPC: G08B21/00

CPC classification number: E05B39/04 ,  B64D29/06 ,  E05C19/145 ,  Y10T292/0948

Abstract: The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.

公开(公告)号：US06479315B1

公开(公告)日：2002-11-12

申请号：US09724514

申请日：2000-11-27

Applicant: Andrew J. Zosel ,  Peter M. Gulvin ,  Jingkuang Chen ,  Joel A. Kubby ,  Chuang-Chia Lin ,  Alex T. Tran

Inventor： Andrew J. Zosel ,  Peter M. Gulvin ,  Jingkuang Chen ,  Joel A. Kubby ,  Chuang-Chia Lin ,  Alex T. Tran

IPC: H01L2100

CPC classification number: B81C1/00666 ,  B81B2203/058 ,  B81C2201/014 ,  B81C2201/0164 ,  B81C2201/056 ,  G02B26/0833

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilicon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.

Abstract translation: 本发明提供一种微机械或微机电结构。 该结构通过包括在衬底层上限定由绝缘体层分离的单晶硅层上的结构的方法制造; 沉积和蚀刻单晶硅层上的多晶硅层，剩余的多晶硅形成结构的机械或光学元件; 暴露单晶硅层的选定区域; 并释放形成的结构。

公开(公告)号：US06413793B1

公开(公告)日：2002-07-02

申请号：US09858469

申请日：2001-05-17

Applicant: Chuang-Chia Lin ,  Peter M. Gulvin ,  Alex T. Tran ,  Nena Liakopoulos

Inventor： Chuang-Chia Lin ,  Peter M. Gulvin ,  Alex T. Tran ,  Nena Liakopoulos

IPC: H01L2100

CPC classification number: B81B3/001

Abstract: A semiconductor structure includes a substrate, a sacrificial layer formed on or over the substrate, and a structural layer formed on or over the sacrificial layer. At least one opening is formed in the structural layer. At least one opening is formed in the sacrificial layer below the at least one opening in the structural layer. The at least one opening in the structural layer and the at least one opening in the sacrificial layer are at least partially filled with a filler material. At least one portion of the structural layer is removed to define at least one microstructure. The sacrificial layer is removed such that the at least one microstructure is released from the substrate and the filler material forms one or more protrusions on the at least one microstructure, and/or one or more anchors anchoring the at least one microstructure to the substrate.

Abstract translation: 半导体结构包括衬底，形成在衬底上或衬底上的牺牲层以及形成在牺牲层上或之上的结构层。 在结构层中形成至少一个开口。 在结构层中的至少一个开口下方的牺牲层中形成至少一个开口。 结构层中的至少一个开口和牺牲层中的至少一个开口至少部分地填充有填充材料。 去除结构层的至少一部分以限定至少一个微结构。 去除牺牲层，使得至少一个微结构从衬底释放并且填充材料在至少一个微结构上形成一个或多个突起，和/或一个或多个将至少一个微结构锚定到衬底的锚固件。

公开(公告)号：US20140070153A1

公开(公告)日：2014-03-13

申请号：US13611830

申请日：2012-09-12

Applicant: Chuang-Chia Lin ,  Alan Leingang ,  Dave Lopes ,  Dennis Robertson ,  Christopher M. Sanden ,  Odd Harald Steep Eriksen ,  Brian Snyder

Inventor： Chuang-Chia Lin ,  Alan Leingang ,  Dave Lopes ,  Dennis Robertson ,  Christopher M. Sanden ,  Odd Harald Steep Eriksen ,  Brian Snyder

IPC: B64D9/00 ,  G06F11/30 ,  H05K13/00 ,  B66D1/54

CPC classification number: B64D9/00 ,  B66C1/40 ,  B66D1/54 ,  B66D1/58 ,  G01L1/142 ,  G01L5/103 ,  G06F11/30 ,  H05K13/00 ,  Y10T29/49117

Abstract: Health and usage monitoring systems for aircraft hoist systems are described herein. In some embodiments, a health and usage monitoring system comprises a capacitive load cell and a processing unit for communication with the capacitive load cell, the capacitive load cell comprising a load receiving surface and a capacitive assembly coupled to the load receiving surface, the capacitive assembly comprising parallel electrically conductive plates separated by a reversibly deformable spacer construction wherein the parallel plates comprise aligned apertures providing a passageway through the capacitive assembly for the hoist system cable.

Abstract translation: 本文描述了用于飞机起重机系统的健康和使用监测系统。 在一些实施例中，健康和使用监测系统包括电容式测力传感器和用于与电容式测力传感器通信的处理单元，电容性测力传感器包括负载接收表面和耦合到负载接收表面的电容性组件，电容组件 包括由可逆变形的间隔件结构分开的平行导电板，其中平行板包括对准的孔，提供通过用于提升系统电缆的电容组件的通道。

公开(公告)号：US08359932B2

公开(公告)日：2013-01-29

申请号：US12839170

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

IPC: G01N3/02

CPC classification number: B64C25/001 ,  B64C25/60 ,  B64D2045/008 ,  G01L1/142

Abstract: A strain sensor device for measuring loads on aircraft landing gear. This is done by measuring strains in the lower end of the strut, by which we infer the loading in the entire landing gear structure. These strains can be very large (as high as 10,000 microstrain) and can be imposed in numerous random directions and levels. The present invention includes a removable sensor assembly. An electromechanical means is presented that can accommodate large strains, be firmly attached to the strut, and provide good accuracy and resolution.

Abstract translation: 用于测量飞机起落架载荷的应变传感器装置。 这是通过测量支柱下端的应变来进行的，我们推断整个起落架结构的载荷。 这些菌株可以非常大（高达10,000微克），并且可以在许多随机的方向和水平上施加。 本发明包括可拆卸传感器组件。 提出了一种可以容纳大应变的机电装置，牢固地连接到支柱上，并提供良好的精度和分辨率。

公开(公告)号：US20120011946A1

公开(公告)日：2012-01-19

申请号：US12839170

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

IPC: G01D21/00

CPC classification number: B64C25/001 ,  B64C25/60 ,  B64D2045/008 ,  G01L1/142

Abstract: A strain sensor device for measuring loads on aircraft landing gear. This is done by measuring strains in the lower end of the strut, by which we infer the loading in the entire landing gear structure. These strains can be very large (as high as 10,000 microstrain) and can be imposed in numerous random directions and levels. The present invention includes a removable sensor assembly. An electromechanical means is presented that can accommodate large strains, be firmly attached to the strut, and provide good accuracy and resolution.

Abstract translation: 用于测量飞机起落架载荷的应变传感器装置。 这是通过测量支柱下端的应变来进行的，我们推断整个起落架结构的载荷。 这些菌株可以非常大（高达10,000微克），并且可以在许多随机的方向和水平上施加。 本发明包括可拆卸传感器组件。 提出了一种可以容纳大应变的机电装置，牢固地连接到支柱上，并提供良好的精度和分辨率。

公开(公告)号：US06888979B2

公开(公告)日：2005-05-03

申请号：US09834744

申请日：2001-04-12

Applicant: Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

Inventor： Behrang Behin ,  Michael J. Daneman ,  Chuang-Chia Lin ,  Boris Kobrin ,  Murali Chaparala ,  Gary Zalewski

IPC: B81B3/00 ,  B81C99/00 ,  G02B6/12 ,  G02B6/32 ,  G02B6/35 ,  G02B26/08 ,  G02B6/26

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/32 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3548 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B2006/12104

Abstract: A microelectromechanical (MEMS) apparatus has a base and a flap with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position Electrodes may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. The base may be made from a substrate portion of a silicon-on-insulator (SOI) wafer and the flap defined from a device layer of the SOI wafer. The flap may be connected to the base by one or more flexures such as torsional beams. An array of one or more of such structures may be used to form an optical switch.

Abstract translation: 微机电（MEMS）装置具有底座和翼片，其中一部分联接到基座，使得翼片可在第一和第二位置之间移动离开基座的平面。 底座可以具有一个具有很大垂直侧壁的空腔，当翼片处于第二位置时，电极可以被放置在垂直侧壁上并与基座电隔离以提供瓣片向侧壁的静电夹持。 基底可以由绝缘体上硅（SOI）晶片的衬底部分和从SOI晶片的器件层限定的瓣形成。 翼片可以通过一个或多个挠曲件（例如扭转梁）连接到基座。 可以使用一个或多个这样的结构的阵列来形成光学开关。