公开(公告)号：US20170082490A1

公开(公告)日：2017-03-23

申请号：US14863225

申请日：2015-09-23

Applicant: Agilent Technologies, Inc.

Inventor： Charles Hoke ,  Christopher Ryan Moon ,  Andrew Ghetler ,  Yang Han

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/10

CPC classification number: G01J3/2823 ,  G01J3/0213 ,  G01J3/0224 ,  G01J3/108 ,  G01J3/28 ,  G01J3/42

Abstract: An imaging scanner and a method for using the same are disclosed. The scanner includes a variable attenuator adapted to receive a light beam generated by a MIR laser and that generates an attenuated light beam therefrom characterized by an attenuation level. The scanner includes an optical assembly that focuses the attenuated light beam to a point on a specimen. A light detector measures an intensity of light leaving the point on the specimen, the light detector being characterized by a detector dynamic range. A controller forms a plurality of MIR images from the intensity as a function of position on the specimen, each of the plurality of MIR images being formed with a different level of attenuation of the light beam. The controller combines the plurality of MIR images to generate a combined MIR image having a dynamic range greater than the detector dynamic range.

公开(公告)号：US08769710B2

公开(公告)日：2014-07-01

申请号：US13675251

申请日：2012-11-13

Applicant: Agilent Technologies, Inc.

Inventor： Christopher Ryan Moon ,  Richard K. Workman

IPC: G01Q10/06 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q60/24

CPC classification number: G01Q10/065 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q10/045 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q60/24

Abstract: An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance.

Abstract translation: 原子力显微镜（AFM）系统包括连接到探针尖端的悬臂。 该系统控制悬臂的高度，以将探针尖端压靠在样品上，然后将探针尖端与样品分开，以在探针尖端与表面分离之后检测悬臂的干扰，并且使活动 悬臂的阻尼来抑制扰动。