Abstract:
In a method of vacuum packaging a MEMS device, at least one MEMS device is attached on a substrate. A solder preform is printed on the substrate at the perimeter surrounding the substrate. A lid is attached to the solder preform wherein the lid provides a cavity enclosing the at least one MEMS device. A first reflowing step reflows the solder at a first temperature, partially sealing the lid/substrate interface and at the same time does the outgassing and baking procedure for the packaging. Flux is applied onto an outer ring of the solder preform and a second step reflows the solder at a second temperature, completely sealing the lid/substrate interface and providing a vacuum cavity enclosing the at least one MEMS device.
Abstract:
A color filter (100) includes pixels (110), each pixel including three sub-pixels (111), and each sub-pixel including a reflection section (R) and a transmission section (T). In each pixel, the transmission sections and the reflection sections are alternately arranged along each row of the sections and along each column of the sections. The alternating arrangement of the transmission sections and the reflection sections of the pixels can provide a uniform pattern of hue balance over the whole display area. Furthermore, in various embodiments described, different optical thicknesses of the transmission sections and the reflection sections (or color layers of the reflection sections) can provide uniform hue over the whole display area.
Abstract:
The present invention provides a recording medium having a solid lubricating layer that has increased thermal stability over traditional solid lubricants. The lubricating layer includes amorphous fluorinated carbon doped with a thermally stabilizing dopant, such as N or SiO2. In one embodiment, a method of lubricating the recording medium by plasma-enhanced chemical vapor deposition is also provided.