公开(公告)号：US07298941B2

公开(公告)日：2007-11-20

申请号：US11354267

申请日：2006-02-14

Applicant: Edward L. Palen ,  Gregory L. Wojcik ,  Lawrence C. West

Inventor： Edward L. Palen ,  Gregory L. Wojcik ,  Lawrence C. West

IPC: G02B6/32 ,  B29B11/00

CPC classification number: G02B6/4214 ,  G02B6/4204 ,  G02B6/4206 ,  G02B6/423 ,  G02B6/4249

Abstract: An optoelectronic circuit including: an IC chip made up of a substrate in which an optical waveguide and a mirror have been fabricated, the substrate having a first lens formed thereon, wherein the mirror is aligned with the optical waveguide and the first lens is aligned with the mirror to form an optical path connecting the first lens, the mirror, and the optical waveguide; and an optical coupler including a second lens, the optical coupler affixed to the substrate and positioned to align the second lens with the first lens so as to couple an optical signal into or out of the optical waveguide within the IC chip.

Abstract translation: 一种光电子电路，包括：由其上制造有光波导和反射镜的基板构成的IC芯片，所述基板具有形成在其上的第一透镜，其中所述反射镜与所述光波导对准，并且所述第一透镜与 所述反射镜形成连接所述第一透镜，所述反射镜和所述光波导的光路; 以及包括第二透镜的光耦合器，所述光耦合器固定到所述基板并且被定位成将所述第二透镜与所述第一透镜对准，以将光信号耦合到所述IC芯片内的光波导中或从所述IC芯片中的所述光波导耦合。

公开(公告)号：US07110629B2

公开(公告)日：2006-09-19

申请号：US10623666

申请日：2003-07-21

Applicant: Claes Bjorkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

Inventor： Claes Bjorkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

IPC: G02B6/12

CPC classification number: G02B6/43 ,  G02B6/12 ,  G02B6/12004 ,  G02B6/30 ,  G02B6/4204 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283 ,  H01L21/84 ,  H01L27/1203

Abstract: An article of manufacture comprising an optical-ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.

Abstract translation: 一种制造方法，包括由第一半导体层制成的光学就绪衬底，在第一半导体层的顶部上的绝缘层和在绝缘层的顶部上的第二半导体层，其中第二半导体层具有顶表面和 横向分为包括第一区域和第二区域的两个区域，第一区域的顶表面具有足以允许在其中形成微电子电路的质量，并且第二区域包括其中形成的光信号分配电路， 所述光信号分配电路由互连的半导体光子元件组成并且被设计成向要在第二半导体层的第一区域中制造的微电子电路提供信号。

公开(公告)号：US07072534B2

公开(公告)日：2006-07-04

申请号：US10280505

申请日：2002-10-25

Applicant: Claes Björkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

Inventor： Claes Björkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

IPC: G02B6/12

CPC classification number: G02B6/12004 ,  G02B6/12 ,  G02B6/30 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283 ,  G02B6/43

Abstract: An article of manufacture comprising an optical ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.

Abstract translation: 一种制品，包括由第一半导体层制成的光学就绪衬底，在第一半导体层的顶部上的绝缘层和在绝缘层的顶部上的第二半导体层，其中第二半导体层具有顶表面，并且是 横向分为包括第一区域和第二区域的两个区域，第一区域的顶表面的质量足以允许在其中形成微电子电路，并且第二区域包括其中形成的光信号分配电路， 光信号分配电路由互连的半导体光子元件组成，并被设计为向要在第二半导体层的第一区域中制造的微电子电路提供信号。

公开(公告)号：US20190001159A1

公开(公告)日：2019-01-03

申请号：US16022799

申请日：2018-06-29

Applicant: Kailiang Chen ,  Lawrence C. West ,  Jaime Scott Zahorian ,  Nevada J. Sanchez ,  Tyler S. Ralston

Inventor： Kailiang Chen ,  Lawrence C. West ,  Jaime Scott Zahorian ,  Nevada J. Sanchez ,  Tyler S. Ralston

IPC: A61N7/00 ,  A61N7/02

Abstract: Ultrasound devices configured to perform high-intensity focused ultrasound (HIFU) are described. An ultrasound device may include HIFU units configured to emit high acoustic intensities. Multiple ultrasound devices may be disposed on a substrate, which may be configured to be flexed so that the direction of emission of the ultrasound devices can be mechanically controlled. Additionally, or alternatively, the ultrasound beams produced by different ultrasound devices may be electronically oriented by adjusting the phases of the signals with which each element of a device is driven. For example, multiple phased arrays of ultrasound devices may be used to concentrate ultrasound energy into a desired location. In some embodiments, the time at which different ultrasound signals are emitted may be controlled, for example to ensure that the combined signal has at least a desired intensity.

公开(公告)号：US07760980B2

公开(公告)日：2010-07-20

申请号：US11514291

申请日：2006-08-31

Applicant: Lawrence C. West ,  Gregory L. Wojcik ,  Francisco A. Leon ,  Yonah Cho ,  Andreas Goebel

Inventor： Lawrence C. West ,  Gregory L. Wojcik ,  Francisco A. Leon ,  Yonah Cho ,  Andreas Goebel

IPC: G02B6/10 ,  G02B6/13

CPC classification number: G02B6/132 ,  G02B6/12004 ,  G02B6/1347 ,  G02B6/136 ,  G02B2006/12097 ,  G02B2006/121 ,  G02B2006/12123 ,  G02B2006/12176 ,  H01L31/02327 ,  H01L31/1812 ,  Y02E10/50

Abstract: A method of fabricating on a substrate an optical detector in an optical waveguide, the method involving: forming at least one layer on a surface of the substrate, said at least one layer comprising SiGe; implanting an impurity into the at least one layer over a first area to form a detector region for the optical detector; etching into the at least one layer in a first region and a second region to form a ridge between the first and second regions, said ridge defining the optical detector and the optical waveguide; filling the first and second regions with a dielectric material having a lower refractive index than SiGe; and after filling the first and second regions with the dielectric material, removing surface material to form a planarized upper surface.

Abstract translation: 一种在光波导中在基板上制造光检测器的方法，所述方法包括：在所述基板的表面上形成至少一层，所述至少一层包括SiGe; 在第一区域上将杂质注入到所述至少一个层中以形成用于所述光学检测器的检测器区域; 在第一区域和第二区域中蚀刻到所述至少一个层中以在所述第一和第二区域之间形成脊，所述脊限定所述光学检测器和所述光波导; 用具有比SiGe低的折射率的电介质材料填充第一和第二区域; 并且在用电介质材料填充第一和第二区域之后，去除表面材料以形成平坦化的上表面。

公开(公告)号：US07529435B2

公开(公告)日：2009-05-05

申请号：US10856120

申请日：2004-05-28

Applicant: Lawrence C. West ,  Dan Mayden

Inventor： Lawrence C. West ,  Dan Mayden

IPC: G02B6/12 ,  H04B10/00

CPC classification number: G02B6/12004 ,  G02B6/122 ,  G02B6/2813 ,  G02B6/32 ,  G02B2006/12119 ,  G02B2006/12123 ,  G02B2006/1215

Abstract: An optical signal distribution network including a semiconductor substrate including a waveguide formed therein to carry an optical signal; and a plurality of detectors within the waveguide and serially arranged along its length, each of the detectors being capable of detecting the optical signal passing through it and sufficiently transparent to the optical signal to enable the optical signal to reach and be detected by all of the plurality of detectors.

Abstract translation: 一种光信号分配网络，包括：半导体衬底，包括形成在其中的波导，以承载光信号; 以及波导内的多个检测器，并沿着其长度串联布置，每个检测器能够检测通过光信号并对光信号充分透明的光信号，以使光信号能够被所有的光信号 多个检测器。

公开(公告)号：US07505647B2

公开(公告)日：2009-03-17

申请号：US11771760

申请日：2007-06-29

Applicant: Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

Inventor： Andreas Goebel ,  Lawrence C. West ,  Gregory L. Wojcik

IPC: G02B6/28 ,  H04J14/00 ,  H04J14/02

CPC classification number: G02B6/4246 ,  G02B6/2931 ,  G02B6/2938

Abstract: Methods and structures are disclosed demultiplexing optical signals transmitted over an optical fiber into a silicon substrate and to multiple detectors. The silicon substrate has two spaced-apart surfaces and a diffractive element disposed adjacent to one of the surfaces. Each of the optical signals corresponds to one of multiple wavelengths. The optical signals are directed into the silicon substrate along a path through the first surface to be incident on the diffractive element. The path is oriented generally normal with the first surface and/or with the diffractive element, which angularly separates the optical signals such that each of the wavelengths traverses through the substrate in a wavelength dependent direction to the first surface. Each optical signal is steered from the first surface towards the second surface to be incident on different optical elements that direct them generally normal to the first surface to be incident on one of the detectors.

Abstract translation: 公开了将光纤传输到硅衬底和多个检测器中的方法和结构。 硅衬底具有两个间隔开的表面和与其中一个表面相邻设置的衍射元件。 每个光信号对应于多个波长中的一个。 沿着穿过第一表面的路径将光信号引导到硅衬底中以入射到衍射元件上。 该路径与第一表面和/或衍射元件大致正交，该衍射元件使光信号成角度地分离，使得每个波长以与波长相关的方向穿过基板。 每个光信号从第一表面转向第二表面以入射到不同的光学元件上，这些光学元件将它们大致垂直于第一表面入射到其中一个检测器上。

公开(公告)号：US07170142B2

公开(公告)日：2007-01-30

申请号：US10854075

申请日：2004-05-26

Applicant: Gregory L. Wojcik ,  Lawrence C. West ,  Thomas P. Pearsall

Inventor： Gregory L. Wojcik ,  Lawrence C. West ,  Thomas P. Pearsall

IPC: H01L31/00

CPC classification number: G02B6/1226 ,  B82Y20/00 ,  G02B6/12004 ,  G02B6/42 ,  H01L31/02327 ,  H01L31/108 ,  H01P1/15

Abstract: A planar integrated circuit includes a semiconductor substrate having a substrate surface and a trench in the substrate, a waveguide medium in the trench having a top surface and a light propagation axis, the trench having a sufficient depth for the waveguide medium to be at or below said substrate surface, and at least one Schottky barrier electrode formed on the top surface of said waveguide medium and defining a Schottky barrier detector consisting of the electrode and the portion of the waveguide medium underlying the Schottky barrier electrode, at least the underlying portion of the waveguide medium being a semiconductor and defining an electrode-semiconductor interface parallel to the light propagation axis so that light of a predetermined wavelength from said waveguide medium propagates along the interface as a plasmon-polariton wave.

Abstract translation: 平面集成电路包括具有衬底表面和衬底中的沟槽的半导体衬底，沟槽中的波导介质具有顶表面和光传播轴，沟槽具有足够的深度以使波导介质处于或低于 所述衬底表面和形成在所述波导介质的顶表面上的至少一个肖特基势垒电极，并且限定由所述电极和所述肖特基势垒电极下方的所述波导介质的所述部分组成的肖特基势垒检测器， 波导介质是半导体并且限定平行于光传播轴线的电极 - 半导体界面，使得来自所述波导介质的预定波长的光作为等离子体 - 激元波沿着界面传播。

公开(公告)号：US07043106B2

公开(公告)日：2006-05-09

申请号：US10280492

申请日：2002-10-25

Applicant: Lawrence C. West ,  Claes Björkman ,  Dan Maydan ,  Samuel Broydo

Inventor： Lawrence C. West ,  Claes Björkman ,  Dan Maydan ,  Samuel Broydo

IPC: G02B6/12

CPC classification number: G02B6/43 ,  G02B6/12 ,  G02B6/12004 ,  G02B6/30 ,  G02B6/4201 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283

Abstract: An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.

Abstract translation: 至少部分由第一半导体材料制成并且具有前侧和后侧的光学就绪衬底，所述前侧具有足够质量的顶表面，以允许使用半导体制造处理技术在其上制造微电子电路。 光学就绪衬底包括在衬底的顶表面下方的第一层区域中制造在衬底的前侧上的光信号分配电路。 光信号分配电路由互连的半导体光子元件组成，并被设计成向要在其上制造的微电子电路提供信号。

公开(公告)号：US5917967A

公开(公告)日：1999-06-29

申请号：US861387

申请日：1997-05-21

Applicant: Madan Dubey ,  Kenneth A. Jones ,  Weiyu Han ,  Lawrence C. West

Inventor： Madan Dubey ,  Kenneth A. Jones ,  Weiyu Han ,  Lawrence C. West

IPC: G02B6/10 ,  G02B6/12 ,  G02B6/122 ,  G02B6/132 ,  G02B6/136 ,  G02B6/43

CPC classification number: G02B6/10 ,  G02B6/12004 ,  G02B6/122 ,  G02B6/132 ,  G02B6/136 ,  G02B2006/12176 ,  G02B6/43

Abstract: An optical electronic integrated circuit (OEIC) having optical waveguides as device interconnects. An optical waveguide is formed by depositing, in an oxygen-free atmosphere, a film of semiconductor material on a semiconductor substrate at a temperature that substantially diminishes the porosity of the film and the diffusion of material from the substrate into the film. The semiconductor film, which has an index of refraction greater than that of the substrate, is etched to form the optical waveguide on the substrate. The substrate also supports a to plurality of active optical devices between which the optical waveguide extends. The substrate is preferably formed from gallium-arsenide and the waveguide from germanium. The active devices may also include these materials as well as aluminum-gallium-arsenide. When using these materials, the germanium film is deposited in an oxygen-free environment at about 100 degrees centigrade.

Abstract translation: 一种具有光波导作为器件互连的光电子集成电路（OEIC）。 通过在基本上降低膜的孔隙率和材料从衬底扩散到膜中的温度下，在半导体衬底上在无氧气氛中沉积半导体材料的膜而形成光波导。 蚀刻具有大于基板的折射率的半导体膜，以在基板上形成光波导。 基板还支撑一个至多个有源光学器件，光波导延伸在其间。 衬底优选由砷化镓和来自锗的波导形成。 有源器件还可以包括这些材料以及砷化镓铝。 当使用这些材料时，锗膜在大约100摄氏度的无氧环境中沉积。