COMBUSTION CHAMBER PRESSURE SENSOR FOR RECORDING A PRESSURE IN A COMBUSTION CHAMBER OF AN INTERNAL COMBUSTION ENGINE
    11.
    发明申请
    COMBUSTION CHAMBER PRESSURE SENSOR FOR RECORDING A PRESSURE IN A COMBUSTION CHAMBER OF AN INTERNAL COMBUSTION ENGINE 有权
    燃烧室压力传感器,用于记录内燃机燃烧室内的压力

    公开(公告)号:US20120174660A1

    公开(公告)日:2012-07-12

    申请号:US13323392

    申请日:2011-12-12

    IPC分类号: G01M15/00

    CPC分类号: G01L19/0681

    摘要: A combustion chamber pressure sensor is provided for recording a pressure in a combustion chamber of an internal combustion engine, the combustion chamber pressure sensor has a housing having an inner space that is at least partially enclosed by the housing. At least one mechanical-electrical transducer element, for recording the pressure, is accommodated in the housing. The housing has at least one housing opening. The housing opening is sealed by at least one diaphragm. The diaphragm has at least one convex curvature towards the inner space.

    摘要翻译: 提供了一种燃烧室压力传感器,用于在内燃机的燃烧室中记录压力,所述燃烧室压力传感器具有至少部分地被壳体包围的内部空间的壳体。 用于记录压力的至少一个机械 - 电子换能器元件容纳在壳体中。 壳体具有至少一个壳体开口。 壳体开口由至少一个隔膜密封。 隔膜具有至少一个朝向内部空间的凸曲率。

    Micromechanical sensor element for capacitive differential pressure detection
    12.
    发明申请
    Micromechanical sensor element for capacitive differential pressure detection 有权
    用于电容差压检测的微机械传感器元件

    公开(公告)号:US20110192236A1

    公开(公告)日:2011-08-11

    申请号:US13023855

    申请日:2011-02-09

    IPC分类号: G01L1/00

    CPC分类号: G01L9/0073 G01L13/025

    摘要: A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.

    摘要翻译: 用于电容式压力测量的传感器概念可以产生可靠的测量结果,并且适用于积极的颗粒承载测量环境。 该传感器元件是微机械传感器元件,其结构元件以分层结构实现。 传感器元件包括彼此分离的两个压力连接,用于至少一个可偏转测量电极的可偏转载体元件和用于测量电极的至少一个固定反电极。 载体元件跨越分层结构中的封闭空腔。 载体元件由盖结构跨越,并且通过用作摇摆轴承的悬挂腹板悬挂在盖结构上。 两个压力连接件连接到载体元件的顶侧,该悬挂网被分离成两个分离的压力连接区域。 测量电极在载体元件的下侧,反电极位于腔的相对的壁上。

    Pressure-measuring device
    13.
    发明授权
    Pressure-measuring device 有权
    压力测量装置

    公开(公告)号:US07954382B2

    公开(公告)日:2011-06-07

    申请号:US12304925

    申请日:2007-10-16

    IPC分类号: G01L7/08 G01L23/22

    摘要: A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm. In this way, there takes place at least a partial compensation of thermally caused changes in length of the diaphragm, caused for example by hot combustion gases, and resulting in periodic impairments of the pressure measurement made by the pressure sensor.

    摘要翻译: 压力测量装置位于内燃机的腔室中。 压力测量装置具有壳体,在壳体的室侧开口处部分地从壳体突出的力传递元件和位于壳体的内部空间中的压力传感器。 压力传感器有效连接到力传递元件。 此外,设置有隔膜,其将压力传感器所在的壳体的内部空间密封到室侧开口。 优选地,作为金属隔膜形成的隔膜具有沿力传递元件的轴向定向的力传递段。 此外,压力传感器经由隔膜的力传递段与力传递元件有效连接。 以这种方式,至少发生热引起的隔膜长度变化的部分补偿,例如通过热燃烧气体引起的,并且导致由压力传感器进行的压力测量的周期性损伤。

    SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING
    14.
    发明申请
    SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING 有权
    传感器元件用于电容式差压检测

    公开(公告)号:US20100170346A1

    公开(公告)日:2010-07-08

    申请号:US12644331

    申请日:2009-12-22

    IPC分类号: G01L9/12

    摘要: A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.

    摘要翻译: 传感器设计分别是用于电容式相对压力测量的微机械传感器结构,即使在苛刻的,充满颗粒的测量环境中,也能够将极小的压差可靠地记录在高绝对压力下。 为此目的,微机械传感器元件包括可偏转的膜结构,其具有至少一个可偏转电极,以及用于至少一个与可偏转电极相对的固定对置电极的固定支撑结构。 隔膜结构包括通过至少一个连接横档彼此刚性地连接的两个相互平行的构造的隔膜,使得对两个隔膜中的一个的每个施加的力直接传递到相应的另一个隔膜。 第一隔膜能够通过从传感器元件的前侧发出的第一测量压力被加压,并且第二隔膜能够被从传感器元件的后侧发出的第二测量压力加压。 固定对置电极位于隔膜结构的两个隔膜之间的密封体积中。

    Micromechanical rotational rate sensor
    16.
    发明申请
    Micromechanical rotational rate sensor 有权
    微机电转速传感器

    公开(公告)号:US20060107738A1

    公开(公告)日:2006-05-25

    申请号:US11328755

    申请日:2006-01-09

    IPC分类号: G01P15/08

    CPC分类号: G01C19/5747

    摘要: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

    摘要翻译: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置,第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置,通过该检测装置,第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件,第二科里奥利质量元件,第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

    Multi-layer microvalve having integral closure, membrane and pressure
compensating surface forming a middle layer
    17.
    发明授权
    Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer 失效
    具有整体闭合的多层微型阀,形成中间层的膜和压力补偿表面

    公开(公告)号:US5647574A

    公开(公告)日:1997-07-15

    申请号:US360652

    申请日:1994-12-16

    摘要: The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.

    摘要翻译: PCT No.PCT / DE93 / 00493 Sec。 371日期1994年12月16日第 102(e)日期1994年12月16日PCT提交1993年6月8日PCT公布。 出版物WO94 / 00696 日期1994年1月6日根据本发明的微型阀以分层方式组成至少一个底部部分(11),一个中间部分(12)和一个顶部部件(13)。 密封环31(封闭构件),阀板29(压力补偿面)和膜26一体化在中间部分12中,该整体构件通过塑性模制工艺制造。 阀的致动使用电动操作装置进行,例如通过静电驱动,电磁或压电驱动。 特别是在静电驱动的情况下,将两个电极(17,22)分层地施加到中间部分(12)或底部部分(11)。 底部,中间部分和顶部部分被连接在一起并且连接在一起,例如被连接或焊接在一起。

    Micromechanical sensor element for capacitive differential pressure detection
    18.
    发明授权
    Micromechanical sensor element for capacitive differential pressure detection 有权
    用于电容差压检测的微机械传感器元件

    公开(公告)号:US08371180B2

    公开(公告)日:2013-02-12

    申请号:US13023855

    申请日:2011-02-09

    IPC分类号: G01L1/00

    CPC分类号: G01L9/0073 G01L13/025

    摘要: A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.

    摘要翻译: 用于电容式压力测量的传感器概念可以产生可靠的测量结果,并且适用于积极的颗粒承载测量环境。 该传感器元件是微机械传感器元件,其结构元件以分层结构实现。 传感器元件包括彼此分离的两个压力连接,用于至少一个可偏转测量电极的可偏转载体元件和用于测量电极的至少一个固定反电极。 载体元件跨越分层结构中的封闭空腔。 载体元件由盖结构跨越,并且通过用作摇摆轴承的悬挂腹板悬挂在盖结构上。 两个压力连接件连接到载体元件的顶侧,该悬挂网被分离成两个分离的压力连接区域。 测量电极在载体元件的下侧,反电极位于腔的相对的壁上。

    Sensor system for measuring pressure
    20.
    发明授权
    Sensor system for measuring pressure 失效
    用于测量压力的传感器系统

    公开(公告)号:US07549343B2

    公开(公告)日:2009-06-23

    申请号:US12075650

    申请日:2008-03-12

    IPC分类号: G01L7/06

    CPC分类号: G01L23/18

    摘要: A sensor system for measuring the pressure in the combustion chamber of an internal combustion engine, by the use of which a high measuring accuracy may be achieved, based on high measuring sensitivity and great thermal stability. In addition, the construction of the sensor system makes possible great system flexibility, and particularly very space-saving installation in the combustion chamber of an internal combustion engine. For this purpose, the sensor system includes at least one electrically conductive spring element and at least one electrically conductive counter-element, the spring element and the counter-element being in mechanical contact over at least one contact area, the contact surface of the spring element having a different curvature profile from that of the contact surface of the counter-element, so that a force action or pressure action, that have the effect of an elastic deformation of the spring element, results in a size change of the contact area between the spring element and the counter-element, and the contact surface of at least one of the two elements, the spring element and/or the counter-element, being provided with a highly resistive coating, so that a size change in the contact area results in a change in the resistance of the system composed of the spring element and the counter-element.

    摘要翻译: 基于高测量灵敏度和大的热稳定性,可以通过使用高测量精度来测量内燃机的燃烧室中的压力的​​传感器系统。 此外,传感器系统的结构使得系统的灵活性变得可能,并且特别是在内燃机的燃烧室中非常节省空间的安装。 为此,传感器系统包括至少一个导电弹簧元件和至少一个导电相对元件,弹簧元件和对元件在至少一个接触区域上机械接触,弹簧的接触表面 元件具有与相对元件的接触表面的曲率分布不同的曲率分布,使得具有弹簧元件的弹性变形作用的力作用或压力作用导致了第二元件之间的接触面积的尺寸变化, 所述弹簧元件和所述相对元件以及所述两个元件中的至少一个的所述接触表面,所述弹簧元件和/或所述相对元件设置有高电阻涂层,使得所述接触面积的尺寸变化 导致由弹簧元件和反元件组成的系统的电阻的变化。