摘要:
A combustion chamber pressure sensor is provided for recording a pressure in a combustion chamber of an internal combustion engine, the combustion chamber pressure sensor has a housing having an inner space that is at least partially enclosed by the housing. At least one mechanical-electrical transducer element, for recording the pressure, is accommodated in the housing. The housing has at least one housing opening. The housing opening is sealed by at least one diaphragm. The diaphragm has at least one convex curvature towards the inner space.
摘要:
A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.
摘要:
A pressure-measuring device is situated in a chamber of an internal combustion engine. The pressure-measuring device has a housing, a force-transmitting element that protrudes partly from the housing at a chamber-side opening of the housing, and a pressure sensor that is situated in an interior space of the housing. The pressure sensor stands in effective connection to the force-transmitting element. In addition, a diaphragm is provided that seals the interior space of the housing, in which the pressure sensor is situated, against the chamber-side opening. The diaphragm, which is preferably fashioned as a metal diaphragm, has a force-transmitting segment that is oriented in an axial direction of the force-transmitting element. Moreover, the pressure sensor stands in effective connection with the force-transmitting element via the force-transmitting segment of the diaphragm. In this way, there takes place at least a partial compensation of thermally caused changes in length of the diaphragm, caused for example by hot combustion gases, and resulting in periodic impairments of the pressure measurement made by the pressure sensor.
摘要:
A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm. The first diaphragm is able to be pressurized by a first measuring pressure emanating from the front side of the sensor element, and the second diaphragm is able to be pressurized by a second measuring pressure emanating from the rear side of the sensor element. The fixed counter-electrode is located in the sealed volume between the two diaphragms of the diaphragm structure.
摘要:
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
摘要:
An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
摘要:
The microvalve according to the invention is composed in a layered manner of at least one bottom part (11), one middle part (12) and one top part (13). The sealing ring (31) (closure member), the valve plate (29) (pressure-compensating surface) and the membrane (26) are integrated in the middle part (12), this integral component being manufactured by a plastic moulding process. The actuation of the valve takes place using an electrical operating apparatus, for example by an electrostatic drive, an electromagnetic or a piezoelectric drive. In particular in the case of the electrostatic drive, two electrodes (17, 22) are applied in a layered manner to the middle part (12) or the bottom part (11). The bottom part, middle part and top part are joined together and connected, for example bonded or welded, permanently to one another.
摘要:
A sensor concept for capacitive pressure measurement yields reliable measurement results and is for aggressive particle-bearing measuring environments. This sensor element is a micromechanical sensor element, whose structural elements are implemented in a layered structure. The sensor element includes two pressure connections separated from each other, a deflectable carrier element for at least one deflectable measuring electrode, and at least one stationary counter electrode for the measuring electrode. The carrier element spans a closed cavity in the layered structure. The carrier element is spanned by a cap structure, and is suspended on the cap structure via a suspension web functioning as a rocker bearing. The two pressure connections are connected to the carrier element's top side which is divided by the suspension web into two separated pressure connection zones. The measuring electrode is on the carrier element's underside and the counter electrode is on the cavity's opposite wall.
摘要:
A glow plug for a combustion chamber of a self-igniting internal combustion engine has a ceramic heating element designed as a sheathed-element glow plug, which is surrounded by a supporting tube. The ceramic heating element is sealed with respect to the combustion chamber of the internal combustion engine by a seal in the supporting tube. The seal is designed as a sealing element made of an FeNi alloy having an Invar effect.
摘要:
A sensor system for measuring the pressure in the combustion chamber of an internal combustion engine, by the use of which a high measuring accuracy may be achieved, based on high measuring sensitivity and great thermal stability. In addition, the construction of the sensor system makes possible great system flexibility, and particularly very space-saving installation in the combustion chamber of an internal combustion engine. For this purpose, the sensor system includes at least one electrically conductive spring element and at least one electrically conductive counter-element, the spring element and the counter-element being in mechanical contact over at least one contact area, the contact surface of the spring element having a different curvature profile from that of the contact surface of the counter-element, so that a force action or pressure action, that have the effect of an elastic deformation of the spring element, results in a size change of the contact area between the spring element and the counter-element, and the contact surface of at least one of the two elements, the spring element and/or the counter-element, being provided with a highly resistive coating, so that a size change in the contact area results in a change in the resistance of the system composed of the spring element and the counter-element.