公开(公告)号：US5633715A

公开(公告)日：1997-05-27

申请号：US446019

申请日：1995-05-19

Applicant: Chiayu Ai ,  Erik L. Novak

Inventor： Chiayu Ai ,  Erik L. Novak

IPC: G01B11/00 ,  G01B11/02

CPC classification number: G01B9/02083 ,  G01B9/02057 ,  G01B9/0209

Abstract: A broad-bandwidth interferometric system that produces irradiance signals at multiple vertical-scanning positions as a function of optical path differences between a test and a reference surface. The effective peak of the envelope defined by the modulation component of the irradiance signal is estimated by finding the scanning position corresponding to the centroid of a function substantially equal to the square of the first-order derivative of the measured irradiance. The surface height at each pixel is determined directly from digital irradiance signals, thereby greatly reducing the data-processing steps and associated costs taught by the prior art and correspondingly simplifying the hardware requirements of the system for rapid on-line display of height measurements. The approach is free of the ambiguities inherent in multi-peak modulation functions, thereby producing surface maps with reduced artifacts. This improved technique produces results otherwise comparable with those obtained by standard techniques and requires no dedicated hardware for rapid on-line applications.

Abstract translation: 宽带干涉测量系统，其在多个垂直扫描位置处产生作为测试和参考表面之间的光程差的函数的辐射信号。 由辐照度信号的调制分量确定的包络线的有效峰值通过求出与基本上等于测得的辐照度的一阶导数的平方的函数的质心对应的扫描位置来估计。 每个像素处的表面高度直接由数字辐照度信号确定，从而大大减少了现有技术教导的数据处理步骤和相关成本，并相应地简化了系统的硬件需求，用于快速在线显示高度测量。 该方法没有多峰调制功能所固有的模糊性，从而产生具有减少伪像的曲面图。 这种改进的技术产生了与通过标准技术获得的结果相当的结果，并且不需要用于快速在线应用的专用硬件。

公开(公告)号：US5471303A

公开(公告)日：1995-11-28

申请号：US247065

申请日：1994-05-20

Applicant: Chiayu Ai ,  Paul J. Caber

Inventor： Chiayu Ai ,  Paul J. Caber

IPC: G01B11/00 ,  G01B11/02

CPC classification number: G01B9/02083 ,  G01B11/2441 ,  G01B9/02048 ,  G01B9/02057 ,  G01B9/0209

Abstract: Interferometric apparatus that combines white-light VSI and single-wavelength PSI capabilities to improve the accuracy of height measurements in steep regions and in areas with large inter-pixel steps on the test surface. The technique consists of performing VSI measurements to obtain a relatively coarse profile of the test surface and to identify regions separated by a large step. Then PSI measurements are carried out over the test surface to obtain a relatively fine profile. Offsets between VSI and PSI measurements are calculated to correct for misalignments and phase shifts that may have occurred between the two sets of measurements. Finally, the fine PSI data are integrated to within one quarter wavelength of the coarse VSI data. The resulting quality of the height data in each of the step regions is thus improved to within the resolution of the PSI measurements.

Abstract translation: 将白光VSI和单波长PSI功能组合在一起的干涉测量装置，以提高陡峭区域和测试表面上大像素间距区域的高度测量精度。 该技术包括执行VSI测量以获得测试表面的相对粗糙的轮廓并识别由大步骤分离的区域。 然后在测试表面上进行PSI测量以获得相对精细的轮廓。 计算VSI和PSI测量之间的偏移，以校正两组测量之间可能发生的不对准和相移。 最后，精细的PSI数据被集成到粗略VSI数据的四分之一波长内。 因此，每个步进区域中的高度数据的最终质量因此提高到PSI测量的分辨率内。

公开(公告)号：US20070285659A1

公开(公告)日：2007-12-13

申请号：US11810873

申请日：2007-06-07

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: G01J3/06 ,  G01J3/28

CPC classification number: G01J3/06 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0289 ,  G01J3/2889 ,  G01J3/32 ,  G01J2003/1243

Abstract: An optical spectrum analyzer is implemented with a detector combined with a tunable filter mounted on a stage capable of 360-degree rotation at a constant velocity. Because of the constant rate of angular change, different portions of the input spectrum are detected at each increment of time as a function of filter position, which can be easily measured with an encoder for synchronization purposes. The unidirectional motion of the mirror permits operation at very high speeds with great mechanical reliability. The same improvements may be obtained using a diffraction grating or a prism, in which case the detector or an intervening mirror may be rotated instead of the grating or prism.

Abstract translation: 光谱分析仪采用与安装在能够以恒定速度360度旋转的平台上的可调滤波器组合的检测器。 由于角度变化的恒定速率，输入频谱的不同部分在每个增量时间上被检测为滤波器位置的函数，这可以通过编码器容易地用于同步目的来测量。 镜子的单向运动允许以非常高的速度运行，具有很大的机械可靠性。 可以使用衍射光栅或棱镜获得相同的改进，在这种情况下，可以旋转检测器或中间镜来代替光栅或棱镜。

公开(公告)号：US07286757B1

公开(公告)日：2007-10-23

申请号：US10758408

申请日：2004-01-14

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: H04B10/08 ,  H04B10/06

CPC classification number: H04B10/07953

Abstract: A wavelength beam splitter (WBS) is combined with a conventional tunable filter to sequentially select different channels in a multi-channel communication system. The WBS is characterized by a periodic spectral response with period equal to the channel spacing of the ITU grid. Preferably, the WBS consists of an optical cavity with an optical path length that produces a free-spectral range substantially equal to the channel spacing of the ITU grid. The WBS is used to separate the signal in each channel passband from the noise in the corresponding channel stopband. This provides a signal and a noise output for each channel. A tunable filter is used to scan the channels of the ITU grid sequentially and provide output signals for a single channel at a time. Therefore, a much smaller frequency bandwidth needs to be measured at a time and a less expensive detector may be used.

Abstract translation: 波长分束器（WBS）与传统的可调滤波器组合，以在多声道通信系统中顺序地选择不同的声道​​。 WBS的特征在于具有周期等于ITU网格的信道间隔的周期性频谱响应。 优选地，WBS由具有光路长度的光腔组成，该光腔长度产生基本上等于国际电联网格的信道间隔的自由光谱范围。 WBS用于将每个信道通带中的信号与相应信道阻带中的噪声分离。 这为每个通道提供信号和噪声输出。 可调谐滤波器用于顺序地扫描ITU网络的信道，并一次为单个信道提供输出信号。 因此，需要一次测量更小的频率带宽，并且可以使用较便宜的检测器。

公开(公告)号：US20050270544A1

公开(公告)日：2005-12-08

申请号：US11146614

申请日：2005-06-06

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai ,  Chih-Hung Chien

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai ,  Chih-Hung Chien

IPC: G01B9/02 ,  G02B6/34 ,  H04B10/18

CPC classification number: G02B6/29358 ,  G02B6/29386 ,  H04B10/25133

Abstract: Optical interferometers with variable dispersion are shown. These interferometers are useful as optical interleavers and through the control of their design, are made to have negative and near-zero dispersion. The N-type interleaver has a negative dispersion slope near the center of the pass band. The Z-type interleaver has a dispersion that is close to zero within the pass band. These interleavers can be arranged in various systems to produce low dispersion optical networks. The non-linear phase etalons in the N- and Z-type interleavers taught herein contribute to the device dispersion. The N-Type interleaver includes a linear cavity length that is 1.5 times that of a non-linear cavity. The Z-type interleaver includes two non-linear cavities that are out of phase with each other such that the net dispersion is close to zero.

Abstract translation: 示出了具有可变色散的光学干涉仪。 这些干涉仪可用作光学交织器并且通过其设计的控制被制成具有负的和接近零的色散。 N型交错器在通带中心附近具有负色散斜率。 Z型交织器在通带内具有接近于零的色散。 这些交织器可以布置在各种系统中以产生低色散光网络。 这里教导的N型和Z型交织器中的非线性相位标准具有助于器件分散。 N型交错器包括与非线性腔的1.5倍的线性腔长度。 Z型交错器包括彼此不同相的两个非线性空腔，使得净色散接近于零。

公开(公告)号：US20230030757A1

公开(公告)日：2023-02-02

申请号：US17868016

申请日：2022-07-19

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: H01S3/00 ,  G02B27/09 ,  G02B27/12

Abstract: Methodology of forming a substantially flat-top illuminating light beam, from a beam at the laser output having a conventionally non-uniform distribution of irradiance, with the use of only a birefringent prismatic element and light-focusing optics. Preferably, the cross-sectional area of such illuminating light distribution is shaped to be elongated or even substantially rectangular to have it used advantageously in various metrological situations such as, for example, the operation of a moving particle analyzer.

公开(公告)号：US08953161B2

公开(公告)日：2015-02-10

申请号：US13668463

申请日：2012-11-05

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: G01J3/28

CPC classification number: G01J3/32 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1243

Abstract: An optical spectrum analyzer is implemented with a detector combined with a tunable filter mounted on a stage capable of 360-degree rotation at a constant velocity. Because of the constant rate of angular change, different portions of the input spectrum are detected at each increment of time as a function of filter position, which can be easily measured with an encoder for synchronization purposes. The unidirectional motion of the mirror permits operation at very high speeds with great mechanical reliability. The same improvements may be obtained using a diffraction grating or a prism, in which case the detector or an intervening mirror may be rotated instead of the grating or prism.

Abstract translation: 光谱分析仪采用与安装在能够以恒定速度360度旋转的平台上的可调滤波器组合的检测器。 由于角度变化的恒定速率，输入频谱的不同部分在每个增量时间上被检测为滤波器位置的函数，这可以通过编码器容易地用于同步目的来测量。 镜子的单向运动允许以非常高的速度运行，具有很大的机械可靠性。 可以使用衍射光栅或棱镜获得相同的改进，在这种情况下，可以旋转检测器或中间镜来代替光栅或棱镜。

公开(公告)号：US07408713B1

公开(公告)日：2008-08-05

申请号：US10338465

申请日：2003-01-08

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: G02B27/00 ,  G01B9/02

CPC classification number: H04J14/02 ,  G02B6/2813 ,  G02B6/29344 ,  G02B6/29358

Abstract: The cavity in the mirror arm of a conventional interleaver is replaced by a wedge integral with the beamsplitter structure of the interleaver. Thus, the light reflected from the AR-coated surface of the wedge is dispersed away from the optics of the device. The beam emerging from the wedge surface is directed toward a tilted mirror that reflects it totally on-axis. As a result of the diversion of the light reflected from the wedge surface and the non-parallel disposition of the wedge surface with respect to the mirror, phase errors are virtually eliminated. In another embodiment, a second wedge is used with a second antireflective surface disposed in parallel to the first wedge's antireflective surface, and with a mirror normal to the optical axis of the device.

Abstract translation: 常规交织器的镜臂中的空腔由与交织器的分束器结构集成的楔形物代替。 因此，从AR的被涂覆的表面反射的光被分散远离装置的光学元件。 从楔形表面出射的光束指向一个倾斜的反射镜，将其完全反射在轴上。 由于从楔形表面反射的光的转移和楔形表面相对于反射镜的非平行布置，实际上消除了相位误差。 在另一个实施例中，第二楔形物与第二抗反射表面一起使用，第二抗反射表面平行于第一楔形物的抗反射表面，并具有垂直于装置的光轴的反射镜。

公开(公告)号：US20060268277A1

公开(公告)日：2006-11-30

申请号：US11360959

申请日：2006-02-22

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai ,  Chih-Hung Chien ,  Daryuan Song

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai ,  Chih-Hung Chien ,  Daryuan Song

IPC: G01B9/02

CPC classification number: H04B10/677

Abstract: An interferometer includes a means for splitting, at a splitting location, an input light beam into a first beam and a second beam; and means for recombining, at a recombination location, the first beam and the second beam. The interferometer is designed such that the first beam will travel a first optical path length (OPL) from the splitting location to the recombination location, and the second beam will travel a second OPL from the splitting location to the recombination location and such that when the input light beam has been modulated at a data rate comprising a time interval, then the difference in optical path lengths between the first OPL and the second OPL is about equal to the time interval multiplied by the speed of light

Abstract translation: 干涉仪包括用于在分离位置将输入光束分成第一光束和第二光束的装置; 以及用于在复合位置重组第一光束和第二光束的装置。 干涉仪被设计成使得第一光束将从分割位置行进到第一光路长度（OPL）到复合位置，并且第二光束将使第二OPL从分离位置传播到复合位置，并且使得当 已经以包括时间间隔的数据速率调制输入光束，则第一OPL和第二OPL之间的光程长度差大约等于乘以光速的时间间隔

公开(公告)号：US07092162B1

公开(公告)日：2006-08-15

申请号：US11200932

申请日：2005-08-09

Applicant: Yung-Chieh Hsieh ,  Chiayu Ai

Inventor： Yung-Chieh Hsieh ,  Chiayu Ai

IPC: B02B5/28

CPC classification number: G02B5/284 ,  G02B6/29311 ,  G02B6/29358

Abstract: An optical cavity is combined with a MUX or a de-MUX device having substantially the same free-spectral range in order to enhance the bandwidth of the device. The optical cavity can be tuned to shift the frequencies of maximum insertion loss to match the center frequency of each channel. The reflectivities of the reflective surfaces of the cavity are judiciously selected to produce the insertion-loss spectrum needed to optimize the desired result. Multiple cavities can be used in series to refine the shape of the pass-band spectrum. A frequency window is used to fine tune the free-spectral range of the cavity and to shift the peaks of its insertion-loss spectrum to the desired frequencies. Inner and outer cavity surfaces are oriented to eliminate interference from secondary reflections.

Abstract translation: 光学腔与具有基本上相同的自由光谱范围的MUX或解复用器件组合，以便增强器件的带宽。 可以调整光腔以使最大插入损耗的频率与每个通道的中心频率相匹配。 明智地选择腔的反射表面的反射率以产生优化所需结果所需的插入损耗谱。 可以串联使用多个空腔来细化通带光谱的形状。 频率窗用于微调空腔的自由光谱范围，并将其插入损耗谱的峰值移动到所需的频率。 内外表面被定向以消除二次反射的干扰。