公开(公告)号：US20020044278A1

公开(公告)日：2002-04-18

申请号：US09905839

申请日：2001-07-13

Inventor： Tuan Le

IPC: G01N021/88

CPC classification number: G01N21/95623 ,  G01N21/94 ,  G01N21/9501 ,  G01N2201/0675

Abstract: A dynamic reflective spatial attenuator for use in an optical inspection apparatus. The attenuator takes the form of a two-dimensional micro-mechanical reflective array that, in the first operative position of a mirror element, reflects the desired scattered light toward a detector and, in the second operative position of a mirror element, reflects undesired scattered light into a light dump. The mirror array's fast response and flexibility allows for changes during mid-scan to increase the defect's or contaminant's signal relative to the substrate surface's signal.

Abstract translation: 一种用于光学检测装置的动态反射空间衰减器。 衰减器采取二维微机械反射阵列的形式，其在镜元件的第一操作位置中将所需的散射光反射到检测器，并且在镜元件的第二操作位置反射不期望的散射 光线进入轻型堆场。 反射镜阵列的快速响应和灵活性允许在中间扫描期间进行更改，以增加相对于基板表面信号的缺陷或污染物信号。

公开(公告)号：US5327286A

公开(公告)日：1994-07-05

申请号：US937987

申请日：1992-08-31

Applicant: Jeffrey B. Sampsell ,  Rachelle J. Bienstock

Inventor： Jeffrey B. Sampsell ,  Rachelle J. Bienstock

IPC: G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G02B26/08 ,  G02B27/46 ,  G02F3/00 ,  G06E3/00 ,  G06K9/74 ,  G06T7/00 ,  G02B9/64

CPC classification number: G06K9/745 ,  G01N21/95623 ,  G02B27/46 ,  G06E3/005 ,  G01N2201/0675

Abstract: An optical correlation unit for correlating the images of an inspection object and a reference object. The unit uses two phase modulating reflective spatial light modulators. A first spatial light modulator receives electronic input in the form of image data representing the inspection object. It modulates incoming light with this input and reflects the modulated output to a first Fourier transform lens. This lens provides the optical input to a second spatial light modulator, whose electronic input is transform data representing the complex conjugate of the Fourier transform of the reference image. The electronic input modulates the optical input, resulting in the Fourier product of the two images, which is then transformed to provide correlation data.

Abstract translation: 一种光学相关单元，用于将检查对象和参考对象的图像相关联。 该单元使用两个相位调制反射空间光调制器。 第一空间光调制器以表示检查对象的图像数据的形式接收电子输入。 它用该输入调制入射光，并将调制输出反射到第一傅立叶变换透镜。 该透镜向第二空间光调制器提供光输入，其电子输入是表示参考图像的傅里叶变换的复共轭的变换数据。 电子输入调制光学输入，产生两个图像的傅里叶积，然后将其转换以提供相关数据。