Advanced high speed, multi-level uncooled bolometer and method for fabricating same
    101.
    发明申请
    Advanced high speed, multi-level uncooled bolometer and method for fabricating same 有权
    先进的高速,多级非制冷辐照计及其制造方法

    公开(公告)号:US20020179837A1

    公开(公告)日:2002-12-05

    申请号:US09872436

    申请日:2001-06-01

    Inventor: Michael Ray

    CPC classification number: G01J5/20

    Abstract: A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity (36) there between and a substantially planar lower-level thermal isolation leg structure (20) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiation reflection structure is supported by an extension of the leg (18A). It is within the scope of these teachings that the upper-level incident radiation absorption and detection structure includes a stiffening member (50), such as one disposed frame-like about a periphery of the upper-level incident radiation absorption and detection structure. The resonant optical cavity is defined by a spacing that is a function of a wavelength of the incident radiation, and an adjacently disposed unit cell of an array of unit cells may have a resonant optical cavity having a different spacing, thereby providing enhanced sensitivity to a different wavelength.

    Abstract translation: 微辐射热计单元电池(10)包括基本上平面的上层入射辐射吸收和检测结构(24),与上层入射辐射吸收和检测结构间隔开的基本平坦的中间级辐射反射结构(26) 在其间限定光学谐振腔(36)和与中间级辐射反射结构间隔开并电耦合到上层入射辐射吸收和检测结构的基本上平坦的下级隔热腿结构(20),并且 底层读出电路。 较低级别的热隔离腿结构通过穿过中间级辐射反射结构中的孔(48)的腿(44)电耦合到上层入射辐射吸收和检测结构,腿也起 结构支撑构件。 低级隔热支腿结构通过另一支腿(18)电耦合到读出电路,该支脚终止于设置在下面的读出集成电路(12)上的电触点(16)上,中间级辐射反射结构 由腿部(18A)的延伸支撑。 在这些教导的范围内,上层入射辐射吸收和检测结构包括加强构件(50),例如围绕上层入射辐射吸收和检测结构的周边设置成框架状的加强构件(50)。 谐振光学腔由通过入射辐射的波长的函数的间隔限定,并且单元阵列阵列的相邻设置的单元可以具有不同间隔的谐振光学腔,从而提供对 不同波长。

    Wave-guide arrangement for infrared clinical thermometer
    102.
    发明申请
    Wave-guide arrangement for infrared clinical thermometer 审中-公开
    红外线温度计波导安排

    公开(公告)号:US20020163953A1

    公开(公告)日:2002-11-07

    申请号:US09846290

    申请日:2001-05-02

    Inventor: Chu-Yih Yu

    Abstract: A wave-guide arrangement includes a conical shell, a wave-guide mounted in the conical shell, a thermopile fastened to the wave-guide and adapted to detect radiation heart, the wave-guide having an isothermic base, a front neck perpendicularly extended from and formed integral with the center of the front side of the isothermic base, a coupling portion disposed at the center of the rear side of the isothermic base and adapted to receive the thermopile, and a center wave-guide hole axially extended through the neck, the isothermic base and the coupling portion, and adapted to guide radiation heat to the thermopile.

    Abstract translation: 波导装置包括锥形壳体,安装在锥形壳体中的波导件,固定到波导管并适合于检测辐射心脏的热电堆,波导管具有等温基座,前颈部垂直地从 并且与等温基体的前侧的中心成一体,设置在等温基底的后侧中心并适合于接收热电堆的联接部分和沿颈部轴向延伸的中心波导孔, 等温基底和耦合部分,并且适于将辐射热引导到热电堆。

    Infrared radiation detection device
    103.
    发明申请
    Infrared radiation detection device 审中-公开
    红外辐射检测装置

    公开(公告)号:US20020125431A1

    公开(公告)日:2002-09-12

    申请号:US09804213

    申请日:2001-03-12

    Inventor: Peter Hwang

    Abstract: An infrared radiation detection device is characterized by selecting a material which can be laminated with a thermal process, for example, a plastic-based material such as polyethylene (PE) or polyvinylchloride (PVC), to form the substrate of the infrared radiation device. The infrared radiation detection device combines the phosphors powder and the nonlinear crystal powder as the source for detecting the infrared radiation, thereby the infrared radiation detection device is capable of detecting the infrared radiation at different power level and different visible wavelengths. The active area of the infrared radiation detection device which includes an infrared radiation detection thin film is coated or printed onto the substrate in a margin-to-margin manner, such that the incident infrared radiation glares which is reflected from the surface of the non-active area of the infrared radiation detection device is reduced.

    Abstract translation: 红外线辐射检测装置的特征在于选择可与热处理层叠的材料,例如塑料基材料如聚乙烯(PE)或聚氯乙烯(PVC),以形成红外辐射装置的基板。 红外辐射检测装置将磷光体粉末和非线性晶体粉末作为用于检测红外辐射的源组合,从而红外辐射检测装置能够检测不同功率水平和不同可见波长的红外辐射。 包括红外线检测薄膜的红外线检测装置的有源区域以边缘到边缘的方式被涂布或印刷到基板上,使得入射的红外辐射眩光被从非透明的表面反射, 减少了红外辐射检测装置的有效面积。

    Ultra sensitive silicon sensor
    104.
    发明申请
    Ultra sensitive silicon sensor 失效
    超敏感硅传感器

    公开(公告)号:US20020117622A1

    公开(公告)日:2002-08-29

    申请号:US09738058

    申请日:2000-12-15

    Inventor: Nathan Bluzer

    CPC classification number: G01J5/20 G01J5/24

    Abstract: Electro-thermal feedback is utilized for removing thermal conductance between a bolometer's absorber element of a pixel in a thermal radiation sensor assembly and the environments through its mechanical support structure and electrical interconnects, thereby limiting the thermal conductance primarily through photon radiation. Zeroing the thermal conductance associated with the mechanical support structure and electrical interconnects is achieved by electro-thermal feedback that adjust the temperature of an intermediate stage of the mechanical support structure and electrical interconnects to equal the bolometer's absorber element temperature.

    Abstract translation: 电热反馈用于消除热辐射传感器组件中的辐射热计的像素的吸收元件与通过其机械支撑结构和电互连的环境之间的热传导,由此主要通过光子辐射来限制热传导。 归零与机械支撑结构和电气互连相关联的热传导通过电热反馈来实现,其通过调节机械支撑结构的中间阶段的温度和电互连以等于测辐射热计的吸收器元件温度。

    Microbolometer operating system
    105.
    发明申请
    Microbolometer operating system 有权
    微动热计操作系统

    公开(公告)号:US20020109092A1

    公开(公告)日:2002-08-15

    申请号:US09748784

    申请日:2000-12-26

    CPC classification number: H04N5/33 G01J5/22 H04N5/357 H04N5/374

    Abstract: A microbolometer for the detection of infrared radiation that has a substrate and an array of sensor elements fixed relative to the substrate. In one embodiment, at least some of the sensor elements are less thermally isolated from the substrate than others. The less thermally isolated sensor elements are selected when transients are expected to exist within the sensor array. In another embodiment, all of the sensor elements are deselected when transients are expected.

    Abstract translation: 用于检测具有衬底和相对于衬底固定的传感器元件的阵列的红外辐射的微测热计。 在一个实施例中,传感器元件中的至少一些与其它传感器元件的热隔离较少。 当期望在传感器阵列内存在瞬变时,选择较少的热隔离的传感器元件。 在另一个实施例中,当期望瞬态时,所有传感器元件都被取消选择。

    Infrared sensor
    107.
    发明申请
    Infrared sensor 有权
    红外传感器

    公开(公告)号:US20020069909A1

    公开(公告)日:2002-06-13

    申请号:US09858766

    申请日:2001-05-16

    Inventor: Ryuichi Kubo

    CPC classification number: G01J5/12

    Abstract: An infrared sensor is provided, which includes a substrate 12, a diaphragm 14 supported by the substrate, at least one thermocouple 17 provided with a cold junction 20 formed on the substrate and a hot junction 18 formed on the diaphragm, and an infrared-absorptive film 24 formed on the diaphragm so as to cover the hot junction of the thermocouple. The area of the infrared-absorptive film is 64% to 100% of the area of the diaphragm.

    Abstract translation: 提供了一种红外传感器,其包括基板12,由基板支撑的隔膜14,至少一个热电偶17,其设置有形成在基板上的冷结20和形成在隔膜上的热接点18以及红外吸收 薄膜24形成在隔膜上,以覆盖热电偶的热接头。 红外线吸收膜的面积为隔膜面积的64%〜100%。

    Infrared detecting device
    108.
    发明申请
    Infrared detecting device 失效
    红外线检测装置

    公开(公告)号:US20020060291A1

    公开(公告)日:2002-05-23

    申请号:US09988365

    申请日:2001-11-19

    CPC classification number: G01J5/02 G01J5/0225 G01J5/10 G01J5/12

    Abstract: A large-area high-output infrared detecting device S is realized in which a heat-separation-structure diaphragm 2 made of a thermal insulating material is formed through a cavity 7 from a silicon substrate 1, a thermocouple 4 serving as an infrared detection section is formed on the diaphragm 2, a heat absorption area 5 is formed on the thermocouple 4 through insulation layers 3a and 3b so as to have an etching aperture 9 for forming a cavity in the heat absorption area 5, and the cavity 7 is formed in a short time without being influenced by the size of the heat absorption area 5 to secure a structural strength.

    Abstract translation: 实现了一种大面积高输出红外检测装置S,其中由绝热材料制成的隔热结构隔膜2通过空腔7从硅基板1形成,热电偶4用作红外检测部分 形成在隔膜2上,通过绝缘层3a和3b在热电偶4上形成吸热区域5,以具有用于在吸热区域5中形成空腔的蚀刻孔9,并且形成空腔7 短时间,而不受吸热区域5的尺寸的影响,以确保结构强度。

    Thermal processing apparatus
    110.
    发明申请
    Thermal processing apparatus 失效
    热处理设备

    公开(公告)号:US20020020696A1

    公开(公告)日:2002-02-21

    申请号:US09838566

    申请日:2001-04-20

    CPC classification number: H01L21/67248 G01J5/0003

    Abstract: A method of detecting a temperature of an object in a multiple-reflection environment by a radiation pyrometer includes the steps of detecting a radiation strength emitted from a target region of an object, applying a correction to the radiation strength so as to correct the effect of multiple reflections of a radiation emitted from the object, applying a correction to the radiation strength so as to correct a reflection loss caused at an end surface of an optical medium interposed between the object and a sensing head of the pyrometer, applying a correction to the radiation strength with regard to an optical absorption loss caused in the optical medium, and applying a correction to the radiation strength with regard to a stray radiation coming in to the sensing head from a source other than the target region of the object.

    Abstract translation: 通过辐射高温计检测多反射环境中的物体的温度的方法包括以下步骤:检测从物体的目标区域发射的辐射强度,对辐射强度进行校正,以校正辐射强度的影响 从对象发射的辐射的多次反射,对辐射强度进行校正,以校正在介于物体和高温计的感测头之间的光学介质的端面处引起的反射损耗,对 关于在光学介质中引起的光吸收损失的辐射强度,以及对于从物体的目标区域以外的源进入感测头的杂散辐射,对辐射强度进行校正。

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