公开(公告)号：US20090277274A1

公开(公告)日：2009-11-12

申请号：US12306201

申请日：2007-03-28

Applicant: Paul Edward Vickery ,  Aidrian Nowell

Inventor： Paul Edward Vickery ,  Aidrian Nowell

IPC: G01L11/04 ,  G01R3/00

CPC classification number: G01L9/0025 ,  G01L1/165 ,  G01L27/002 ,  Y10T29/4913

Abstract: A method of manufacturing a pressure monitoring package comprises the steps of mounting a plurality of resonators onto a substrate 1, mounting the substrate 1 in a package base 11, mechanically constraining the package base 11 within a mechanical preloading jig, and adjusting the preload using the jig whilst measuring the frequency of the SAWs until the required frequency is obtained. A lid 7 is then welded onto the package base 11 using a laser welder, after which the preload frequency of the package 10 is fine tuned by using the laser welder to produce laser marks 21-28, 31-38 on the outside of the package 10.

Abstract translation: 一种制造压力监测组件的方法包括以下步骤：将多个谐振器安装到基板1上，将基板1安装在封装基座11中，在机械预加载夹具内机械约束封装基座11，并且使用 夹具，同时测量SAW的频率，直到获得所需的频率。 然后使用激光焊接机将盖7焊接到封装基座11上，然后通过使用激光焊接机在封装的外部产生激光标记21-28,31-38-来微调封装10的预载频率 10。

公开(公告)号：US20090001850A1

公开(公告)日：2009-01-01

申请号：US12190986

申请日：2008-08-13

Applicant: Victor Alexandrovich Kalinin ,  Raymond David Lohr ,  Arthur John Leigh

Inventor： Victor Alexandrovich Kalinin ,  Raymond David Lohr ,  Arthur John Leigh

IPC: H01L41/113

CPC classification number: G01L9/0025 ,  G01D11/245 ,  G01L1/165 ,  G01L19/14

Abstract: A SAW based sensor having a base and a lid engageable with the base to form an internal cavity therewith. A substrate is supported in the cavity on either tile base or the lid 13 and a dimple 16 is formed on the other which extends towards the substrate so as to engage against the substrate and apply a preload thereto. The base and lid include complementary threads by means of which they are attachable to each other. The preload applied to the substrate by the dimple 16 is adjustable by varying the rotational position of the lid relative to the base.

Abstract translation: 一种基于SAW的传感器，具有底座和与底座接合以与其形成内部空腔的盖子。 衬底被支撑在任一瓦片底座或盖13上的空腔中，并且另一个凹部16形成在另一个上，朝向衬底延伸以便与衬底接合并对其施加预载荷。 底座和盖子包括互补螺纹，通过它们可以彼此连接。 通过凹坑16施加到基底的预载荷可通过改变盖子相对于底座的旋转位置来调节。

公开(公告)号：US07357037B2

公开(公告)日：2008-04-15

申请号：US11226023

申请日：2005-09-14

Applicant: William P. Hnat ,  John F. Naber ,  Kevin M. Walsh

Inventor： William P. Hnat ,  John F. Naber ,  Kevin M. Walsh

IPC: G01N3/00

CPC classification number: G01D21/00 ,  A61B5/0031 ,  A61B5/076 ,  A61B5/4504 ,  A61B2090/064 ,  A61B2560/0219 ,  A61B2562/0247 ,  A61B2562/028 ,  A61B2562/043 ,  G01D9/005 ,  G01L1/142 ,  G01L1/165 ,  G01L1/22 ,  G01L1/225 ,  G01L19/086

Abstract: The present invention provides a system 10 for measuring and remotely monitoring strain in an element 1 having a strain sensor 20, a telemetry circuit 40 for transmitting strain data to a remote location, and a reader module 60 for transmitting energy to the telemetry circuit and receiving said data.

Abstract translation: 本发明提供了一种用于测量和远程监测具有应变传感器20的元件1中的应变的系统10，用于将应变数据传输到远程位置的遥测电路40以及用于向遥测电路发送能量的读取器模块60 说数据。

公开(公告)号：US07202589B2

公开(公告)日：2007-04-10

申请号：US10492724

申请日：2002-10-16

Applicant: Victor Alexandrovich Kalinin ,  Mark Lee

Inventor： Victor Alexandrovich Kalinin ,  Mark Lee

IPC: H03H9/25

CPC classification number: H03H9/02834 ,  G01D5/485 ,  G01L1/165 ,  G01L3/106

Abstract: A surface acoustic wave (SAW) sensor includes a transducer (240 provided on a substrate (23), wherein the transducer (24) is oriented on the substrate (23) so that the direction of acoustic wave propagation is such that the variation of sensor output with temperature, associated with the variation of the substrate third-elastic constants with temperature, substantially equal but opposite to the sum total of the variation of sensor output with temperature associated with the substrate linear temperature coefficient of expansion and with the variations with temperature of the substrate non-zero third order elastic constants, the substrate first-order elastic constants and the substrate density. The effect of temperature variation on sensor output is thereby minimized. This is achieved with a 35-degree arrangement or with reflective gratings inclined at an angle of 3.1 degrees to normal. Additionally, a robust package with a dish is given. Particular applications include the measurement of torque.

Abstract translation: 表面声波（SAW）传感器包括换能器（240），其设置在基板（23）上，其中换能器（24）定向在基板（23）上，使得声波传播的方向使得传感器 与温度的输出相关联的第三弹性常数与温度的变化相关，基本上等于但与传感器输出的变化与基板线性温度系数膨胀的温度的变化总和相反， 衬底非零三阶弹性常数，衬底一级弹性常数和衬底密度，因此温度变化对传感器输出的影响最小化，这是通过35度布置或反射光栅倾斜于 角度为3.1度至正常值，另外，还提供了带有盘的强力包装，具体应用包括测量 扭矩。

公开(公告)号：US07165455B2

公开(公告)日：2007-01-23

申请号：US11017171

申请日：2004-12-18

Applicant: Steven J. Magee ,  James D. Cook ,  James Z. Liu

Inventor： Steven J. Magee ,  James D. Cook ,  James Z. Liu

IPC: H03H9/25

CPC classification number: G01L1/165 ,  G01L3/10 ,  G01L9/0025

Abstract: Sensor systems and methods are disclosed herein, including a sensor chip, upon which at least two surface acoustic wave (SAW) sensing elements are centrally located on a first side (e.g., front side) of the sensor chip. The SAW sensing elements occupy a common area on the first side of the sensor chip. An etched diaphragm is located centrally on the second side (i.e., back side) of the sensor chip opposite the first side in association with the two SAW sensing elements in order to concentrate the mechanical strain of the sensor system or sensor device in the etched diagram, thereby providing high strength, high sensitivity and ease of manufacturing thereof.

Abstract translation: 传感器系统和方法在本文中公开，包括传感器芯片，至少两个表面声波（SAW）感测元件位于传感器芯片的第一侧（例如，前侧）的中心。 SAW感测元件占据传感器芯片第一侧上的公共区域。 与两个SAW传感元件相关联，蚀刻的隔膜位于与第一侧相对的传感器芯片的第二侧（即后侧）的中央，以将传感器系统或传感器设备的机械应变集中在蚀刻图中 从而提供高强度，高灵敏度和易于制造。

公开(公告)号：US07151337B2

公开(公告)日：2006-12-19

申请号：US10508468

申请日：2003-03-17

Applicant: Victor Alexandrovich Kalinin ,  Mark Lee ,  Raymond David Lohr ,  Arthur John Leigh

Inventor： Victor Alexandrovich Kalinin ,  Mark Lee ,  Raymond David Lohr ,  Arthur John Leigh

IPC: H03H9/00

CPC classification number: G01L19/0092 ,  G01L1/165 ,  G01L9/0025

Abstract: A pressure monitor has a base and a lid secured to the base to define a substantially fluid tight chamber. At least part of the lid is flexible and forms a diaphragm which deflects responsive to changes in fluid pressure surrounding the monitor. A projection provided on the diaphragm transmits movement thereof to a distortable substrate located within the chamber. A first SAW device is mounted on the distortable substrate, and at least a second and third SAW device are mounted within the chamber. The second SAW device carried on a reference substrate section has its direction of propagation inclined at an angle to the direction of propagation of at least one of the first and third SAW devices. This way movement of the diaphragm induced by a change in pressure in the zone surrounding the monitor results in distortion of the distortable substrate, which is measurable by the SAW device mounted thereon, without distorting said reference substrate section.

Abstract translation: 压力监视器具有固定到基座的底座和盖子，以限定基本上流体密封的腔室。 盖的至少一部分是柔性的，并且形成响应于监视器周围的流体压力变化而偏转的隔膜。 设置在隔膜上的突起将其运动传递到位于室内的可变形基板。 第一SAW器件安装在可变形衬底上，并且至少第二和第三SAW器件安装在腔室内。 携带在参考基板部分上的第二SAW器件具有与第一和第三SAW器件中的至少一个的传播方向成一角度的传播方向。 以这种方式由围绕监视器的区域中的压力变化引起的隔膜的移动导致可变形的衬底的变形，其可由安装在其上的SAW器件测量，而不会使所述参考衬底部分变形。

公开(公告)号：US20060232163A1

公开(公告)日：2006-10-19

申请号：US11109108

申请日：2005-04-18

Applicant: Richard Rudy ,  Graham Flower ,  John Larson ,  Mark Unkrich

Inventor： Richard Rudy ,  Graham Flower ,  John Larson ,  Mark Unkrich

IPC: H01L41/113

CPC classification number: G01K11/265 ,  G01L1/165 ,  G01L9/0025 ,  H03H9/0542

Abstract: An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.

Abstract translation: 一种用于检测目标环境变量（TEV）的装置和方法。 包括对目标环境变量具有第一响应的第一FBAR的第一薄膜体声波谐振器（FBAR）振荡器产生第一频率。 包括具有对目标环境变量的第二响应的第二FBAR的第二薄膜 - 体声波谐振器（FBAR）振荡器产生第二频率。 耦合到第一FBAR振荡器和第二FBAR振荡器的电路基于第一频率和第二频率来确定目标环境变量（例如，TEV的变化）。

公开(公告)号：US20060197411A1

公开(公告)日：2006-09-07

申请号：US11073345

申请日：2005-03-04

Applicant: Storrs Hoen ,  Mark Unkrich ,  William Trutna ,  John Larson ,  Richard Ruby ,  Graham Flower ,  Annette Grot

Inventor： Storrs Hoen ,  Mark Unkrich ,  William Trutna ,  John Larson ,  Richard Ruby ,  Graham Flower ,  Annette Grot

IPC: H01L41/04

CPC classification number: G01P15/097 ,  G01L1/165

Abstract: An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.

Abstract translation: 一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量（TEV）的装置和方法。 膜 - 体声波谐振器（FBAR）包括形成在FBAR晶片和表面中的声反射器。 第一电极形成在声反射体的表面上并具有表面。 在第一电极的表面上形成压电层并具有表面。 第二电极形成在压电层的表面上。 运动板相对于第二电极的表面以预定距离悬挂在空间中，并且电容耦合到FBAR。

公开(公告)号：US06619135B2

公开(公告)日：2003-09-16

申请号：US09971747

申请日：2001-10-05

Applicant: Edwin Liebemann ,  Dietmar Arndt

Inventor： Edwin Liebemann ,  Dietmar Arndt

IPC: G01N2904

CPC classification number: G01L1/165 ,  G01L1/255 ,  G01N2291/02827

Abstract: A force sensor having a substrate for measuring forces is provided, on which substrate a first path and a second path for travel of acoustic surface waves are arranged. The two paths are arranged essentially parallel to one another and their lengths are different. An effect of a force on the substrate is detectable by measuring a time needed for an acoustic surface wave to travel at least one of the first and second paths.

Abstract translation: 提供了具有用于测量力的基板的力传感器，在该基板上布置有用于传播声表面波的第一路径和第二路径。 两个路径基本上彼此平行地布置，并且它们的长度是不同的。 通过测量声表面波行进第一和第二路径中的至少一个所需的时间来检测力对衬底的影响。

公开(公告)号：US06484582B2

公开(公告)日：2002-11-26

申请号：US09829808

申请日：2001-04-10

Applicant: Wolfgang Ehrfeld ,  Volker Graeff ,  Frank Michel ,  Sven Gempper ,  Jens Heim ,  Joachim Hering ,  Horst Masuch ,  Edgar Streit ,  Vasilis Hassiotis ,  Henri Van Der Knokke

Inventor： Wolfgang Ehrfeld ,  Volker Graeff ,  Frank Michel ,  Sven Gempper ,  Jens Heim ,  Joachim Hering ,  Horst Masuch ,  Edgar Streit ,  Vasilis Hassiotis ,  Henri Van Der Knokke

IPC: G01M1302

CPC classification number: F16C33/58 ,  F16C19/06 ,  F16C19/522 ,  F16C19/525 ,  F16C41/008 ,  F16C2300/02 ,  G01L1/165 ,  G01L5/0009

Abstract: A rolling bearing which has as rolling bearing components one bearing race with a first running surface, a second bearing race with a second running surface opposed to the first surface, and rolling elements arranged between the running surfaces. At least one sensing unit is integrated into the rolling bearing components. The sensing unit can be interrogated by radio via antennas or can be connected to an interrogator by a cable. The sensing unit uses at least one component operating on the SAW or BAW principle to sense changes in length and/or changes in temperature in the material of the rolling bearing component and sends the result of the measurement after the arrival of a radio signal via the antenna or via a cable.