公开(公告)号：US4724222A

公开(公告)日：1988-02-09

申请号：US856175

申请日：1986-04-28

申请人： Martin Feldman

发明人： Martin Feldman

IPC分类号： G03F7/20 ,  H01L21/027 ,  H01L21/683 ,  B24B47/00 ,  B25B11/00 ,  B23B5/34 ,  H01L21/68

CPC分类号： G03F7/707 ,  G03F7/70708 ,  H01L21/6838 ,  Y10S438/949 ,  Y10T279/11 ,  Y10T29/41 ,  Y10T29/49998

摘要： A chuck for holding a workpiece (e.g., a semiconductor wafer) in a vacuum comprises a curved reference surface. By clamping the edges of the workpiece and maintaining its backside against the curved surface (or against pins mounted on the surface), the frontside of the workpiece can be thereby established in a precise equidistant relationship with respect to the reference surface. Such a chuck is advantageous for holding wafers to be lithographically patterned in a high-resolution way by electron-beam, ion-beam and X-ray-beam techniques.

摘要翻译： 用于在真空中保持工件（例如，半导体晶片）的卡盘包括弯曲的参考表面。 通过夹紧工件的边缘并将其背面保持抵靠弯曲表面（或安装在表面上的销钉），从而可以以相对于参考表面精确的等距关系建立工件的前端。 这种卡盘对于通过电子束，离子束和X射线束技术以高分辨率的方式将晶片保持光刻图案是有利的。

公开(公告)号：US4227347A

公开(公告)日：1980-10-14

申请号：US942268

申请日：1978-09-14

申请人： Johann Tam

发明人： Johann Tam

IPC分类号： B24B9/06 ,  B24B47/12 ,  B28D5/02 ,  B24B47/00

CPC分类号： B24B47/12 ,  B24B9/065 ,  B28D5/02

摘要： A drive mechanism for a wafer processing machine of the kind which holds a silicon wafer on a vacuum chuck and rotates the wafer for processing operations on the wafer periphery or upper surface incorporates a low-speed motor, a high-speed motor and an overrunning clutch. The low-speed motor is connected to a drive shaft for the chuck through the overrunning clutch and rotates the chuck and wafer at a relatively low and precisely-controlled speed while the edge of the wafer is contoured by a grinding wheel or while the upper surface is mechanically cleaned by a brush engaged with the upper surface of the wafer. The high-speed motor is directly connected to the drive shaft and, when energized for a rinsing and drying operation, rotates the chuck and wafer in the same direction of rotation as the low-speed motor but at high speed while the wafer is being rinsed and dried after the grinding or cleaning operation. During the grinding or cleaning operation the high-speed motor is energized toward rotation in a direction opposed to the direction of rotation produced by the low-speed motor. The biasing torque so produced insures against any slack or rebounding through the overrunning clutch which could result in skipping or chattering of the engagement of the grinding wheel with the periphery of the wafer during the contouring of the periphery of the wafer or which could result in loss of clamping contact between the chuck and the wafer.

摘要翻译： 用于在真空卡盘上保持硅晶片并使晶片旋转以用于在晶片周边或上表面上进行处理操作的晶片处理机的驱动机构包括低速电动机，高速电动机和超速离合器 。 低速电动机通过超越离合器连接到用于卡盘的驱动轴，并且以相对较低且精确控制的速度旋转卡盘和晶片，同时晶片的边缘由砂轮构成，或者当上表面 通过与晶片的上表面接合的刷子进行机械清洁。 高速电机直接连接到驱动轴上，当通电用于冲洗和干燥操作时，旋转卡盘和晶片与低速电机相同的旋转方向，但是在冲洗晶片的同时高速运转 并在研磨或清洁操作后干燥。 在研磨或清洁操作期间，高速电动机沿与低速电动机产生的旋转方向相反的方向被激励。 所产生的偏置扭矩确保抵抗超越离合器的任何松弛或反弹，这可能导致在晶片周边轮廓形成期间磨轮与晶圆周边的接合跳跃或颤动，或者可能导致损失 卡盘和晶片之间的夹紧接触。

公开(公告)号：US3769757A

公开(公告)日：1973-11-06

申请号：US3769757D

申请日：1972-06-01

申请人： BLACK & DECKER MFG CO

发明人： SUNDAY G

IPC分类号： B24B3/24 ,  B24B3/26 ,  B24B23/02 ,  B24B19/16 ,  B24B47/00

CPC分类号： B24B3/26 ,  B24B23/02

摘要： A portable, double insulated sharpener for drill bits or the like including a stand-up housing having a sharpening wheel driven by an electrically-operated motor. A manually-operable switch actuator is in an optimum position for one-hand actuation and control to energize the motor and sharpening wheel, while the user''s other hand is free to hold the drill bit in position. Structure is provided for normally urging the switch to an ''''off'''' position so that when manual operation of the switch is terminated, positive control of the sharpener is achieved. This affords the user a substantial degree of control over the amount of material being removed when dressing a tool bit or the like.

摘要翻译： 一种用于钻头等的便携式双重绝缘磨刀器，包括具有由电动马达驱动的磨刀轮的立式外壳。 手动操作的开关致动器处于用于单手致动和控制的最佳位置，以使电机和磨刀轮通电，而用户的另一只手可以将钻头保持在适当位置。 提供了通常将开关推向“关闭”位置的结构，使得当开关的手动操作终止时，实现了磨刀机的正面控制。 这为用户在修整工具刀等时对被去除的材料的量提供了相当程度的控制。

公开(公告)号：US3693301A

公开(公告)日：1972-09-26

申请号：US3693301D

申请日：1971-01-19

申请人： ANVAR

发明人： LEMAITRE GERARD

IPC分类号： B24B13/00 ,  B24B47/00

CPC分类号： B24B13/0043 ,  Y10S359/90

摘要： A method for producing optical elements with aspherical surfaces with a pneumatic device for deforming the plates to be formed into optical elements. The plates are deformed by reducing the pressure in a central chamber independently of the reduction of pressure in one or more concentric annular chambers. Toroidal sealing members are provided between the chambers and serve as supports for the plate to be deformed. The invention is particularly useful in optical instruments for astronomy.

摘要翻译： 一种用于制造具有非球面的光学元件的方法，其具有用于使要形成为光学元件的板变形的气动装置。 通过减小中心室中的压力而使板变形，而与一个或多个同心环形室中的压力降低无关。 环形密封构件设置在室之间并且用作板的变形的支撑件。 本发明在用于天文学的光学仪器中特别有用。

公开(公告)号：US3590532A

公开(公告)日：1971-07-06

申请号：US3590532D

申请日：1968-03-06

申请人： LAWRENCE LITTLEFIELD

发明人： LITTLEFIELD LAWRENCE

IPC分类号： B24B13/00 ,  B24B13/02 ,  B24B7/00 ,  B24B9/00 ,  B24B47/00

CPC分类号： B24B13/02 ,  B24B13/00

摘要： A machine for finishing lenses including a rotatable holder provided with controlled vacuum for holding and rotating the lens. An independently rotatable finishing tool is mounted for reciprocation along any of a number of arcuate paths of travel. The respective axes of rotation of the lens holder and the tool are selectively variable, and motor and cam means reciprocate the tool during various operations.

公开(公告)号：US2239091A

公开(公告)日：1941-04-22

申请号：US26608539

申请日：1939-04-05

申请人： NORTON CO

发明人： FLYGARE CARL G

IPC分类号： B24B47/00

CPC分类号： B24B47/00