APPARATUS AND METHOD OF TESTING AN OBJECT WITHIN A DRY GAS ENVIRONMENT

    公开(公告)号:US20220178815A1

    公开(公告)日:2022-06-09

    申请号:US17370090

    申请日:2021-07-08

    IPC分类号: G01N19/10

    摘要: An apparatus for testing an object may include a test chamber, a first chamber, a second chamber, and a gas supply module. The test chamber receives a test board for testing an object. The first chamber is under the test chamber and receives a lower surface of the test board. The second chamber surrounds the first chamber to isolate the first chamber from ambient air. The gas supply module supplies a dry gas to the second chamber to provide a positive pressure higher than an ambient pressure, thereby preventing the ambient air from infiltrating into the first chamber. Thus, during the testing of the object at a low temperature, the second chamber may prevent the humid ambient air from infiltrating into the first chamber to prevent condensation of water on the lower surface of the test board.