Method for improved photomask alignment after epitaxial process through 90° orientation change
    91.
    发明授权
    Method for improved photomask alignment after epitaxial process through 90° orientation change 有权
    在通过90°取向变化的外延工艺后改进光掩模对准的方法

    公开(公告)号:US06468704B1

    公开(公告)日:2002-10-22

    申请号:US09835027

    申请日:2001-04-16

    IPC分类号: G03F900

    摘要: A method for alignment to an alignment mark array within a patterned electronic material layer, formed on a substrate employed in a microelectronics fabrication, with improved registration accuracy of a subsequent step-and-repeat photomask pattern. There is first provided a substrate upon which is formed a patterned microelectronics layer containing an alignment mark array. There is then formed over the substrate and patterned layer, covering over the alignment marks, a subsequent layer or layers which may be of opaque material. In order to align properly a patterned photomask for patterning the overlying layer by means of conventional photolithography, the alignment mark array is located by first scanning with a laser light source contained within a step-and-repeat apparatus containing the patterned photomask and detecting the optical radiation signal scattered from the alignment mark array. The accuracy of location may be enhanced by rotating the orientation of the alignment mark array with respect to the direction of scanning with the laser light source by 90 degrees to render the subsequent orientation orthogonal to the first orientation, and then repeating the scanning operation. The altered nature of the back-scattered light signal from the orthogonal scanning direction provides additional information for improving the precision of location and alignment.

    摘要翻译: 一种用于对准图案化电子材料层内的对准标记阵列的方法,其形成在微电子制造中使用的衬底上,具有改进的后续步进重复光掩模图案的配准精度。 首先设置有基板,在其上形成包含对准标记阵列的图案化微电子层。 然后在衬底和图案化层上形成覆盖对准标记的后续层或层,其可以是不透明材料。 为了适当地对准用于通过常规光刻法图案化上覆层的图案化光掩模,通过首先用包含在包含图案化光掩模的步进重复设备中的激光源进行扫描来定位对准标记阵列,并且检测光学 从对准标记阵列散射的辐射信号。 可以通过将对准标记阵列的方向相对于激光光源的扫描方向旋转90度来使得随后的方向与第一方位正交,然后重复扫描操作来提高位置的精度。 来自正交扫描方向的反向散射光信号的改变性质提供了用于提高位置和对准精度的附加信息。

    Method, system, and article of manufacture for limiting access to program files in a shared library file

    公开(公告)号:US06385722B1

    公开(公告)日:2002-05-07

    申请号:US09492120

    申请日:2000-01-27

    IPC分类号: G06F924

    CPC分类号: G06F9/44552

    摘要: Methods, systems, and articles of manufacture consistent with the present invention limit access to parts of a shared software library by using a class loader that generates a selective interface between an external process and a program file (such as a class definition) in the shared library. This prevents external processes from loading parts of the shared library that were meant to remain private or internal to the library. Methods, systems, and articles of manufacture consistent with the present invention load a program file, such as a class definition, from the shared library and generate an interface (such as an object) to the loaded program file. A determination of whether the program file can be exported is performed based upon a status indicator associated with the interface. The interface limits access to the program file if it is determined that the program file cannot be exported.

    High efficiency color filter process for semiconductor array imaging devices
    93.
    发明授权
    High efficiency color filter process for semiconductor array imaging devices 有权
    用于半导体阵列成像器件的高效率滤色器工艺

    公开(公告)号:US06171885B2

    公开(公告)日:2001-01-09

    申请号:US09414925

    申请日:1999-10-12

    IPC分类号: H01L21339

    摘要: A microelectronic method is described for optimizing the fabrication of optical and semiconductor array structures for high efficiency color image formation in solid-state cameras. Disclosed is an ordered fabrication sequence in which microlens formation precedes color filter layer formation to enable increased image light collection efficiency, to encapsulate and protect the microlens elements from chemical and thermal processing damage, to minimize topographical underlayer variations which would axially misalign or otherwise aberrate microlens elements formed on non-planar surfaces, and, to complete the most difficult steps early in the process to minimize rework and scrap. A CMOS, CID, or CCD optoelectronic configuration is formed by photolithographically patterning a planar-array of photodiodes on a Silicon or other III-V, II-VI, or compound semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, planarized, and, a first convex microlens array of high curvature or other suitable lenses are formed thereon. A transparent encapsulant is deposited to planarize the microlens layer and provide a spacer for the successive deposition(s) of one or more color filter layers. The microlens array may be formed from positive photoresists and the spacer from negative resist, with close attention to matching the index of refraction at layer interfaces. A final surface layer comprising a color filter completes the solid-state color image-forming device.

    摘要翻译: 描述了用于优化固态照相机中用于高效率彩色图像形成的光学和半导体阵列结构的制造的微电子方法。 公开了一种有序的制造顺序,其中微透镜形成在滤色器层形成之前,以提高图像光采集效率,封装和保护微透镜元件免受化学和热处理损伤,以最小化将轴向不对准或以其他方式将微透镜像差的形貌底层变化 在非平面表面上形成的元件,并且在过程的早期完成最困难的步骤,以最小化返工和废料。 通过光刻地图案化硅或其它III-V,II-VI或化合物半导体衬底上的光电二极管平面阵列来形成CMOS,CID或CCD光电结构。 光电二极管阵列设置有金属遮光罩,钝化,平面化,并且在其上形成高曲率的第一凸形微透镜阵列或其它合适的透镜。 沉积透明的密封剂以使微透镜层平坦化,并为一个或多个滤色器层的连续沉积提供间隔物。 微透镜阵列可以由正光致抗蚀剂和来自负光刻胶的间隔物形成,密切关注层界面处的折射率的匹配。 包括滤色器的最终表面层完成了固态彩色图像形成装置。

    Motorized gear reducer
    95.
    发明授权

    公开(公告)号:US09945454B2

    公开(公告)日:2018-04-17

    申请号:US15281048

    申请日:2016-09-29

    发明人: Chia-Sheng Liang

    IPC分类号: F16H3/72 F16H57/021 F16H3/64

    摘要: A motorized gear reducer is provided with an axial support shaft in a housing; a speed reduction device including at least three stages of a sunless planetary gear train, each stage including a stationary ring gear, a rotatable ring gear served as a torque output, and a carrier on the support shaft and served as a torque input of each stage; planet gear sets, each in the carrier and including a first planet gear meshing the stationary ring gear, and a second planet gear meshing the rotatable ring gear, the rotatable ring gear of the last stage extending out of the housing to serve as a torque output of the speed reduction device; and a hollow motor surrounding the first stage and including a stator, a rotor surrounded and driven by the stator, and windings for rotating the rotor.

    PANCAKE GEAR MOTOR
    97.
    发明申请
    PANCAKE GEAR MOTOR 审中-公开

    公开(公告)号:US20180073597A1

    公开(公告)日:2018-03-15

    申请号:US15285691

    申请日:2016-10-05

    发明人: CHIA-SHENG LIANG

    摘要: A gear motor for decreasing speed at a mechanical power output is provided with a housing; a supporting shaft disposed along an axis of the housing and fastened in the housing; a planetary gear train as a speed reducer which is rotatably supported by the supporting shaft; and an electric motor including an outer stator and an inner permanent magnet, the electric motor disposed around the planetary gear train and within the housing. The planetary gear train includes a stationary sun gear secured to the housing and coaxially disposed around the axis of the housing; a driving sun gear as a torque output; planet gear assemblies equally spaced around an outer surface of the stationary sun gear. Each planet gear assembly includes coaxial first and second gears; and a carrier pivotably supported by the supporting shaft and attached to the permanent magnet.

    Wave Speed Reducer Having Self-locking Function And Compound Type Reducer Device
    98.
    发明申请
    Wave Speed Reducer Having Self-locking Function And Compound Type Reducer Device 有权
    具有自锁功能的减速机和复合式减速机

    公开(公告)号:US20170009867A1

    公开(公告)日:2017-01-12

    申请号:US14961836

    申请日:2015-12-07

    IPC分类号: F16H49/00 F16H1/46

    摘要: The invention provides a wave speed reducer having a self-locking function comprising a structure for outputting driving rotation of a bearing member or a spline wheel at a specific reduction ratio which drives rollers to rotate by a cam. A designed convex arc of the cam has self-locking function of restricting the rollers to reversely rotate so as to form a compound type reducer device having a multi-reducer function by mutually combining the wave speed reducer and a planetary gear set. To solve conventional problems, poor driving accuracy at tiny rotation angle and scarcity of self-locking function for conventional reducers are improved.

    摘要翻译: 本发明提供一种具有自锁功能的波浪减速器,其包括用于以特定减速比输出轴承构件或花键轮的驱动旋转的结构,该特定减速比驱动辊由凸轮旋转。 凸轮的设计凸弧具有限制辊反向旋转的自锁功能,从而通过相互组合波速减速器和行星齿轮组而形成具有多重还原功能的复合式减速装置。 为了解决常规问题,改善了传统减速机的微小旋转角度下的驾驶精度差和自锁功能的稀缺性。

    Network fragmentation and virtual machine migration in a scalable cloud computing environment
    99.
    发明授权
    Network fragmentation and virtual machine migration in a scalable cloud computing environment 有权
    可扩展云计算环境中的网络碎片和虚拟机迁移

    公开(公告)号:US08874749B1

    公开(公告)日:2014-10-28

    申请号:US13020802

    申请日:2011-02-03

    IPC分类号: G06F15/173

    摘要: A scalable cloud infrastructure serves two or more customers, where each customer is associated with at least one unit of virtual resources. The virtual resources are established by apportioning physical resources in the cloud infrastructure that are partitioned into pods within one or more zones in a scalable manner. Additionally, the cloud infrastructure establishes one or more management server clusters each comprising one or more management servers. The two or more customers create a number of virtual machines within pods in a zone. Due to the scalability of the cloud infrastructure, customer virtual machines may exist in non optimal locations within the zone. A method to migrate virtual machines and defragment customer networks is devised to optimally manage network traffic and data communication in a scaled cloud infrastructure.

    摘要翻译: 可扩展的云基础设施为两个或更多客户提供服务,每个客户与至少一个虚拟资源单元相关联。 虚拟资源是通过在云基础设施中分配物理资源来建立的,这些资源以可扩展的方式分为一个或多个区域内的荚。 此外,云基础设施建立一个或多个管理服务器集群,每个管理服务器集群都包含一个或多个管理服务器。 两个或多个客户在区域中的pod内创建了许多虚拟机。 由于云基础架构的可扩展性,客户虚拟机可能存在于该区域内的非最佳位置。 设计了一种迁移虚拟机和对客户网络进行碎片整理的方法,以便在缩放的云基础设施中最佳地管理网络流量和数据通信。