公开(公告)号：US09484190B2

公开(公告)日：2016-11-01

申请号：US14164182

申请日：2014-01-25

申请人： Yuri Glukhoy

发明人： Yuri Glukhoy

IPC分类号： C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  H01J37/32 ,  C23C16/455 ,  C23C16/44

CPC分类号： H01J37/3244 ,  C23C16/4404 ,  C23C16/45565 ,  C23C16/45572 ,  C23C16/45585 ,  C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  C23C16/5096 ,  H01J37/32091 ,  H01J37/32449 ,  H01J37/32477

摘要： Proposed is a showerhead-cooler system of a semiconductor-processing chamber with uniform distribution of plasma density. The showerhead has a plurality of through gas holes that are coaxial with respective channels of the gas-feeding cooler plate. On the gas inlet side, the though passages of the showerhead are provided with unequal conical nozzles characterized by a central angle that decreases from the peripheral part of the showerhead to the showerhead center. Such design provides uniformity of plasma density. Furthermore, in order to protect the walls of the nozzle and the walls of the gas holes from erosion that may be caused by the hollow-cathode phenomenon, these areas are coated with a thin protective coating that is resistant to electrical breakdown and chemical corrosion.

摘要翻译： 提出了具有均匀分布的等离子体密度的半导体处理室的喷头冷却器系统。 喷头具有与供气冷却器板的相应通道同轴的多个通气孔。 在气体入口侧，喷头的通道设置有不等的锥形喷嘴，其特征在于从喷头的周边部分到喷头中心减小的中心角。 这种设计提供等离子体密度的均匀性。 此外，为了保护喷嘴的壁和气孔的壁免受可能由中空阴极现象引起的侵蚀，这些区域涂覆有耐电击穿和化学腐蚀的薄保护涂层。

公开(公告)号：US09275840B2

公开(公告)日：2016-03-01

申请号：US14164179

申请日：2014-01-25

申请人： Yuri Glukhoy

发明人： Yuri Glukhoy

IPC分类号： H01J37/32 ,  B05D7/22 ,  C23C14/08 ,  C23C16/40

CPC分类号： H01J37/32449 ,  B05D7/22 ,  C23C14/083 ,  C23C16/405 ,  H01J37/32091 ,  H01J37/32477 ,  H01J37/32807 ,  H01J2237/0213 ,  H01J2237/04 ,  Y10T29/4998

摘要： Proposed is a method for providing uniform distribution of plasma density in a CCP plasma processing apparatus. According to the method the through gas holes of the showerhead of used in the plasma processing chamber of the apparatus are provided with conical nozzles formed on the side of the gas holes that face the gas reservoir of the cooler plate. The cone angle θ of the nozzles decreases in the direction from the peripheral portion to the central area of the showerhead in the range from 120° to 0°. Since the conical nozzles increase the gas gap between the showerhead and the cooler plate, more favorable conditions are created for electric breakdown. In order to protect the surfaces of the conical nozzles and gas holes from deterioration by hollow cathode discharge, these surface are coated by a protective coating resistant to electrical breakdown and chemical corrosion.

摘要翻译： 提出了一种在CCP等离子体处理装置中提供等离子体密度均匀分布的方法。 根据该方法，在装置的等离子体处理室中使用的喷头的通气孔设置有形成在与冷却器板的气体储存器相对的气孔侧的锥形喷嘴。 锥角与角度; 的喷嘴在从120°至0°的范围内从喷墨头的周边部分到中心区域的方向上减小。 由于锥形喷嘴增加了淋浴头和冷却板之间的气隙，因此为电击穿创造了更有利的条件。 为了保护锥形喷嘴和气孔的表面免受空心阴极放电的损坏，这些表面涂有耐电击穿和化学腐蚀的保护涂层。

公开(公告)号：US06974957B2

公开(公告)日：2005-12-13

申请号：US10782122

申请日：2004-02-18

申请人： Yuri Glukhoy

发明人： Yuri Glukhoy

IPC分类号： H01J27/00 ,  H01J49/14 ,  H01J49/16 ,  H01J49/40

CPC分类号： H01J49/0022 ,  H01J49/0445 ,  H01J49/147

摘要： The ionization device of the present invention is intended for use in conjunction with an aerosol TOF MS operating in a continuous mode and is capable of ionizing particulated substances in a wide range of particle masses. In the illustrated embodiment, the ionization unit consists of three coaxial cylindrical bodies having a three aligned longitudinal slits for directing electron beams from externally located electron gun onto the axially arranged flow of droplets. The cylindrical bodies are connected to voltage sources so that the external cylindrical body functions as an anode that extracts electrons from the current-heated filament. The central cylindrical body, in combination with the aforementioned anode, serves as an electron-energy control member for precisely controlling and selecting the energy of electrons that reach the flow of particles, while the inner cylindrical body functions as a decelerating member that can be used for adjusting energy of electrons which reached the flow of particles. The heated filament of each electron gun, which is used as a source of electrons, is inclined with respect to the aforementioned longitudinal axis whereby modulation applied to the elongated outer electrode of the electron gun provides different ionization conditions for specific particles of predetermined masses for analysis of which the aerosol TOF MS is tuned.

摘要翻译： 本发明的电离装置旨在与以连续模式操作的气溶胶TOF MS结合使用，并且能够将粒子质量范围内的微粒物质电离。 在所示实施例中，电离单元由具有三个对准的纵向狭缝的三个同轴圆柱体组成，用于将来自外部定位的电子枪的电子束引导到轴向排列的液滴流。 圆柱体连接到电压源，使得外部圆柱体用作从电流加热的细丝提取电子的阳极。 与上述阳极组合的中心圆柱体用作精确控制和选择达到颗粒流动的电子的能量的电子能量控制构件，而内圆柱体用作可以使用的减速构件 用于调节到达颗粒流的电子的能量。 用作电子源的每个电子枪的加热丝线相对于前述纵向轴线倾斜，由此施加到电子枪的细长外部电极的调制为预定质量的特定颗粒提供不同的电离条件用于分析 其中气溶胶TOF MS被调谐。

公开(公告)号：US20050258149A1

公开(公告)日：2005-11-24

申请号：US10851827

申请日：2004-05-24

申请人： Yuri Glukhoy ,  Gotze Popov ,  Junhai Liu ,  Anit Giri

发明人： Yuri Glukhoy ,  Gotze Popov ,  Junhai Liu ,  Anit Giri

IPC分类号： B23K9/00 ,  H05H1/34

CPC分类号： H05H1/34 ,  H05H2001/3484

摘要： A method and apparatus for manufacturing nanoparticles by passing a carrying fluid with a nanoparticle precursor through an RF plasma volume for heating the fluid with a nanoparticle precursor to a high temperature sufficient to synthesizing the nanoparticles. The suspension of the fluid with nanoparticles is passed to the thermalization zone in a diverging portion of the Laval nozzle for subjecting the fluid with nanoparticles to jumpwise adiabatic expansion at the exit from the converging portion of the Laval nozzle to the thermalization zone. At least the diverging portion has a curvilinear profile optimized with respect to conditions of said thermalization. In the thermalization zone, the flow of fluid with nanoparticles is surrounded by a cylindrical oil shower composed of discrete drops of oil. The oil shower is emitted from a shower ring that performs twisting motions. The particles are entrapped in the oil drops while the fluid is allows to pass in the radial outward direction from a portion of the thermalization zone. The oil drops with entrapped nanoparticles are collected and loaded into cups with the use semi-automatic or automatic mechanism.

摘要翻译： 一种用纳米颗粒前体通过载流体通过RF等离子体体积制造纳米颗粒的方法和装置，用于将具有纳米颗粒前体的流体加热到足以合成纳米颗粒的高温。 具有纳米颗粒的流体的悬浮液被传送到拉瓦尔喷嘴的发散部分的热化区，用于使纳米颗粒的流体在从拉瓦尔喷嘴的会聚部分到达热化区的出口处进行横向绝热膨胀。 至少发散部分具有相对于所述热化的条件优化的曲线轮廓。 在热化区域，具有纳米颗粒的流体流动被由离散油滴组成的圆柱形油淋浴包围。 油淋浴从执行扭转运动的淋浴环发射。 当流体允许从热化区的一部分沿径向向外的方向通过时，颗粒被捕获在油滴中。 收集含有纳米颗粒的油滴，并使用半自动或自动机制装载到杯中。

公开(公告)号：US10730239B1

公开(公告)日：2020-08-04

申请号：US16679253

申请日：2019-11-10

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy ,  Joshua Kerzhner ,  Michael Ryaboy ,  Andrew Kerzhner ,  Kevin Kerzhner

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy ,  Joshua Kerzhner ,  Michael Ryaboy ,  Andrew Kerzhner ,  Kevin Kerzhner

IPC分类号： B33Y10/00 ,  B29C64/209 ,  B29C64/159 ,  B29C64/264 ,  B29C64/25 ,  B29C64/245 ,  B29C64/241 ,  B33Y30/00

摘要： A 3D printer apparatus for printing a refractory materials on the surfaces of workpieces in accordance with a given program is disclosed. The apparatus contains a first generator for generating a first atmospheric ICP beam, a second generator for generating a second atmospheric ICP beam, and a bouncing tube between the generators for breaking clusters of precursor nanoparticles into elementary charged nanoparticles that penetrate in a premelted state into a plasma discharge formed in the second generator under the inductive coupling with a saddle antenna, which encompasses the second generator. The outlet nozzle of the second generator emits the second beam onto an extractor plate that is a part of a plasma gun, which converts the second beam into a finely controlled focusing beam capable of printing a material even on the inner surfaces of deep small diameter gas holes of showerheads.

公开(公告)号：US20090297730A1

公开(公告)日：2009-12-03

申请号：US12156148

申请日：2008-05-30

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/505

CPC分类号： C23C16/045 ,  C23C16/402 ,  C23C16/509 ,  H01J37/321

摘要： An antenna assembly for forming a barrier coating on the inner surface of a tube by means of a sealed annular chemical-plasma-reaction chamber defined by the inner wall of the tube, two spaced elements slidingly and sealingly moveable inside the tube, and a quartz tube that interconnects the cylindrical elements. The coating is formed by a PE CVD process generated inside the chamber by a transversal RF antenna unit which creates a plasma column that participates in rotation simultaneously with linear motion thus providing uniform coating of the inner surface of the tube. The method of the invention consists of depositing a layer of silicon dioxide onto the inner surface of a plastic tube by means of the aforementioned antenna assembly. The plasma column is rotated by the RF magnetic field which is rotated by using two RF generators of different frequencies that energize two groups of specifically interconnected coils.

摘要翻译： 一种用于通过由管的内壁限定的密封环形化学等离子体反应室在管的内表面上形成阻挡涂层的天线组件，两个间隔开的元件在管内滑动并密封地移动， 管连接圆柱形元件。 涂层由通过横向RF天线单元在腔室内产生的PE CVD工艺形成，其产生与线性运动同时参与旋转的等离子体柱，从而提供管的内表面的均匀涂覆。 本发明的方法包括通过上述天线组件将一层二氧化硅沉积在塑料管的内表面上。 等离子体柱被RF磁场旋转，RF磁场通过使用两个不同频率的RF发生器旋转，该RF发生器激励两组特别互连的线圈。

公开(公告)号：US20090284421A1

公开(公告)日：2009-11-19

申请号：US12152789

申请日：2008-05-16

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： H01Q1/26

CPC分类号： H01Q1/26 ,  H01Q7/00

摘要： An antenna assembly that consists of a holder which supports a transversal RF antenna with a plurality of multiturn coils connected in series or in parallel and intended for generation of an inductively coupled plasma discharge inside a container with a high plasma density in vicinity of the container's inner walls. The aforementioned discharge is used for inducing in the container a plasma chemical reaction between oxygen and organosilane with resulting deposition of the reaction product in the form of silicon dioxide onto the inner walls of the container for forming a fluid-impermeable barrier layer. A specific feature of the antenna is that it generates a magnetic field transversal to the longitudinal axis of the antenna, i.e., normal to the container's walls, where a maximal electric field, maximal plasma density and, correspondingly, maximal rate of deposition of silicon dioxide on the wall are provided.

摘要翻译： 一种天线组件，其由支撑横向RF天线的支架构成，所述横向RF天线具有串联或并联连接的多个多圈线圈，并且用于在容器内部具有高等离子体密度的容器内产生电感耦合等离子体放电 墙壁 上述放电用于在容器中诱导氧和有机硅烷之间的等离子体化学反应，从而将二氧化硅形式的反应产物沉积到容器的内壁上，以形成不透液体的阻隔层。 天线的一个特点是它产生横向天线纵向轴线的磁场，即垂直于容器壁的最大电场，最大等离子体密度以及相应地最大二氧化硅沉积速率 在墙上提供。

公开(公告)号：US20090280268A1

公开(公告)日：2009-11-12

申请号：US12152064

申请日：2008-05-12

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/505 ,  C23C16/22

CPC分类号： C23C16/458 ,  C23C16/045 ,  C23C16/509 ,  C23C16/54 ,  H01J37/321 ,  H01J37/32779 ,  H01J2237/3323

摘要： A method and an apparatus are proposed for simultaneously coating the inner walls of a plurality of hollow containers, such as bottles, with fluid-impermeable barrier layers applied by a PECVD method with the use of transversal antennas capable of creating plasma having density increased in the vicinity of the inner walls of the containers. The barrier-layer application period is divided into a coating period and a noncoating cooling period, with RF energy constantly maintained under working conditions with shunting thereof from the coating station to the dummy loads during noncoating periods used for cooling the plastic containers. The apparatus comprises a vacuum chamber with a conveyor that transports the containers in a preoriented state for interaction with a plurality of aligning elements that can be inserted into the container openings for subsequent fixation at equal distances in positions aligned with the antennas that can be inserted into the containers for generation of the coating-applying plasma.

摘要翻译： 提出了一种方法和装置，用于同时涂覆多个中空容器（例如瓶）的内壁，其中使用通过PECVD方法施加的流体不可渗透的阻挡层，其中使用横向天线能够产生密度在 容器内壁附近。 阻挡层施加期间被分为涂覆周期和非涂层冷却期间，在用于冷却塑料容器的非涂覆期间，RF能量在工作条件下始终保持在工作状态，并将其从涂布站分流到虚拟负载。 该设备包括具有输送机的真空室，该输送机将容器以预定向状态传送，以便与可以插入容器开口的多个对准元件相互作用，以便随后在与可插入的天线对准的位置处等距离地固定 用于产生涂敷等离子体的容器。

公开(公告)号：US09273393B2

公开(公告)日：2016-03-01

申请号：US14164168

申请日：2014-01-25

申请人： Yuri Glukhoy

发明人： Yuri Glukhoy

IPC分类号： C23C16/00 ,  C23C16/453 ,  C23C16/04 ,  C23C16/32 ,  C23C16/40 ,  C23C16/507 ,  C23C16/513 ,  C23C16/52 ,  H01J27/02

CPC分类号： C23C16/453 ,  C23C16/045 ,  C23C16/325 ,  C23C16/405 ,  C23C16/507 ,  C23C16/513 ,  C23C16/52 ,  H01J27/02

摘要： A torch system for deposition of protective coatings on the walls of holes and recesses on the surface of showerheads includes a capacitive coupling plasma processing apparatuses. The system comprises an atmospheric-pressure inductively coupled plasma reactor for the formation of a plasma torch, a showerhead holder for moving the showerhead relative to the tip of the torch during deposition of the protective coating, and a plasma torch focusing device for squeezing and focusing the tip of the torch to cross-sectional dimensions comparable with the diameters of the gas holes of the showerhead which may be as small as 0.5 mm. The focusing device is moveable relative to the plasma reactor and the treated object in the direction perpendicular to the surface of the object. The movements of the showerhead and of the focusing device relative to the treated surface are automatically adjusted through feedbacks for maintaining the torch tip at optimal parameters.

摘要翻译： 用于在喷头表面上的孔和凹槽的壁上沉积保护涂层的手电筒系统包括电容耦合等离子体处理装置。 该系统包括用于形成等离子体焰炬的大气压感应耦合等离子体反应器，用于在保护涂层沉积期间相对于割炬尖端移动喷头的喷头保持器，以及用于挤压和聚焦的等离子体焰炬聚焦装置 手电筒的顶端的横截面尺寸可与喷头的气孔的直径相当，可以小至0.5mm。 聚焦装置可以相对于等离子体反应器和被处理物体在垂直于物体表面的方向上移动。 淋浴头和聚焦装置相对于处理过的表面的运动通过反馈自动调节，以将割炬尖保持在最佳参数。

公开(公告)号：US08062470B2

公开(公告)日：2011-11-22

申请号：US12152064

申请日：2008-05-12

申请人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

发明人： Yuri Glukhoy ,  Tatiana Kerzhner ,  Anna Ryaboy

IPC分类号： C23C16/00 ,  H01L21/306

CPC分类号： C23C16/458 ,  C23C16/045 ,  C23C16/509 ,  C23C16/54 ,  H01J37/321 ,  H01J37/32779 ,  H01J2237/3323

摘要： A method and an apparatus are proposed for simultaneously coating the inner walls of a plurality of hollow containers, such as bottles, with fluid-impermeable barrier layers applied by a PECVD method with the use of transversal antennas capable of creating plasma having density increased in the vicinity of the inner walls of the containers. The barrier-layer application period is divided into a coating period and a noncoating cooling period, with RF energy constantly maintained under working conditions with shunting thereof from the coating station to the dummy loads during noncoating periods used for cooling the plastic containers. The apparatus comprises a vacuum chamber with a conveyor that transports the containers in a preoriented state for interaction with a plurality of aligning elements that can be inserted into the container openings for subsequent fixation at equal distances in positions aligned with the antennas that can be inserted into the containers for generation of the coating-applying plasma.

摘要翻译： 提出了一种方法和装置，用于同时涂覆多个中空容器（例如瓶）的内壁，其中使用通过PECVD方法施加的流体不可渗透的阻挡层，其中使用横向天线能够产生密度在 容器内壁附近。 阻挡层施加期间被分为涂覆周期和非涂层冷却期间，在用于冷却塑料容器的非涂覆期间，RF能量在工作条件下始终保持在工作状态，并将其从涂布站分流到虚拟负载。 该设备包括具有输送机的真空室，该输送机将容器以预定向状态传送，以便与可以插入容器开口的多个对准元件相互作用，以便随后在与可插入的天线对准的位置处等距离地固定 用于产生涂敷等离子体的容器。