Ammonia gas detection apparatus and a semiconductor fabrication line including the same
    3.
    发明授权
    Ammonia gas detection apparatus and a semiconductor fabrication line including the same 有权
    氨气检测装置和包括该氨气体检测装置的半导体制造生产线

    公开(公告)号:US09291571B2

    公开(公告)日:2016-03-22

    申请号:US13713359

    申请日:2012-12-13

    CPC classification number: G01N21/783 G01N21/05

    Abstract: An ammonia gas detection apparatus includes an ammonia sensor that is configured to detect an ammonia gas in a gas stream and to generate a first output signal when the ammonia gas is detected in the gas stream. The ammonia sensor does not detect the ammonia gas in the gas stream when the gas stream further includes an interference gas that disrupts operation of the ammonia sensor. A discoloration gauge includes a reaction solution that changes from a first color to a second color responsive to exposure to the ammonia gas in the gas stream, regardless of the presence of the interference gas, and a detector that generates a second output signal responsive to the reaction solution changing from the first color to the second color. A communication interface outputs the first and second output signal to a host computer that detects presence of the ammonia gas.

    Abstract translation: 氨气检测装置包括氨传感器,其被配置为在气流中检测氨气并且在气流中检测到氨气时产生第一输出信号。 当气流进一步包括干扰气体,氨气传感器的操作中断时,氨传感器不检测气流中的氨气。 变色仪包括响应于暴露在气流中的氨气而从第一颜色变为第二颜色的反应溶液,而不管是否存在干扰气体;以及检测器,其响应于所述第二颜色产生第二输出信号 反应溶液从第一种颜色变为第二种颜色。 通信接口将第一和第二输出信号输出到检测氨气存在的主计算机。

    Apparatus for treating substrate
    5.
    发明授权

    公开(公告)号:US10217653B2

    公开(公告)日:2019-02-26

    申请号:US15094072

    申请日:2016-04-08

    Abstract: A substrate-treating apparatus according to an example embodiment of the inventive concepts includes a support unit on which a substrate is loaded, an optical measurement unit providing light to the substrate to obtain image data and checking whether the substrate is abnormal or not, based on the image data, and a control unit controlling the support unit and the optical measurement unit. The control unit processes the image data transmitted from the optical measurement unit. The control unit includes an interlock control part performing an interlock operation interrupting a process performed on the substrate if an abnormal signal is detected from the image data.

    Ammonia Gas Detection Apparatus and a Semiconductor Fabrication Line Including the Same
    6.
    发明申请
    Ammonia Gas Detection Apparatus and a Semiconductor Fabrication Line Including the Same 有权
    氨气检测装置及包括其的半导体制造线

    公开(公告)号:US20130145987A1

    公开(公告)日:2013-06-13

    申请号:US13713359

    申请日:2012-12-13

    CPC classification number: G01N21/783 G01N21/05

    Abstract: An ammonia gas detection apparatus includes an ammonia sensor that is configured to detect an ammonia gas in a gas stream and to generate a first output signal when the ammonia gas is detected in the gas stream. The ammonia sensor does not detect the ammonia gas in the gas stream when the gas stream further includes an interference gas that disrupts operation of the ammonia sensor. A discoloration gauge includes a reaction solution that changes from a first color to a second color responsive to exposure to the ammonia gas in the gas stream, regardless of the presence of the interference gas, and a detector that generates a second output signal responsive to the reaction solution changing from the first color to the second color. A communication interface outputs the first and second output signal to a host computer that detects presence of the ammonia gas.

    Abstract translation: 氨气检测装置包括氨传感器,其被配置为在气流中检测氨气并且在气流中检测到氨气时产生第一输出信号。 当气流进一步包括干扰气体,氨气传感器的操作中断时,氨传感器不检测气流中的氨气。 变色仪包括响应于暴露在气流中的氨气而从第一颜色变为第二颜色的反应溶液,而不管是否存在干扰气体;以及检测器,其响应于所述第二颜色产生第二输出信号 反应溶液从第一种颜色变为第二种颜色。 通信接口将第一和第二输出信号输出到检测氨气存在的主计算机。

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