公开(公告)号：US20140206097A1

公开(公告)日：2014-07-24

申请号：US14148331

申请日：2014-01-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jong-Cheol Jeong ,  Kyung-Hwan Jeong ,  Jong-Soo Kim ,  Pil-Kwon Jun

IPC: G01N1/22

CPC classification number: G01N1/22 ,  G01N33/0009 ,  G01N33/0011 ,  Y10T137/87619 ,  Y10T436/25875

Abstract: An apparatus for providing a sample gas includes a gas dosing part, a first pressure gauge for measuring a pressure of a sample gas dosed through the gas dosing part, a plurality of flow lines positioned between the gas dosing part and a gas analyzer that can be opened or closed according to the pressure measured by the first pressure gauge, a plurality of control valves respectively formed in the plurality of flow lines and controlling the plurality of flow lines to be opened or closed, a bypass line formed on at least one of the plurality of flow lines and exhausting some of the sample gas flowing along the flow lines, and a controller for selecting one of the plurality of flow lines according to the pressure measured by the first pressure gauge and controlling the control valves formed in the selected flow line.

Abstract translation: 用于提供样品气体的装置包括气体计量部分，用于测量通过气体计量部分供给的样品气体的压力的第一压力计，位于气体计量部分和气体分析器之间的多个流动管线，其可以是 根据由第一压力表测量的压力打开或关闭，分别形成在多个流动管线中并控制多个流动管线打开或关闭的多个控制阀，形成在至少一个流路上的旁通管线 多个流动管线，并且排出沿着流动管线流动的一些样品气体;以及控制器，用于根据由第一压力计测量的压力选择多个流动管线中的一个，并控制形成在所选择的流动管线中的控制阀 。

公开(公告)号：US09638609B2

公开(公告)日：2017-05-02

申请号：US14148331

申请日：2014-01-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jong-Cheol Jeong ,  Kyung-Hwan Jeong ,  Jong-Soo Kim ,  Pil-Kwon Jun

IPC: G01N1/22 ,  G01N33/00

CPC classification number: G01N1/22 ,  G01N33/0009 ,  G01N33/0011 ,  Y10T137/87619 ,  Y10T436/25875

Abstract: An apparatus for providing a sample gas includes a gas dosing part, a first pressure gauge for measuring a pressure of a sample gas dosed through the gas dosing part, a plurality of flow lines positioned between the gas dosing part and a gas analyzer that can be opened or closed according to the pressure measured by the first pressure gauge, a plurality of control valves respectively formed in the plurality of flow lines and controlling the plurality of flow lines to be opened or closed, a bypass line formed on at least one of the plurality of flow lines and exhausting some of the sample gas flowing along the flow lines, and a controller for selecting one of the plurality of flow lines according to the pressure measured by the first pressure gauge and controlling the control valves formed in the selected flow line.

公开(公告)号：US09528949B2

公开(公告)日：2016-12-27

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。

公开(公告)号：US20140270078A1

公开(公告)日：2014-09-18

申请号：US14197737

申请日：2014-03-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jung-Hoon Kim ,  Jin-A Ryu ,  Chang-Ho Lee ,  Dong-Won Kim ,  Jae-Ho Kim ,  Jung-Dae Park ,  Nae-Ry Yu ,  Pil-Kwon Jun

IPC: G01N23/20

CPC classification number: G01N23/20025 ,  G01N2223/611

Abstract: In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.

Abstract translation: 在检测层的不均匀性的方法中，入射光可以在第一入射角位置被照射到该层的至少两个区域。 可以感测从层的两个区域反射的第一反射光。 可以在第二入射角位置将入射光照射到层的至少两个区域。 可以感测到从层的两个区域反射的第二反射光。 可以将第一反射光和第二反射光相互比较以获得层的不均匀性。 因此，可以发现具有斑点的层。