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公开(公告)号:US20250169064A1
公开(公告)日:2025-05-22
申请号:US18735338
申请日:2024-06-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Bitna Kim , Jinbum Kim , Kyeonggyu Lee , Sunguk Jang , Sunghwan Jang , Wonhee Choi
IPC: H10B12/00
Abstract: A semiconductor device includes a bit line on a substrate, a channel on the bit line, a first gate structure on a first sidewall of the channel, a contact structure between the bit line and the channel, the contact structure contacting the bit line and the channel, the contact structure including: a first contact including a semiconductor material doped with first impurities, the first impurities including a first diffusion coefficient, and a second contact on the first contact, the second contact contacting the first contact, the second contact including a semiconductor material doped with second impurities, the second impurities including a second diffusion coefficient, the second diffusion coefficient being less than the first diffusion coefficient, and a capacitor on and electrically connected to the channel.