公开(公告)号：US11948814B2

公开(公告)日：2024-04-02

申请号：US17747270

申请日：2022-05-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kangmin Park ,  Hyungho Kim ,  Dongwoo Wi ,  Hyunsoo Chun ,  Jiho Uh

IPC: H01L21/67 ,  F16K3/18 ,  F16K3/314 ,  F16K51/02 ,  H01L21/677 ,  F16K3/02

CPC classification number: H01L21/67126 ,  F16K51/02 ,  H01L21/67017 ,  H01L21/67739 ,  F16K3/0281 ,  F16K3/18 ,  F16K3/314

Abstract: A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.

公开(公告)号：US20240213053A1

公开(公告)日：2024-06-27

申请号：US18601017

申请日：2024-03-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kangmin Park ,  Hyungho Kim ,  Dongwoo Wi ,  Hyunsoo Chun ,  Jiho Uh

IPC: H01L21/67 ,  F16K3/02 ,  F16K3/18 ,  F16K3/314 ,  F16K51/02 ,  H01L21/677

CPC classification number: H01L21/67126 ,  F16K51/02 ,  H01L21/67017 ,  H01L21/67739 ,  F16K3/0281 ,  F16K3/18 ,  F16K3/314

Abstract: A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.

公开(公告)号：US20230130512A1

公开(公告)日：2023-04-27

申请号：US17747270

申请日：2022-05-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kangmin Park ,  Hyungho Kim ,  Dongwoo Wi ,  Hyunsoo Chun ,  Jiho Uh

IPC: H01L21/677 ,  H01L21/67

Abstract: A process chamber door for closing or opening an entrance of a process chamber through which a substrate to be process is loaded includes a seal plate including a front surface and a rear surface opposite to each other in a first direction, a connection block connected to the rear surface of the seal plate and including a central portion and two side portions connected to the rear surface of the seal plate, and a shaft connected to the central portion of the connection block. The connection block includes a first hinge groove and a second hinge groove. The first hinge groove is exposed at a bottom surface and a side surface of the connection block and the second hinge groove is exposed at an upper surface and the side surface of the connection block.