公开(公告)号：US08895226B2

公开(公告)日：2014-11-25

申请号：US14223540

申请日：2014-03-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyun-Woo Kim ,  Hai-Sub Na ,  Chil-Hee Chung ,  Han-Ku Cho

IPC: G03F7/20 ,  G03F7/038 ,  G03F7/095 ,  G03F7/11 ,  G02B5/20 ,  G02B5/22

CPC classification number: G03F7/0388 ,  G02B5/208 ,  G02B5/22 ,  G03F7/095 ,  G03F7/11

Abstract: Provided are a coating composition for deep ultraviolet (DUV) filtering during an extreme ultraviolet (EUV) exposure, the coating composition including about 100 parts by weight of a solvent including a first solvent (the first solvent being an alcoholic solvent); and about 0.05 parts by weight to about 5 parts by weight of a coating polymer having a degree of absorption of about 50%/μm or greater with respect to 193-nm incident light.

Abstract translation: 提供了一种在极紫外（EUV）暴露期间用于深紫外（DUV）过滤的涂料组合物，该涂料组合物包括约100重量份的包含第一溶剂（第一溶剂为醇溶剂）的溶剂; 和约0.05重量份至约5重量份的相对于193纳米入射光的吸收度为约50％/μm或更大的涂层聚合物。