公开(公告)号：US20160358998A1

公开(公告)日：2016-12-08

申请号：US15153742

申请日：2016-05-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dongwon LIM ,  KWEONJAE LEE

IPC: H01L49/02 ,  H01L27/108

CPC classification number: H01L28/75 ,  H01L27/10814 ,  H01L27/10823 ,  H01L27/10852 ,  H01L27/10876 ,  H01L27/10891 ,  H01L28/65 ,  H01L28/90 ,  H01L28/91

Abstract: A capacitor in a semiconductor device may include a lower electrode, a dielectric layer including a metal oxide and disposed on the lower electrode, a first material layer including aluminum oxide (AlxOy) and disposed on the dielectric layer, a second material layer including titanium oxynitride (TixOyNz) and disposed on the first material layer, and an upper electrode disposed on the second material layer, wherein the first material layer is between the dielectric layer and the second material layer, and the dielectric layer is between the lower electrode and the first material layer.

Abstract translation: 半导体器件中的电容器可以包括下电极，包括金属氧化物并且设置在下电极上的电介质层，包括氧化铝（Al x O y）并且设置在电介质层上的第一材料层，包括氮氧化钛的第二材料层 （TixOyNz）并且设置在第一材料层上，以及设置在第二材料层上的上电极，其中第一材料层在电介质层和第二材料层之间，并且介电层位于下电极和第一材料层之间 材料层。

公开(公告)号：US20240107753A1

公开(公告)日：2024-03-28

申请号：US18466357

申请日：2023-09-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dongwon LIM ,  Inseok BAEK ,  Sangbin AHN ,  Seokyeong CHOI ,  Seungyong HONG

IPC: H10B12/00

CPC classification number: H10B12/488 ,  H10B12/50

Abstract: An integrated circuit device including a first cell block on a substrate that includes a first cell area, a first dummy cell area surrounding the first cell area in a plan view, the first dummy cell area including first active regions and second active regions in an outer periphery of the first dummy cell area, the first active regions each having a first size and the second active regions each having a second size larger than the first size, first and second word lines extending in a first direction and alternating with each other in a second direction, each of the first word lines including a first landing area extending between a second active region and a first active region, the first active region being near and apart from the second active region in the second direction, and first word line contacts on the first landing area may be provided.