公开(公告)号：US20240319593A1

公开(公告)日：2024-09-26

申请号：US18381335

申请日：2023-10-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yool Kang ,  Taehui Kwon ,  Dongjun Kim ,  Ahram Suh ,  Miyeon Jung ,  Samjong Choi ,  Ohhwan Kweon ,  Minki Kim ,  Jaehyun Kim ,  Sunggun Shin ,  Seungryul Yoo ,  Heekyung Lee

IPC: G03F7/004 ,  G03F7/20

CPC classification number: G03F7/0048 ,  G03F7/2004

Abstract: Provided are a thinner composition, which may be generally used for an extreme ultraviolet (EUV) photoresist as well as KrF and ArF photoresists and exhibits improved performance in reduced resist coating (RRC) and edge bead removal (EBR), and which has an excellent pipe cleaning capability, and a method of treating a substrate surface by using the thinner composition. The thinner composition includes a C2-C4 alkylene glycol C1-C4 alkyl ether acetate, a C2-C3 alkylene glycol C1-C4 alkyl ether, and a cycloketone.

公开(公告)号：US11596764B2

公开(公告)日：2023-03-07

申请号：US16844292

申请日：2020-04-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Donghyun Lee ,  Sangbeom Nam ,  Hyogil Kim ,  Ahram Suh ,  Hoon Cho

IPC: A61M21/02 ,  G16H20/70 ,  A61B5/16 ,  A61B5/00 ,  A61M21/00

Abstract: An electronic device and method for providing information for stress relief are disclosed. The electronic device includes a user interface, at least one sensor, at least one processor operatively connected to the user interface and the at least one sensor, and a memory operatively connected to the at least one processor. The memory stores instructions to, when executed, cause the at least one processor to collect stress-related information through at least a part of the at least one sensor, identify contextual information of a user when stress calculated based on the collected stress-related information satisfies a designated condition, and guide at least one of a plurality of stress relief methods through the user interface at least based on the identified contextual information.