公开(公告)号：US20200180103A1

公开(公告)日：2020-06-11

申请号：US16582658

申请日：2019-09-25

Applicant: Samsung Display Co., Ltd.

Inventor： Sangheon YE ,  Seyoon OH ,  Seonghyeon CHEON

IPC: B24B49/12 ,  B24B37/005 ,  B24B37/27 ,  B24B37/34 ,  B24B53/017 ,  G01B11/06

Abstract: An apparatus for monitoring polishing includes a substrate transferring unit configured to transfer a substrate including at least one inorganic layer along a first direction; a polishing unit on the substrate transferring unit; a cleaning unit and a drying unit on the substrate transferring unit; and a monitoring unit on the substrate transferring unit, the monitoring unit including a plurality of optical probes configured to measure reflected lights reflected from respective ones of a plurality of different positions of the substrate. The polishing unit, the cleaning unit, the drying unit, and the monitoring unit are sequentially located along the first direction.

公开(公告)号：US20200152718A1

公开(公告)日：2020-05-14

申请号：US16662712

申请日：2019-10-24

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seungcheol KO ,  Junho SIM ,  Seyoon OH

IPC: H01L27/32 ,  H01L51/00 ,  H01L51/52 ,  H01L51/50 ,  H01L51/56

Abstract: A method of forming a pattern part includes forming a first film on a target object, the first film having a first cure shrinkage ratio, forming a second film on the first film, the second film having a second cure shrinkage ratio greater than the first cure shrinkage ratio, and patterning the first film and the second film to form a pattern.

公开(公告)号：US20200168850A1

公开(公告)日：2020-05-28

申请号：US16593191

申请日：2019-10-04

Applicant: Samsung Display Co., Ltd.

Inventor： Yongjun PARK ,  Sunghoon YANG ,  Seyoon OH ,  Jongmin LEE

IPC: H01L51/56 ,  H01L51/52 ,  H01L51/00

Abstract: A display device including: a display panel; a polarization film disposed on the display panel; and a reflective layer disposed on the polarization film, wherein the reflective layer is disposed between a first hole and a first groove, wherein the first hole passes through the display panel and the polarization film, and the first groove is provided in the display panel around the first hole.