公开(公告)号：US20200096861A1

公开(公告)日：2020-03-26

申请号：US16532389

申请日：2019-08-05

Applicant: Samsung Display Co., Ltd.

Inventor： Seunghyun MOON ,  Dongwook YANG ,  Hyundae LEE

IPC: G03F1/84 ,  G01N21/956 ,  G06T7/00 ,  G06T7/12 ,  G06T7/13 ,  G06T7/11 ,  G06T7/162 ,  G06T5/00

Abstract: A mask substrate inspection system includes a measurement target module, a camera module, and a control module. The measurement target module includes a mask substrate and a surface light source supplying a light to the mask substrate. The camera module generates image information of the mask substrate using the light from the surface light source. The control module determines whether defects are present in the mask substrate using the image information, without damaging the mask substrate.