MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20240425965A1

    公开(公告)日:2024-12-26

    申请号:US18631220

    申请日:2024-04-10

    Abstract: A mask assembly includes a mask frame including a frame opening, a first stick disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length, a second stick disposed on the first stick, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length, and a mask disposed on the second stick and including a mask opening overlapping the frame opening. The second stick includes a first center portion crossing the frame opening and a first end portion extending from the first center portion in the second direction.

    MASK FRAME ASSEMBLY, MASK ASSEMBLY AND DEPOSITION APPARATUS INCLUDING MASK ASSEMBLY

    公开(公告)号:US20240093350A1

    公开(公告)日:2024-03-21

    申请号:US18332895

    申请日:2023-06-12

    CPC classification number: C23C14/044 H10K71/166

    Abstract: A mask frame assembly includes a mask frame including: a first surface including a first long side part extending in a first direction, a first short side part extending in a second direction intersecting the first direction, and a first recessed part extending in the first direction or the second direction, a second surface opposite to the first surface and including a second long side part extending in the first direction, a second short side part extending in the second direction, and a second recessed part disposed in the first direction or the second direction, a third surface connected to the first surface and the second surface and defining a frame opening part; a first support member disposed in the first recessed part; and a second support member disposed in the second recessed part.

    DEPOSITION APPARATUS INCLUDING MASK ASSEMBLY AND SHAPE CORRECTION METHOD FOR MASK ASSEMBLY

    公开(公告)号:US20240191337A1

    公开(公告)日:2024-06-13

    申请号:US18389138

    申请日:2023-11-13

    CPC classification number: C23C14/042 C23C14/24 H10K71/166

    Abstract: A deposition apparatus includes: a chamber; a stage defining a stage-opening therein and disposed inside the chamber; a frame disposed on the stage and defining a frame-opening therein corresponding to the stage-opening; a mask coupled to the frame and defining a plurality of deposition openings therein corresponding to the frame-opening; a deposition source configured to spray a deposition material to the frame-opening; alignment units coupled to the stage and contacting the frame to move a position of the frame on the stage; and correction units each of which includes a magnetic force part disposed on the stage and adjacent to the frame, and a driving part configured to provide a magnetic force to the magnetic force part, wherein the correction units are configured to change a shape of the frame, and are coupled to the stage.

    MASK ASSEMBLY AND METHOD OF PROVIDING MASK ASSEMBLY

    公开(公告)号:US20220018011A1

    公开(公告)日:2022-01-20

    申请号:US17195771

    申请日:2021-03-09

    Abstract: A mask assembly includes a mask frame including an edge portion including opposing upper and lower portions along a first direction, and a support which between the upper portion and the lower portion of the edge portion along the first direction; and a mask attachable to the mask frame. The mask includes a pattern area corresponding to the support and including a first welded area at which the mask is attachable to the support, an alignment adjustment pattern adjacent to the first welded area along the first direction, and a second thickness of the mask at the alignment adjustment pattern which is less than a first thickness of the mask at the first welded area, and a first deposition area including upper deposition openings of the mask and between the upper portion and the support of the mask frame.

Patent Agency Ranking