公开(公告)号：US20220344624A1

公开(公告)日：2022-10-27

申请号：US17512224

申请日：2021-10-27

Applicant: Samsung Display Co., Ltd.

Inventor： Seungjin LEE ,  Sanghoon KIM ,  Jaesuk MOON ,  Jongsung PARK ,  Junghyun AHN

IPC: H01L51/56 ,  H01L51/00 ,  C23C16/04

Abstract: An apparatus for manufacturing a display apparatus includes a mask assembly; and a first magnet and a second magnet facing the mask assembly, the mask assembly includes a mask frame including an opening; and a mask sheet disposed on the mask frame, the mask sheet includes a first body portion including first openings; and a second body portion connected to the first body portion and including second openings, and the second body portion overlaps at least a portion of the first magnet and the second magnet.

公开(公告)号：US20230058121A1

公开(公告)日：2023-02-23

申请号：US18048686

申请日：2022-10-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.

公开(公告)号：US20210286268A1

公开(公告)日：2021-09-16

申请号：US17113948

申请日：2020-12-07

Applicant: Samsung Display Co., Ltd.

Inventor： Seil KIM ,  Jongbum KIM ,  Junghyun AHN ,  Sang Min YI

IPC: G03F7/20 ,  G09G3/36

Abstract: A metal mask according to some embodiments of the present disclosure may include a metal thin film having a first thickness and having a first region including a transmission region defining first openings penetrating the metal thin film, and a non-transmission region including an etching portion having a second thickness that is smaller than the first thickness, and a second region adjacent the first region, and defining second openings penetrating the metal thin film, wherein an opening density of the first region is less than an opening density of the second region, the opening density of the first region being defined as a number of the first openings per an area of the first region, and the opening density of the second region being defined as a number of the second openings per an area of the second region.

公开(公告)号：US20200232091A1

公开(公告)日：2020-07-23

申请号：US16541495

申请日：2019-08-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Junghyun AHN ,  Jaesuk Dustin MOON ,  Seungjin LEE

IPC: C23C16/04 ,  H01L51/56

Abstract: A mask frame assembly includes a frame, a mask combined to the frame and including a pattern area for deposition on a substrate, and a long-side stick combined to the frame and dividing the pattern area of the mask into unit cell patterns. The long-side stick may include a clad structure in which a relatively ferromagnetic layer and a relatively weak magnetic layer are stacked.

公开(公告)号：US20200259126A1

公开(公告)日：2020-08-13

申请号：US16723687

申请日：2019-12-20

Applicant: Samsung Display Co., Ltd.

Inventor： JAESUK MOON ,  Junghyun AHN ,  JONGBUM KIM ,  SEUNGJIN LEE

IPC: H01L51/56 ,  C23C14/04

Abstract: A mask assembly includes a frame in which an opening is defined, a support portion on the frame and overlapping with the opening, and a mask on the support portion and covering at least a portion of the opening. The support portion may include a central layer, a first outer layer on a first surface of the central layer, and a second outer layer on a second surface of the central layer, the second surface being opposite to the first surface.

公开(公告)号：US20200006659A1

公开(公告)日：2020-01-02

申请号：US16380946

申请日：2019-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Junghyun AHN

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/04 ,  C23C14/50 ,  B25B11/00

Abstract: A deposition apparatus including a driving unit configured to be movable in first and second directions crossing each other and to be rotatable about a rotation axis parallel to a third direction normal to a plane defined by the first and second directions, a first supporting member connected to a bottom end of the driving unit in the third direction, a magnet plate disposed below and connected to the first supporting member, a second supporting member disposed below the magnet plate, and a plurality of first connection units disposed on the first supporting member. The first connection units may extend in the third direction, may penetrate the first supporting member and the magnet plate, and may be connected to the second supporting member.