公开(公告)号：US20240088158A1

公开(公告)日：2024-03-14

申请号：US18508227

申请日：2023-11-13

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Ki Hyun KIM ,  Young Gil PARK ,  Jin Suk LEE ,  Jai Sun KYOUNG ,  Sug Woo JUNG

IPC: H01L27/12

CPC classification number: H01L27/1218 ,  H01L27/1225 ,  H01L27/1248

Abstract: A display device includes: a substrate; a polycrystalline silicon film on the substrate; and a first buffer film between the substrate and the polycrystalline silicon film and having one surface contacting the polycrystalline silicon film and another surface opposite to the one surface, wherein the one surface of the first buffer film has a first root mean square (RMS) roughness range, and the first RMS roughness range is 1.5 nm or less.

公开(公告)号：US20210175258A1

公开(公告)日：2021-06-10

申请号：US16935063

申请日：2020-07-21

Applicant: Samsung Display Co., Ltd.

Inventor： Ki Hyun KIM ,  Young Gil PARK ,  Jin Suk LEE ,  Jai Sun KYOUNG ,  Sug Woo JUNG

IPC: H01L27/12 ,  H01L51/52

Abstract: A display device includes: a substrate; a polycrystalline silicon film on the substrate; and a first buffer film between the substrate and the polycrystalline silicon film and having one surface contacting the polycrystalline silicon film and another surface opposite to the one surface, wherein the one surface of the first buffer film has a first root mean square (RMS) roughness range, and the first RMS roughness range is 1.5 nm or less.