公开(公告)号：US12077841B2

公开(公告)日：2024-09-03

申请号：US17516030

申请日：2021-11-01

Applicant: Samsung Display Co., Ltd.

Inventor： Kwanghyun Kim ,  Heonsik Ha ,  Woo-Seok Jeon

IPC: C23C14/04 ,  B05D1/32 ,  B05D5/06 ,  C23C14/08

CPC classification number: C23C14/042 ,  B05D1/32 ,  B05D5/06 ,  C23C14/08 ,  Y10T29/49826

Abstract: A manufacturing method of a mask assembly includes forming a cell mask including masking patterns and a mesh frame including conductive patterns disposed to correspond to the masking patters and disposing the cell mask and the mesh frame on a mask frame. The forming the cell mask and the mesh frame includes forming a polymer layer, a conductive layer, and a hard masking layer, forming a mask pattern layer including etch patterns, and forming the cell mask and the mesh frame using the mask pattern layer.