公开(公告)号：US11690278B2

公开(公告)日：2023-06-27

申请号：US16406250

申请日：2019-05-08

Applicant: Samsung Display Co., Ltd.

Inventor： Joon Hyung Kim ,  Young Su Chae ,  Woo Hyun Kim ,  Seung Jun Lee

IPC: H01L51/00 ,  H01S3/16 ,  H01S3/23 ,  G02B27/10 ,  H01L51/56 ,  H01L27/32 ,  B23K26/342

CPC classification number: H01L51/003 ,  B23K26/342 ,  G02B27/10 ,  H01L27/3244 ,  H01L51/0097 ,  H01L51/56 ,  H01S3/1618 ,  H01S3/1643 ,  H01S3/2383 ,  H01L2227/326 ,  H01L2251/5338

Abstract: A laser ablation apparatus includes: a laser beam generator including beam sources for generating laser beams, the laser beam generator using a solid-state laser; an output beam generator for generating an output beam using the laser beams; and a substrate stage including at least one stage on which a carrier substrate formed on the front of a panel substrate is disposed. The output beam generator may include: mixers for generating mixed laser beams having two linear-polarizations orthogonal to each other by mixing the laser beams; and a photo molding machine for generating the output beam using the mixed laser beams.

公开(公告)号：US20220212291A1

公开(公告)日：2022-07-07

申请号：US17503363

申请日：2021-10-18

Applicant: Samsung Display Co., LTD.

Inventor： Akifumi Sangu ,  Je Kil Ryu ,  Cheol Ho Park ,  Hae Sook Lee ,  Jin Hong Jeun ,  Young Su Chae ,  Gyoo Wan Han

IPC: B23K26/50 ,  B23K26/06

Abstract: A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.