公开(公告)号：US20150021592A1

公开(公告)日：2015-01-22

申请号：US14249525

申请日：2014-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： Ki-Seong SEO ,  Sung-Hoon YANG ,  Tae-Young AHN ,  Sang-Wook LEE ,  Jung-Yun JO ,  Heon-Sik HA ,  Jin-Ho HWANG ,  Kyung-Tea PARK ,  Jun-Mo IM

IPC: H01L27/12

CPC classification number: H01L29/7869 ,  H01L29/66969

Abstract: A method of manufacturing a display substrate includes forming a gate electrode on a base substrate, forming an active pattern which includes an oxide semiconductor and overlaps with the gate electrode, forming an etch stopper which partially covers the active pattern, and performing a plasma treatment process to promote a reduction reaction to portions of the active pattern exposed by the etch stopper, thereby forming a source electrode and a drain electrode.

Abstract translation: 制造显示基板的方法包括在基底基板上形成栅电极，形成包括氧化物半导体并与栅电极重叠的有源图案，形成部分覆盖有源图案的蚀刻停止层，以及进行等离子体处理工艺 以促进对由蚀刻停止件暴露的有源图案的部分的还原反应，从而形成源电极和漏电极。

公开(公告)号：US20160104803A1

公开(公告)日：2016-04-14

申请号：US14702479

申请日：2015-05-01

Applicant: Samsung Display Co., LTD.

Inventor： Tae-Young AHN ,  Ji-Hoon OH

IPC: H01L29/786 ,  H01L27/12

CPC classification number: H01L29/78696 ,  H01L27/1222 ,  H01L27/127 ,  H01L29/66765 ,  H01L29/78618 ,  H01L29/78669

Abstract: A display substrate includes a base substrate, a gate pattern, an active pattern and a data metal pattern. The gate pattern includes a gate electrode on the base substrate. The active pattern overlaps the gate electrode and includes a first active layer, a second active layer and a third active layer. The first active layer includes first amorphous silicon (a-Si:H). The second active layer is disposed on the first active layer and includes second amorphous silicon of which a concentration of hydrogen is higher than that of the first amorphous silicon. The third active layer is disposed on the second active layer and includes third amorphous silicon of which a concentration of hydrogen is substantially the same as that of the first amorphous silicon. The data metal pattern is disposed on the active pattern and includes source and drain electrodes spaced apart from each other.

Abstract translation: 显示基板包括基底基板，栅极图案，有源图案和数据金属图案。 栅极图案包括在基底衬底上的栅电极。 有源图案与栅极重叠，并且包括第一有源层，第二有源层和第三有源层。 第一有源层包括第一非晶硅（a-Si：H）。 第二有源层设置在第一有源层上，并且包括其浓度高于第一非晶硅的氢的第二非晶硅。 第三有源层设置在第二有源层上，并且包括其浓度与第一非晶硅的浓度基本相同的第三非晶硅。 数据金属图案设置在有源图案上，并且包括彼此间隔开的源极和漏极。