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公开(公告)号:US20170092480A1
公开(公告)日:2017-03-30
申请号:US15000001
申请日:2016-01-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: In-Sun YI , Ki-Chul KIM , Jong-Cheol LEE , Kyu-Hee HAN , Jae-Chul SHIN , Min-Hwa JUNG , Yu-Ho Won , Seung-Han LEE , Jin-Pil HEO
IPC: H01L21/02 , C23C16/458 , C23C16/455
CPC classification number: H01L21/0262 , C23C16/4412 , C23C16/45551 , C23C16/45574 , C23C16/4584
Abstract: Provided are gas injection apparatuses, thin-film deposition equipment, and methods for manufacturing a semiconductor device. The gas injection apparatus includes: a base plate; a first gas separation region on the base plate; first and second source gas supplying regions disposed on the base plate to either side of the first gas separation region, respectively, and configured to supply a source gas; and a first reaction gas supplying region disposed at a position on the base plate other than between the first gas separation region and the first source gas supplying region and between the first gas separation region and the second source gas supplying region, and configured to supply a reaction gas, wherein the first source gas supplying region and the second source gas supplying region protrude from the base plate, wherein each of the first source gas supplying region and the second source gas supplying region has a fan-shaped upper face, and wherein the first gas separation region is defined by a side wall of the first source gas supplying region and a side wall of the second source gas supplying region, the side walls facing each other and extending in radial directions.
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2.
公开(公告)号:US20200070223A1
公开(公告)日:2020-03-05
申请号:US16374871
申请日:2019-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyun-Joo JEON , Dae-Sung KIM , Seung-Han LEE , Sung-Hyup KIM
Abstract: A jig configured to clean a bowl of a spin coater includes a base disposed on a spin chuck of the spin coater, the base being configured to rotate by the spin chuck. The jig further includes a guide member extending in a first direction from an edge portion of the base toward an inner cover of the bowl and configured to guide a lower cleaning agent injected to a lower surface of the base to the inner cover of the bowl. The inner cover of the bowl is configured to receive photoresist from under the spin chuck.
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3.
公开(公告)号:US20180278837A1
公开(公告)日:2018-09-27
申请号:US15928737
申请日:2018-03-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Seung-Han LEE , Jong-Hyeok CHUN , Pyo-Jae KIM , Young-Kwon YOON , Moon-Soo KIM , Jong-Hun WON , Ki-Huk LEE
CPC classification number: H04N5/23216 , H04N5/23212 , H04N5/232127 , H04N5/23293 , H04N5/232939 , H04N5/232945 , H04N5/23296 , H04N5/2355
Abstract: An electronic device is provided. The electronic device includes a camera, a display, a memory, and at least one processor. The at least one processor may be configured to generate, based on information on pixels included in an image including at least one subject obtained using the camera, depth information corresponding to the at least one subject, to determine, based on the depth information, a first area displaying a first graphic indicator for indicating a focusing area on which the camera is focused, in the image displayed on the display, in a case in which a focus of the camera is controlled, and to display the first graphic indicator on at least some of the at least one subject included in the first area.
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