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公开(公告)号:US20170194479A1
公开(公告)日:2017-07-06
申请号:US15335492
申请日:2016-10-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: SEUNG RYUL LEE , SANG MOON LEE , CHUL KIM , JI EON YOON
IPC: H01L29/78 , H01L29/423
CPC classification number: H01L29/785 , H01L29/0673 , H01L29/42392 , H01L29/66469 , H01L29/7848 , H01L29/78696
Abstract: A semiconductor device has a fin-type structure which extends in a first direction and includes a laminate of oxide and semiconductor patterns disposed one on another on a first region of a substrate, and a first gate electrode that extends longitudinally in a second direction different from the first direction on the fin-type structure. Each oxide pattern is an oxidized compound containing a first element.